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Dry etching

Known as: Dry-etch 
Dry etching refers to the removal of material, typically a masked pattern of semiconductor material, by exposing the material to a bombardment of… 
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Related topics

Related topics

12 relations

Broader (1)

Etching (microfabrication)
Isotropic etchingMicroelectromechanical systemsPlasma ashingPlasma etcher

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2017
Highly Cited
2017
Dry‐etching‐assisted femtosecond laser machining
Femtosecond laser machining has been widely used for fabricating arbitrary 2.5 dimensional (2.5D) structures. However, it suffers… 
Highly Cited
2015
Highly Cited
2015
Adaptive Virtual Metrology Design for Semiconductor Dry Etching Process Through Locally Weighted Partial Least Squares
In semiconductor manufacturing processes, virtual metrology (VM) has been investigated as a promising tool to predict important… 
Highly Cited
2012
Highly Cited
2012
Dielectric strength, optical absorption, and deep ultraviolet detectors of hexagonal boron nitride epilayers
Hexagonal boron nitride (hBN) epilayers have been synthesized by metal organic chemical vapor deposition and their dielectric… 
Highly Cited
2011
Highly Cited
2011
Hexagonal boron nitride epitaxial layers as neutron detector materials
Highly Cited
2008
Highly Cited
2008
Vertical Silicon-Nanowire Formation and Gate-All-Around MOSFET
This letter presents a vertical gate-all-around silicon nanowire transistor on bulk silicon wafer utilizing fully CMOS compatible… 
Highly Cited
2004
Highly Cited
2004
Nanoscale protein patterning by imprint lithography
Selective localization of active proteins to patterns or specific sites is important for development of biosensors, bioMEMS… 
Highly Cited
2004
Highly Cited
2004
Fabrication of Size-Controllable Nanofluidic Channels by Nanoimprinting and Its Application for DNA Stretching
We report a new approach to greatly simplify the fabrication of nanofluidic channels with well-controlled dimensions. It is… 
Highly Cited
1999
Highly Cited
1999
Observation of light propagation in photonic crystal optical waveguides with bends
We observed the light propagation in 2-D photonic crystal waveguides with bends, which were composed of densely-packed holes… 
Highly Cited
1999
Highly Cited
1999
Synthesis of aligned carbon nanotubes using thermal chemical vapor deposition
Highly Cited
1996
Highly Cited
1996
Realization of atomic layer etching of silicon
An experimental system and methodology were developed to realize dry etching of single crystal silicon with monolayer accuracy… 
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