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Plasma etcher

A plasma etcher, or etching tool, is a tool used in the production of semiconductor devices. A plasma etcher produces a plasma from a process gas… Expand
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Papers overview

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2012
2012
Simulations of a gas–liquid stirred reactor including bubble breakage and coalescence were performed. The filtered conservation… Expand
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Highly Cited
2012
Highly Cited
2012
Agricultural biomass as an energy resource has several environmental and economical advantages and has potential to substantially… Expand
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Highly Cited
2009
Highly Cited
2009
Computational and experimental methods have been used to investigate the flow field, power and mixing time in a fully baffled… Expand
2009
2009
The efficiency of chlorine and chloramines disinfection on biofilm development in a simulated drinking water distribution system… Expand
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Highly Cited
2004
Highly Cited
2004
  • J. V. Lier
  • Antonie van Leeuwenhoek
  • 2004
  • Corpus ID: 8306172
Thermophilic anaerobic digestion offers an attractive alternative for the treatment of medium- and high-strength wastewaters… Expand
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Highly Cited
2004
Highly Cited
2004
An expanded granular sludge bed reactor, inoculated with acclimated sulfidogenic granular sludge, was operated at 33 °C and fed… Expand
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2003
2003
In this paper, a process for the microfabrication of a wafer-scale palladium-silver alloy membrane (Pd-Ag) is presented. Pd-Ag… Expand
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Highly Cited
1999
Highly Cited
1999
We report the experimentally obtained response surfaces of silicon etching rate, aspect ratio dependent etching (ARDE… Expand
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Highly Cited
1996
Highly Cited
1996
The authors discuss new types of nuclear fission reactors optimized for the generation of high-temperature heat for exceedingly… Expand
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Highly Cited
1996
Highly Cited
1996
Comparison of laboratory trickle-bed and up-flow reactors over a range of operating conditions, which cover both gas and liquid… Expand
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