Virtual metrology

In semiconductor manufacturing, virtual metrology refers to methods to predict properties of a wafer based on machine parameters and sensor data of… (More)
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2013
2013
The incorporation of virtual metrology (VM) into run-to-run (R2R) control was one of the key advanced process control focus areas… (More)
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2012
2012
The semiconductor industry is continuously facing four main challenges in film characterization techniques: accuracy, speed… (More)
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2012
2012
Virtual Metrology (VM) is a method to conjecture manufacturing quality of a process tool based on data sensed from the process… (More)
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2011
2011
In semiconductor manufacturing, Virtual Metrology (VM) methodologies aim to obtain reliable estimates of process results without… (More)
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2011
2011
Frequent monitoring in both tool and process is required to detect the quality issue early so as to improve the process stability… (More)
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2009
2009
Nowadays, the semiconductor manufacturing becomes very complex, consisting of hundreds of individual processes. If a faulty wafer… (More)
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2007
2007
This paper proposes a dual-phase virtual metrology scheme. To consider both promptness and accuracy, this scheme generates dual… (More)
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Highly Cited
2007
Highly Cited
2007
In the semiconductor manufacturing industry, market demands and technology trends drive manufacturers towards increases in wafer… (More)
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2006
2006
IC metrology is a necessary means for measuring the fabrication performance in the semiconductor industry. It is significant for… (More)
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2005
2005
Daily wafer fabrication in semiconductor foundry depends on considerable metrology operations for tool-quality and process… (More)
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