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Dry etching

Known as: Dry-etch 
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of… 
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Related topics

Related topics

12 relations

Broader (1)

Etching (microfabrication)
Isotropic etchingMicroelectromechanical systemsPlasma ashingPlasma etcher

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Experimental exploration of the fabrication of GaN microdome arrays based on a self-assembled approach
The formation of large scale, highly uniform and controllable GaN microdome arrays based on a self-assembled low cost method was… 
2004
2004
Triangular Profile Imprint Molds in Nanograting Fabrication
We have developed a technique based on nanoimprint lithography for the fabrication of nanogratings with controllable line widths… 
2004
2004
The dispensing well plate: a novel nanodispenser for the multiparallel delivery of liquids (DWP Part I)
2003
2003
Fabrication of SiC microelectromechanical systems using one-step dry etching
A simple one-step inductively coupled plasma etching technique has been developed for the fabrication of SiC resonant beam… 
Highly Cited
2002
Highly Cited
2002
Technology development of 3D detectors for high-energy physics and imaging
Highly Cited
2000
Highly Cited
2000
Characteristics of TaN gate MOSFET with ultrathin hafnium oxide (8 /spl Aring/-12 /spl Aring/)
  • B. LeeR. Choi J. Lee
  • International Electron Devices Meeting…
  • 2000
  • Corpus ID: 56269695
MOSFET's with equivalent oxide thickness of 8-12 /spl Aring/ have been demonstrated by using high-K gate dielectric thin films… 
Highly Cited
2000
Highly Cited
2000
High aspect-ratio polysilicon micromachining technology
Highly Cited
1999
Highly Cited
1999
Observation of light propagation in photonic crystal optical waveguides with bends
We observed the light propagation in 2-D photonic crystal waveguides with bends, which were composed of densely-packed holes… 
1998
1998
Micromachined capacitive transducer arrays for medical ultrasound imaging
The fabrication and characterization of micromachined capacitive ultrasonic transducers are discussed with emphasis on the array… 
1993
1993
An efficient volume-removal algorithm for practical three-dimensional lithography simulation with experimental verification
A fast three-dimensional volume removal algorithm for resist dissolution is presented and verified with applications to optical… 
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