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Semiconductor device fabrication
Known as:
Water semiconductor fabrication
, Semiconductor Water Fabrication
, Semiconductor process technology
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Semiconductor device fabrication is the process used to create the integrated circuits that are present in everyday electrical and electronic devices…
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Related topics
Related topics
50 relations
Airgap (microelectronics)
Antenna effect
Apple A9
Atom (system on chip)
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2008
Highly Cited
2008
A NOVEL UWB ELLIPTICAL SLOT ANTENNA WITH BAND-NOTCHED CHARACTERISTICS
R. Fallahi
,
A. Kalteh
,
M. G. Roozbahani
2008
Corpus ID: 54949827
This paper presents a novel band-notched elliptical slot antenna for Ultra Wide-Band (UWB) communication, which is printed on a…
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Highly Cited
2005
Highly Cited
2005
6 nm half-pitch lines and 0.04 µm2 static random access memory patterns by nanoimprint lithography
Michael D. Austin
,
Wei Zhang
,
Haixiong Ge
,
D. Wasserman
,
S. Lyon
,
S. Chou
2005
Corpus ID: 17417070
A key issue in nanoimprint lithography (NIL) is determining the ultimate pitch resolution achievable for various pattern shapes…
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Highly Cited
2004
Highly Cited
2004
Carbon nanotube transistor operation at 2.6 Ghz
Shengdong Li
,
Zhen Yu
,
S. Yen
,
W. Tang
,
P. Burke
2004
Corpus ID: 62895452
We present the first demonstration of single-walled carbon nanotube transistor operation at microwave frequencies. To measure the…
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Highly Cited
2004
Highly Cited
2004
Monolithic Integration of Carbon Nanotube Devices with Silicon MOS Technology
Yu-Chih Tseng
,
Peiqi Xuan
,
+4 authors
H. Dai
2004
Corpus ID: 1560670
An integrated circuit combining single-walled carbon nanotube (SWNT) devices with n-channel metal oxide semiconductor (NMOS…
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Highly Cited
1996
Highly Cited
1996
ELECTRON TRANSFER IN SELF-ASSEMBLED INORGANIC POLYELECTROLYTE/METAL NANOPARTICLE HETEROSTRUCTURES
D. Feldheim
,
Katherine C. Grabar
,
M. Natan
,
T. Mallouk
1996
Corpus ID: 94983221
The way in which molecular building blocks are arranged within supramolecular structures has a marked effect on their chemical…
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Highly Cited
1993
Highly Cited
1993
Fabrication of silicon nanostructures with a scanning tunneling microscope
E. Snow
,
P. Campbell
,
P. McMarr
1993
Corpus ID: 16530297
A technique is presented for fabricating Si nanostructures with a scanning tunneling microscope operated in air. The process…
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Highly Cited
1991
Highly Cited
1991
Ultra low power CMOS technology
J. Burr
,
A. Peterson
1991
Corpus ID: 60509621
This paper discusses the motivation, opportunities, and problems associated with implementing digital logic at very low voltages…
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Highly Cited
1991
Highly Cited
1991
Molecular and supermolecular origins of enhanced electric conductivity in template-synthesized polyheterocyclic fibrils. 1. Supermolecular effects
Z. Cai
,
Junting Lei
,
W. Liang
,
V. Menon
,
C. Martin
1991
Corpus ID: 54192720
Abstract : The pores in a nanoporous membrane can be used as templates for the synthesis of nanostructures. We have recently…
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Highly Cited
1982
Highly Cited
1982
Fabrication of high-performance LDDFET's with Oxide sidewall-spacer technology
P. J. Tsang
,
S. Ogura
,
W. Walker
,
J. Shepard
,
D. Critchlow
IEEE Transactions on Electron Devices
1982
Corpus ID: 27860057
A fabrication process for the Lightly Doped Drain/Source Field-Effect Transistor, LDDFET, that utilizes RIE produced SiO2sidewall…
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Highly Cited
1977
Highly Cited
1977
GaAs MESFET logic with 4-GHz clock rate
R. Tuyl
,
C. Liechti
,
R. E. Lee
,
E. Gowen
1977
Corpus ID: 61289590
Monolithic digital ICs with GaAs MESFETs have been built and operated at clock frequencies up to 4.5 GHz. The fabrication process…
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