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Wafer (electronics)
Known as:
Wafer (semiconductor)
, Semiconductor wafer
, Thick film
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A wafer, also called a slice or substrate, is a thin slice of semiconductor material, such as a crystalline silicon, used in electronics for the…
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Related topics
Related topics
50 relations
ARM architecture
Airgap (microelectronics)
Bow and warp of semiconductor wafers and substrates
Chemical vapor deposition
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2010
Highly Cited
2010
Electrical Modeling and Characterization of Through Silicon via for Three-Dimensional ICs
G. Katti
,
M. Stucchi
,
K. D. Meyer
,
W. Dehaene
IEEE Transactions on Electron Devices
2010
Corpus ID: 28295279
Three-dimensional ICs provide a promising option to build high-performance compact SoCs by stacking one or more chips vertically…
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Highly Cited
2007
Highly Cited
2007
Silicon Nanowire Solar Cells
L. Tsakalakos
,
J. Balch
,
J. Fronheiser
,
B. Korevaar
,
O. Sulima
,
J. Rand
2007
Corpus ID: 36310002
Over the past decade, silicon nanowire solar cells have been intensively explored as potential platforms for the next-generation…
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Highly Cited
2006
Highly Cited
2006
Silicon Vertically Integrated Nanowire Field Effect Transistors
J. Goldberger
,
A. Hochbaum
,
R. Fan
,
P. Yang
2006
Corpus ID: 11642569
Silicon nanowires have received considerable attention as transistor components because they represent a facile route toward sub…
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Highly Cited
2003
Highly Cited
2003
Enzyme-Coated Carbon Nanotubes as Single-Molecule Biosensors
K. Besteman
,
Jeong-O Lee
,
F. Wiertz
,
H. Heering
,
C. Dekker
2003
Corpus ID: 44096413
We demonstrate the use of individual semiconducting single-wall carbon nanotubes as versatile biosensors. Controlled attachment…
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Highly Cited
2003
Highly Cited
2003
Local Refractive Index Dependence of Plasmon Resonance Spectra from Individual Nanoparticles
J. Mock
,
David R. Smith
,
S. Schultz
2003
Corpus ID: 52574220
We present an experimental optical darkfield microscope study of the dependence of the plasmon resonance spectrum of individual…
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Highly Cited
2003
Highly Cited
2003
A 90nm high volume manufacturing logic technology featuring novel 45nm gate length strained silicon CMOS transistors
T. Ghani
,
M. Armstrong
,
+17 authors
M. Bohr
IEEE International Electron Devices Meeting
2003
Corpus ID: 44853052
This paper describes the details of a novel strained transistor architecture which is incorporated into a 90nm logic technology…
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Highly Cited
2003
Highly Cited
2003
Silicon photomultiplier and its possible applications
P. Buzhan
,
B. Dolgoshein
,
+8 authors
S. Smirnov
2003
Corpus ID: 38631383
Highly Cited
1998
Highly Cited
1998
Synthesis of individual single-walled carbon nanotubes on patterned silicon wafers
J. Kong
,
H. Soh
,
A. Cassell
,
C. Quate
,
H. Dai
Nature
1998
Corpus ID: 4421869
Recent progress in the synthesis of high-quality single-walled carbon nanotubes (SWNTs) has enabled the measurement of their…
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Review
1998
Review
1998
Bulk micromachining of silicon
G. Kovacs
,
N. Maluf
,
K. Petersen
Proceedings of the IEEE
1998
Corpus ID: 36957881
Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication…
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Highly Cited
1990
Highly Cited
1990
Semiconductor wafer bonding
U. Gösele
,
O.-Y. Tong
1990
Corpus ID: 53965265
▪ Abstract When mirror-polished, flat, and clean wafers of almost any material are brought into contact at room temperature, they…
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