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Plasma etcher

A plasma etcher, or etching tool, is a tool used in the production of semiconductor devices. A plasma etcher produces a plasma from a process gas… 
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Related topics

Related topics

8 relations
Dry etchingEtching (microfabrication)Failure analysisPlasma etching

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Review
2019
Review
2019
Special Needs and Characteristic Features of (Photo)catalytic Reactors with a Review of the Proposed Solutions
2016
2016
Comprehensive Fischer-Tropsch reactor model with non-ideal plug flow and detailed reaction kinetics
2013
2013
Quantitative and Qualitative Study of Urban Septage in East of Mazandaran and Administrative Approaches
Background and purpose: Treatment and disposal Septage in developed countries is subject to strict regulations and standards, but… 
Review
2008
Review
2008
Studies in gas-liquid-solid slurry reactors
Due to success commercial applications in converting natural gas to fuels and synthesizing methanol,the slurry column reactor has… 
2006
2006
Evaluation of scanning capacitance microscopy sample preparation by focused ion beam
2002
2002
Heat transfer between wafer and electrode in a high density plasma etcher
Heat transfer between a wafer and electrode has been studied in a planar-type inductively coupled plasma reactor in terms of… 
1996
1996
Development of a nontoxic acoustic window nutrient-mist bioreactor and relevant growth data
SummaryA nutrient-mist bioreactor was designed that separates the nutrient medium from the electronic components via an acoustic… 
1995
1995
Factors influencing biofilm growth in drinking water distribution systems
Conditions contributing to the growth of biofilm bacteria, particularly coliforms, in simulated drinking water distribution… 
1988
1988
Single and two-phase flows in ducts and stirred reactors
1974
1974
Development of an Algorithm for Temperature Control of Stirred Batch Reactors
Temperature control of stirred reactors is difficult due to a number of nonlinearities inherent in standard heating/cooling… 
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