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Plasma etcher
A plasma etcher, or etching tool, is a tool used in the production of semiconductor devices. A plasma etcher produces a plasma from a process gas…
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Related topics
Related topics
8 relations
Dry etching
Etching (microfabrication)
Failure analysis
Plasma etching
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Broader (1)
Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2016
2016
Anaerobic Baffled Reactor: A promising wastewater treatment technology in tropical countries
K. Ramandeep
2016
Corpus ID: 212541244
With the deterioration of the water resources of the world, looking for an economically viable solution to treat wastewater is a…
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2014
2014
Screens as an Approach for Selective Organism Retention and Out-selection in Deammonification Reactors
Heather M. Battiste-Alleyne
2014
Corpus ID: 107704261
2014
2014
Supercritical Water Gasification of Biomass in Tubular Reactors, a study from Experiments Conducted in Stainless Steel and Nickel-Chromium-Molybdenum Catalyst
C. Blasio
,
G. Lucca
,
+6 authors
M. Järvinen
2014
Corpus ID: 136247503
2007
2007
Polymer Actuators for Micro Robotic Applications
E. Edqvist
2007
Corpus ID: 3549858
In this thesis a multilayer actuator structure is developed for the I-SWARM project. In order to build an energy efficient and…
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2005
2005
STUDY OF PARAMETERS AFFECTING PHOTOCATALYTIC OXIDATION OF BIOLOGICALLY TREATED GREYWATER
H. Gulyas
,
K. Hartrampf
,
+4 authors
R. Otterpohl
2005
Corpus ID: 53470986
Solar photocatalytic oxidation is a promising low-energy consuming technology for reclamation of biologically treated greywater…
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2003
2003
Granule Development in Anaerobic Baffled Reactors
S. Uyanik
2003
Corpus ID: 28277051
The mechanism of biomass granulation in anaerobic reactors has been widely studied in the hope that this could be helpful in…
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2002
2002
Continuous Operation of Zinc-Titanate Sorbent for 100 Hours in a Fluidized Hot Gas Desulfurization Process for IGCC
Chang-Keun Yi
,
Sung-Ho Cho
,
+4 authors
J. Son
2002
Corpus ID: 98498649
Continuous operation was performed at high pressure and high temperature to see the long-term reactivity and the attrition…
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2000
2000
Application of a Magnetic Tracer Method for the Characterization of Hydrodynamics in Internal-Loop Airlift Bioreactors
J. Klein
,
Ondrej Dolgoš
,
Š. Godó
,
M. Blažej
,
J. Markoš
2000
Corpus ID: 54584609
Nowadays there is still a lack of measuring techniques, which would give reliable information about the hydrodynamics in internal…
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Review
1989
Review
1989
Space Reactor Arms Control: Overview
J. Primack
,
N. E. Abrams
,
+6 authors
R. Sagdeev
1989
Corpus ID: 122822551
Unshielded nuclear reactors provide the lightest and most survivable long-lived sources of electric power available to support…
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1988
1988
Single and two-phase flows in ducts and stirred reactors
J. Nouri
1988
Corpus ID: 125490287