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Etching (microfabrication)

Known as: Acid polishing, Etching (disambiguation), Etching (microfab) 
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important… 
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Related topics

Related topics

32 relations
CMOSCapacitive sensingCapacitively coupled plasmaChemical-mechanical planarization

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2017
Highly Cited
2017
University of Groningen Effect of surface conditioning methods on the bond strength of luting cement to ceramics
Objectives. This study evaluated the effect of three different surface conditioning methods on the bond strength of a Bis-GMA… 
Highly Cited
2008
Highly Cited
2008
Lithography and Other Patterning Techniques for Future Electronics
For all technologies, from flint arrowheads to DNA microarrays, patterning the functional material is crucial. For semiconductor… 
Highly Cited
2007
Highly Cited
2007
On the roughness of single- and bi-layer graphene membranes
Highly Cited
2006
Highly Cited
2006
Silicon Vertically Integrated Nanowire Field Effect Transistors
Silicon nanowires have received considerable attention as transistor components because they represent a facile route toward sub… 
Review
2005
Review
2005
A critical assessment of unbalanced surface stresses as the mechanical origin of twisting and scrolling of polymer crystals
Highly Cited
2003
Highly Cited
2003
Modified Thornton model for magnetron sputtered zinc oxide: film structure and etching behaviour
Highly Cited
1999
Highly Cited
1999
High-quality near-field optical probes by tube etching
A method called tube etching for the fabrication of near-field optical probes is presented. Tip formation occurs inside a… 
Review
1998
Review
1998
Bulk micromachining of silicon
Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication… 
Highly Cited
1996
Highly Cited
1996
Stiction in surface micromachining
Due to the smoothness of the surfaces in surface micromachining, large adhesion forces between fabricated structures and the… 
Highly Cited
1990
Highly Cited
1990
Plasma deposition, treatment, and etching of polymers
N. Morosoff, An Introduction to Plasma Polymerization. R. d'Agostino, F. Cramarossa, F. Fracassi, and F. Illuzzi, Plasma… 
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