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Virtual metrology
In semiconductor manufacturing, virtual metrology refers to methods to predict properties of a wafer based on machine parameters and sensor data of…
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Related topics
Related topics
4 relations
Chemical vapor deposition
Etching (microfabrication)
Semiconductor device fabrication
Wafer (electronics)
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2017
2017
Partial co-training for virtual metrology
C. Nguyen
,
Xin Li
,
R. D. Blanton
,
Xiang Li
IEEE International Conference on Emerging…
2017
Corpus ID: 42744836
Virtual metrology is an important tool for industrial automation. To accurately build regression models for virtual metrology, we…
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2016
2016
Manufacturing intelligence and smart production for industry 3.5 and empirical study of decision-based virtual metrology for controlling overlay errors
Chen-Fu Chien
,
Ying-Jen Chen
International Symposium on VLSI Design…
2016
Corpus ID: 1199365
Focusing on the challenges of wafer fabs with multiple tools and high-mix products, this study aims to propose a decision-based…
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2014
2014
Classification algorithms for virtual metrology
S. Tilouche
,
S. Bassetto
,
V. Nia
IEEE International Conference on Management of…
2014
Corpus ID: 2312860
Virtual metrology in quality control deals with drifts in product quality that occur during non-sampling periods. This approach…
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2014
2014
Insight extraction for semiconductor manufacturing processes
S. Pampuri
,
Gian Antonio Susto
,
Jian Wan
,
A. Johnston
,
P. O'Hara
,
S. McLoone
IEEE International Conference on Automation…
2014
Corpus ID: 6803840
In the semiconductor manufacturing environment it is very important to understand which factors have the most impact on process…
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2013
2013
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
Gian Antonio Susto
,
A. Johnston
,
P. O'Hara
,
S. McLoone
IEEE International Conference on Automation…
2013
Corpus ID: 15432891
Semiconductor fabrication involves several sequential processing steps with the result that critical production variables are…
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2011
2011
Exploring high-dimensional data space: Identifying optimal process conditions in photovoltaics
C. Suh
,
David J. Biagioni
,
+4 authors
W. Jones
37th IEEE Photovoltaic Specialists Conference
2011
Corpus ID: 12987190
We demonstrate how advanced exploratory data analysis coupled to data-mining techniques can be used to scrutinize the high…
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2011
2011
Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology
詹姆士·莫尼
2011
Corpus ID: 69892576
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In…
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2010
2010
Development of Virtual Metrology Models in Semiconductor Manufacturing Using Genetic Algorithm and Kernel Partial Least Squares Regression
Bokeon Kim
,
B. Yum
2010
Corpus ID: 107315550
Virtual metrology (VM), a critical component of semiconductor manufacturing, is an efficient way of assessing the quality of…
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2007
2007
Virtual Metrology inRTPwithWISR
W. Aderhold
,
I. Iliopoulos
2007
Corpus ID: 110548023
TheApplied Materials RTP systems areunique inproviding high resolution process dataparticularly lamppowerandtemperature asa…
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2004
2004
ON THE FUTURE OF 3-D VISUALIZATION IN NON-MEDICAL INDUSTRIAL X-RAY COMPUTED TOMOGRAPHY
J. M. Wells
2004
Corpus ID: 15071473
: The purpose of imaging is to capture and record the details of an object for both current and future analysis in a…
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