Virtual metrology

In semiconductor manufacturing, virtual metrology refers to methods to predict properties of a wafer based on machine parameters and sensor data of…

Papers overview

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2017

Virtual metrology is an important tool for industrial automation. To accurately build regression models for virtual metrology, we…

2013

This paper is a description of how to predict and control the transistor threshold voltage ( Vth) for an advanced system on chip…

2012

Epitaxy is a process strongly dependent on wafer temperature. Unfortunately, the performance of the pyrometers in charge of…

2011

In semiconductor manufacturing, the state of the art for wafer quality control is based on product monitoring and feedback…

2011

Frequent monitoring in both tool and process is required to detect the quality issue early so as to improve the process stability…

2008

Metrology delay is a natural problem in the implementation of advanced process control scheme in semiconductor manufacturing…

2007

Virtual metrology (VM) is a technology to predict metrology variables using information about the state of the process for every…

2006

To reduce cost, this paper proposes a system architecture to simulate and assess the multivariate of equipment properties. The…

2006

The purpose of VM is to enable the manufacturers to conjecture the wafer quality and deduce the causes of defects without…

2004

: The purpose of imaging is to capture and record the details of an object for both current and future analysis in a…