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Semiconductor device fabrication

Known as: Water semiconductor fabrication, Semiconductor Water Fabrication, Semiconductor process technology 
Semiconductor device fabrication is the process used to create the integrated circuits that are present in everyday electrical and electronic devices… 
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Papers overview

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Highly Cited
2008
Highly Cited
2008
This paper presents a novel band-notched elliptical slot antenna for Ultra Wide-Band (UWB) communication, which is printed on a… 
Highly Cited
2005
Highly Cited
2005
A key issue in nanoimprint lithography (NIL) is determining the ultimate pitch resolution achievable for various pattern shapes… 
Highly Cited
2004
Highly Cited
2004
We present the first demonstration of single-walled carbon nanotube transistor operation at microwave frequencies. To measure the… 
Highly Cited
2004
Highly Cited
2004
An integrated circuit combining single-walled carbon nanotube (SWNT) devices with n-channel metal oxide semiconductor (NMOS… 
Highly Cited
1996
Highly Cited
1996
The way in which molecular building blocks are arranged within supramolecular structures has a marked effect on their chemical… 
Highly Cited
1993
Highly Cited
1993
A technique is presented for fabricating Si nanostructures with a scanning tunneling microscope operated in air. The process… 
Highly Cited
1991
Highly Cited
1991
This paper discusses the motivation, opportunities, and problems associated with implementing digital logic at very low voltages… 
Highly Cited
1991
Highly Cited
1991
Abstract : The pores in a nanoporous membrane can be used as templates for the synthesis of nanostructures. We have recently… 
Highly Cited
1982
Highly Cited
1982
A fabrication process for the Lightly Doped Drain/Source Field-Effect Transistor, LDDFET, that utilizes RIE produced SiO2sidewall… 
Highly Cited
1977
Highly Cited
1977
Monolithic digital ICs with GaAs MESFETs have been built and operated at clock frequencies up to 4.5 GHz. The fabrication process…