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Plasma etching

Known as: Plasma etch 
Plasma etching is a form of plasma processing used to fabricate integrated circuits. It involves a high-speed stream of glow discharge (plasma) of an… 
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Related topics

Related topics

15 relations
Capacitively coupled plasmaCopper interconnectEtching (microfabrication)Excited state

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2012
2012
Selective area growth of a- and c-plane GaN nanocolumns by molecular beam epitaxy using colloidal nanolithography
2007
2007
Amorphous Carbon Coated Silicon Nanotips Fabricated by MPCVD Using Anodic Aluminum Oxide as the Template
We have used nanoporous anodic aluminum oxide (AAO) as a template to fabricate amorphous carbon (a-C) coated silicon nanotips by… 
2006
2006
Efficiency Improvement of GaN-Based LEDs with ITO Texturing Window Layers Using Natural Lithography
In conventional GaN light-emitting diodes (LEDs), a significant gap exists between the internal and external efficiencies owing… 
Highly Cited
2006
Highly Cited
2006
Layout controlled one-step dry etch and release of MEMS using deep RIE on SOI wafer
Deep reactive ion etching (DRIE) of silicon on insulator (SOI) wafer has become a popular method to build microelectromechanical… 
Highly Cited
2003
Highly Cited
2003
Absence of Strong Gate Effects in Electrical Measurements on Phenylene-Based Conjugated Molecules
The electronic transport characteristics of self-assembled monolayers of phenylene-based -conjugated molecules were measured in a… 
2001
2001
Holographic X-ray optical elements: transition between refraction and diffraction
Highly Cited
1985
Highly Cited
1985
Plasma Etching in Semiconductor Fabrication
1. Introduction. 2. Plasma Excitation and Reactor Design. 3. Silicon and Silicon Dioxide Etching in Plasmas. 4. Aluminium Etching… 
Highly Cited
1980
Highly Cited
1980
A general simulator for VLSI lithography and etching processes: Part II—Application to deposition and etching
The extension of the general process simulator SAMPLE to plasma etching and metallization is described. The etching algorithm is… 
Highly Cited
1979
Highly Cited
1979
Current-access magnetic bubble circuits
Experimental and theoretical results from our work on current-access technology show promise for high-density, ∼10<sup>7</sup… 
Highly Cited
1979
Highly Cited
1979
Some chemical aspects of the fluorocarbon plasma etching of silicon and its compounds
Mass spectrometric sampling of fluorocarbon glow discharges and in situ measurements of the etch rate of Si and SiO2, with quartz… 
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