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Plasma etcher

A plasma etcher, or etching tool, is a tool used in the production of semiconductor devices. A plasma etcher produces a plasma from a process gas… Expand
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Papers overview

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2012
2012
Mammalian cell cultures have become a major topic of research in the biopharmaceutical industry. This kind of cells requires… Expand
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2009
2009
Computational and experimental methods have been used to investigate the flow field, power and mixing time in a fully baffled… Expand
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2009
2009
The efficiency of chlorine and chloramines disinfection on biofilm development in a simulated drinking water distribution system… Expand
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2006
2006
Avaliou-se o efeito das aguas residuarias de suinocultura com concentracoes de solidos suspensos totais em torno de 6.000 mg L-1… Expand
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2005
2005
The objective of this study was to evaluate the significance of heterotrophic growth in nitrifying biofilm reactors fed only with… Expand
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2004
2004
Thermophilic anaerobic digestion offers an attractive alternative for the treatment of medium- and high-strength wastewaters… Expand
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Highly Cited
1999
Highly Cited
1999
We report the experimentally obtained response surfaces of silicon etching rate, aspect ratio dependent etching (ARDE… Expand
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1999
1999
Phthalic acid isomers (dicarboxy benzenes) play an important role in our human environment as constituents of polyester fibres… Expand
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1996
1996
The authors discuss new types of nuclear fission reactors optimized for the generation of high-temperature heat for exceedingly… Expand
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1996
1996
Comparison of laboratory trickle-bed and up-flow reactors over a range of operating conditions, which cover both gas and liquid… Expand
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