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Virtual metrology
In semiconductor manufacturing, virtual metrology refers to methods to predict properties of a wafer based on machine parameters and sensor data of…
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Related topics
Related topics
4 relations
Chemical vapor deposition
Etching (microfabrication)
Semiconductor device fabrication
Wafer (electronics)
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2019
2019
What are the Most Informative Data for Virtual Metrology? A use case on Multi-Stage Processes Fault Prediction
Marco Maggipinto
,
Gian Antonio Susto
,
Federico Zocco
,
S. McLoone
IEEE 15th International Conference on Automation…
2019
Corpus ID: 202700430
In recent years, Data intensive technologies have become widespread in semiconductor manufacturing. In particular, Virtual…
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2017
2017
Partial co-training for virtual metrology
C. Nguyen
,
Xin Li
,
R. D. Blanton
,
Xiang Li
IEEE International Conference on Emerging…
2017
Corpus ID: 42744836
Virtual metrology is an important tool for industrial automation. To accurately build regression models for virtual metrology, we…
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2016
2016
Manufacturing intelligence and smart production for industry 3.5 and empirical study of decision-based virtual metrology for controlling overlay errors
Chen-Fu Chien
,
Ying-Jen Chen
International Symposium on VLSI Design…
2016
Corpus ID: 1199365
Focusing on the challenges of wafer fabs with multiple tools and high-mix products, this study aims to propose a decision-based…
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2014
2014
Classification algorithms for virtual metrology
S. Tilouche
,
S. Bassetto
,
V. Nia
IEEE International Conference on Management of…
2014
Corpus ID: 2312860
Virtual metrology in quality control deals with drifts in product quality that occur during non-sampling periods. This approach…
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2013
2013
Virtual metrology enabled early stage prediction for enhanced control of multi-stage fabrication processes
Gian Antonio Susto
,
A. Johnston
,
P. O'Hara
,
S. McLoone
IEEE International Conference on Automation…
2013
Corpus ID: 15432891
Semiconductor fabrication involves several sequential processing steps with the result that critical production variables are…
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2011
2011
Exploring high-dimensional data space: Identifying optimal process conditions in photovoltaics
C. Suh
,
David J. Biagioni
,
+4 authors
W. Jones
37th IEEE Photovoltaic Specialists Conference
2011
Corpus ID: 12987190
We demonstrate how advanced exploratory data analysis coupled to data-mining techniques can be used to scrutinize the high…
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2011
2011
Methods and apparatuses for utilizing adaptive predictive algorithms and determining when to use the adaptive predictive algorithms for virtual metrology
詹姆士·莫尼
2011
Corpus ID: 69892576
Described herein are methods, apparatuses, and systems for determining adaptive predictive algorithms for virtual metrology. In…
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2010
2010
Development of Virtual Metrology Models in Semiconductor Manufacturing Using Genetic Algorithm and Kernel Partial Least Squares Regression
Bokeon Kim
,
B. Yum
2010
Corpus ID: 107315550
Virtual metrology (VM), a critical component of semiconductor manufacturing, is an efficient way of assessing the quality of…
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2007
2007
Virtual Metrology inRTPwithWISR
W. Aderhold
,
I. Iliopoulos
2007
Corpus ID: 110548023
TheApplied Materials RTP systems areunique inproviding high resolution process dataparticularly lamppowerandtemperature asa…
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2004
2004
ON THE FUTURE OF 3-D VISUALIZATION IN NON-MEDICAL INDUSTRIAL X-RAY COMPUTED TOMOGRAPHY
J. M. Wells
2004
Corpus ID: 15071473
: The purpose of imaging is to capture and record the details of an object for both current and future analysis in a…
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