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Reactive-ion etching

Known as: RIE, Reactive ion etch, Reactive ion etching 
Reactive-ion etching (RIE) is an etching technology used in microfabrication. RIE is a type of dry etching which has different characteristics than… 
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Related topics

Related topics

13 relations
Antenna effectCapacitively coupled plasmaDeep reactive-ion etchingDry etching

Broader (2)

Etching (microfabrication)Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2010
2010
Performance of Nevada's aggregates in alkali-aggregate reactivity of Portland cement concrete
2006
2006
Characterization and Design of Liquid Crystal Polymer (LCP) Based Multilayer RF Components and Packages
2005
2005
Reversible Information Embedding in Multi-User Channels ∗
Information embedding is the reliable transmission of information embedded into a host signal under some prescribed distortion… 
2004
2004
Fabrication of Micro Field Emitter Tip Using Ion-Beam Irradiation-Induced Self-Standing of Thin Films
We propose a novel standing technique of fabricating a high-aspect-ratio tip structure. The technique utilizes the bending of… 
Highly Cited
2002
Highly Cited
2002
Gallium Nitride Nanorods Fabricated by Inductively Coupled Plasma Reactive Ion Etching
We report a novel method of fabricating gallium nitride (GaN) nanorods of controllable dimension and density from GaN epitaxial… 
2002
2002
Characterization of Via Etching in CHF3/CF4 Magnetically Enhanced Reactive Ion Etching Using Neural Networks
This study characterizes an oxide etching process in a magnetically enhanced reactive ion etching (MERIE) reactor with a CHF3/CF4… 
2000
2000
Reactive Ion Etching of Diamond Films
Reactive Ion Etching is an effective technique for etching diamond films.Reactive Ion Etching of Diamond Film using O 2 or a gas… 
2000
2000
Two-channel spectroscopic reflectometry for in situ monitoring of blanket and patterned structures during reactive ion etching
In this article we present a low-cost, high-speed, high-accuracy in situ thin film measurement system for real-time process… 
1999
1999
Recombination mechanisms in crystalline silicon: bulk and surface contributions
In the present paper the most interesting results of a work on the influence of some processes used in the fabrication of… 
1984
1984
Citizenship and the Critical Role of the Social Studies. NCSS Bulletin No. 72.
DOCUMENT RESUME- 
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