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Dry etching

Known as: Dry-etch 
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of… 
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Etching (microfabrication)
Isotropic etchingMicroelectromechanical systemsPlasma ashingPlasma etcher
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2017
2017
Dry‐etching‐assisted femtosecond laser machining
Femtosecond laser machining has been widely used for fabricating arbitrary 2.5 dimensional (2.5D) structures. However, it suffers… 
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Review
2014
Review
2014
A review of microfabrication techniques and dielectrophoretic microdevices for particle manipulation and separation
The development of lab-on-a-chip (LOC) devices over the past decade has attracted growing interest. LOC devices aim to achieve… 
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Highly Cited
2008
Highly Cited
2008
Vertical Silicon-Nanowire Formation and Gate-All-Around MOSFET
This letter presents a vertical gate-all-around silicon nanowire transistor on bulk silicon wafer utilizing fully CMOS compatible… 
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Highly Cited
2005
Highly Cited
2005
Luminescence properties of defects in GaN
Gallium nitride (GaN) and its allied binaries InN and AIN as well as their ternary compounds have gained an unprecedented… 
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Highly Cited
2005
Highly Cited
2005
Bouncing or sticky droplets: Impalement transitions on superhydrophobic micropatterned surfaces
When a liquid drop impinges a hydrophobic rough surface it can either bounce off the surface (fakir droplets) or be impaled and… 
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Highly Cited
2004
Highly Cited
2004
Nanoscale protein patterning by imprint lithography
Selective localization of active proteins to patterns or specific sites is important for development of biosensors, bioMEMS… 
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Highly Cited
2004
Highly Cited
2004
Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA Stretching
We report a new approach to greatly simplify the fabrication of nanofluidic channels with well-controlled dimensions. It is… 
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Highly Cited
2002
Highly Cited
2002
Dry etching of polydimethylsiloxane for microfluidic systems
A fluorine-based reactive ion etch (RIE) process has been developed to anisotropically dry etch the silicone elastomer… 
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Review
2001
Review
2001
Guide to references on III-V semiconductor chemical etching
Abstract The literature on chemical etching of III–V semiconductors is reviewed with the intent to organize citations in… 
Highly Cited
1999
Highly Cited
1999
Observation of light propagation in photonic crystal optical waveguides with bends
We observed the light propagation in 2-D photonic crystal waveguides with bends, which were composed of densely-packed holes… 
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