Bulk micromachining of silicon

@inproceedings{Kovacs1998BulkMO,
  title={Bulk micromachining of silicon},
  author={Gregory T. A. Kovacs and Nadim Maluf and Kurt E. Petersen},
  year={1998}
}
Bulk silicon etching techniques, used to selectively remove silicon from substrates, have been broadly applied in the fabrication of micromachined sensors, actuators, and structures. [...] Key Method The available etching methods fall into three categories in terms of the state of the etchant: wet, vapor, and plasma. For each category, the available processes are reviewed and compared in terms of etch results, cost, complexity, process compatibility, and a number of other factors. In addition, several example…Expand

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