Skip to search formSkip to main contentSkip to account menu

Semiconductor device fabrication

Known as: Water semiconductor fabrication, Semiconductor Water Fabrication, Semiconductor process technology 
Semiconductor device fabrication is the process used to create the integrated circuits that are present in everyday electrical and electronic devices… 
Wikipedia (opens in a new tab)

Related topics

Related topics

50 relations
Airgap (microelectronics)Antenna effectApple A9Atom (system on chip)

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2010
2010
A Lateral-Axis Microelectromechanical Tuning-Fork Gyroscope With Decoupled Comb Drive Operating at Atmospheric Pressure
In this paper, a silicon bulk micromachined lateral-axis tuning-fork gyroscope (TFG) with a decoupled comb drive and torsional… 
2008
2008
Improvements in Fabrication Process for Nb-Based Single Flux Quantum Circuits in Japan
We developed an Nb-based fabrication process for single flux quantum (SFQ) circuits in a Japanese government project that began… 
Highly Cited
2004
Highly Cited
2004
Controlled Growth of Y-Junction Nanotubes Using Ti-Doped Vapor Catalyst
We demonstrate a bulk process for the synthesis of Y-junction carbon nanotubes using Ti-doped Fe catalysts. It is shown that the… 
Highly Cited
2000
Highly Cited
2000
High-resolution micromachined interferometric accelerometer
We demonstrate a promising type of microfabricated accelerometer that is based on the optical interferometer. The interferometer… 
Highly Cited
1998
Highly Cited
1998
Run by run advanced process control of metal sputter deposition
Metal sputter deposition processes for semiconductor manufacturing are characterized by a decrease in deposition rate from run to… 
1998
1998
Potentiometric pCO2 sensor using polyaniline-coated pH-sensitive electrodes
A very simple method of constructing a differential pCO2 sensor device is described, using polyaniline-based pH electrodes in… 
Highly Cited
1994
Highly Cited
1994
Scheduling Manufacturing Systems of Re-Entrant Lines
Re-entrant lines axe manufacturing systems where parts may return more than once to the same machine, for repeated stages of… 
1994
1994
Study of C49‐TiSi2 and C54‐TiSi2 formation on doped polycrystalline silicon using in situ resistance measurements during annealing
In situ resistance versus temperature or time for reactions between 32 and 57.5 nm of titanium and undoped or doped… 
Highly Cited
1991
Highly Cited
1991
Molecular and supermolecular origins of enhanced electric conductivity in template-synthesized polyheterocyclic fibrils. 1. Supermolecular effects
Abstract : The pores in a nanoporous membrane can be used as templates for the synthesis of nanostructures. We have recently… 
Highly Cited
1989
Highly Cited
1989
Superconductive analog signal processing devices
Real-time signal processing is important in many emerging applications in areas such as pulse-compression radar, spread-spectrum…