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Semiconductor device fabrication

Known as: Water semiconductor fabrication, Semiconductor Water Fabrication, Semiconductor process technology 
Semiconductor device fabrication is the process used to create the integrated circuits that are present in everyday electrical and electronic devices… Expand
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Review
2019
Review
2019
In recent years, development to increase the performance of Pt-based catalysts and reduce the cost has received significant… Expand
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Highly Cited
2015
Highly Cited
2015
This paper presents a portable, assistive, soft robotic glove designed to augment hand rehabilitation for individuals with… Expand
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Highly Cited
2010
Highly Cited
2010
We report subnanometer linewidth uniformity in silicon nanophotonics devices fabricated using high-volume CMOS fabrication tools… Expand
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Highly Cited
2009
Highly Cited
2009
This paper introduces McPAT, an integrated power, area, and timing modeling framework that supports comprehensive design space… Expand
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Highly Cited
2008
Highly Cited
2008
In this study, we present a small-size dual medical implant communications service (MICS) (402-405 MHz) and industrial… Expand
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Highly Cited
2007
Highly Cited
2007
The field of modular self-reconfigurable robotic systems addresses the design, fabrication, motion planning, and control of… Expand
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Highly Cited
2005
Highly Cited
2005
A circuit for the electrical system of an automotive vehicle, such as a truck, interfaces a brake switch, a combination turn… Expand
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Highly Cited
2003
Highly Cited
2003
Chapter 1. Introduction. Chapter 2. Crystal Growth. Chapter 3. Silicon Oxidation. Chapter 4. Photolithography. Chapter 5. Etching… Expand
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Highly Cited
2000
Highly Cited
2000
Yield enhancement in semiconductor fabrication is important. Even though IC yield loss may be attributed to many problems, the… Expand
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Highly Cited
1997
Highly Cited
1997
Abstract We introduce the gas electrons multiplier (GEM), a composite grid consisting of two metal layers separated by a thin… Expand
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