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Semiconductor device fabrication

Known as: Water semiconductor fabrication, Semiconductor Water Fabrication, Semiconductor process technology 
Semiconductor device fabrication is the process used to create the integrated circuits that are present in everyday electrical and electronic devices… 
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Related topics

Related topics

50 relations
Airgap (microelectronics)Antenna effectApple A9Atom (system on chip)

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2008
Highly Cited
2008
A NOVEL UWB ELLIPTICAL SLOT ANTENNA WITH BAND-NOTCHED CHARACTERISTICS
This paper presents a novel band-notched elliptical slot antenna for Ultra Wide-Band (UWB) communication, which is printed on a… 
Highly Cited
2005
Highly Cited
2005
6 nm half-pitch lines and 0.04 µm2 static random access memory patterns by nanoimprint lithography
A key issue in nanoimprint lithography (NIL) is determining the ultimate pitch resolution achievable for various pattern shapes… 
Highly Cited
2004
Highly Cited
2004
Carbon nanotube transistor operation at 2.6 Ghz
We present the first demonstration of single-walled carbon nanotube transistor operation at microwave frequencies. To measure the… 
Highly Cited
2004
Highly Cited
2004
Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
An integrated circuit combining single-walled carbon nanotube (SWNT) devices with n-channel metal oxide semiconductor (NMOS… 
Highly Cited
1996
Highly Cited
1996
ELECTRON TRANSFER IN SELF-ASSEMBLED INORGANIC POLYELECTROLYTE/METAL NANOPARTICLE HETEROSTRUCTURES
The way in which molecular building blocks are arranged within supramolecular structures has a marked effect on their chemical… 
Highly Cited
1993
Highly Cited
1993
Fabrication of silicon nanostructures with a scanning tunneling microscope
A technique is presented for fabricating Si nanostructures with a scanning tunneling microscope operated in air. The process… 
Highly Cited
1991
Highly Cited
1991
Ultra low power CMOS technology
This paper discusses the motivation, opportunities, and problems associated with implementing digital logic at very low voltages… 
Highly Cited
1991
Highly Cited
1991
Molecular and supermolecular origins of enhanced electric conductivity in template-synthesized polyheterocyclic fibrils. 1. Supermolecular effects
Abstract : The pores in a nanoporous membrane can be used as templates for the synthesis of nanostructures. We have recently… 
Highly Cited
1982
Highly Cited
1982
Fabrication of high-performance LDDFET's with Oxide sidewall-spacer technology
A fabrication process for the Lightly Doped Drain/Source Field-Effect Transistor, LDDFET, that utilizes RIE produced SiO2sidewall… 
Highly Cited
1977
Highly Cited
1977
GaAs MESFET logic with 4-GHz clock rate
Monolithic digital ICs with GaAs MESFETs have been built and operated at clock frequencies up to 4.5 GHz. The fabrication process… 
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