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Chemical vapor deposition

Known as: Microwave Plasma-assisted CVD, Low pressure chemical vapor deposition, PEVCD 
Chemical vapor deposition (CVD) is a chemical process used to produce high quality, high-performance, solid materials. The process is often used in… Expand
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Review
2019
Review
2019
In recent years, development to increase the performance of Pt-based catalysts and reduce the cost has received significant… Expand
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Review
2019
Review
2019
Abstract. Motivated by the need to predict how the Arctic atmosphere will change in a warming world, this article summarizes… Expand
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Review
2018
Review
2018
Physical vapour deposition (PVD) is a well-known technology that is widely used for the deposition of thin films regarding many… Expand
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Review
2018
Review
2018
Carbon nanomaterials have been widely explored for use as electrode materials for the fabrication of electrochemical batteries… Expand
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Review
2018
Review
2018
Abstract Oily wastewater is an extensive source of pollution to soil and water, and its harmless treatment is of great importance… Expand
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Review
2018
Review
2018
In this article, we provide a broad and extensive review of beta titanium alloys. Beta titanium alloys are an important class of… Expand
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Review
2018
Review
2018
Abstract Biosensor development includes the deposition of (nano)materials onto a conductive electrode surface, which is a crucial… Expand
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Review
2018
Review
2018
Atmospheric aerosols have complex and variable compositions and properties. While scientific interest is centered on the health… Expand
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Review
2018
Review
2018
Summary Solid-state batteries (SSBs) have attracted increasing attention as one of the most promising next-generation batteries… Expand
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Review
2017
Review
2017
Abstract Chemical looping combustion (CLC) has gained considerable ground in energy production due to its inherent carbon capture… Expand