Copper interconnect

Known as: Copper chip, Copper-based chips 
Copper-based chips are semiconductor integrated circuits which use copper for interconnections in the metalization layer, the BEOL. Since copper is a… (More)
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Papers overview

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2011
2011
On-chip copper interconnects have gained wide acceptance in the microelectronics industry due to improved resistivity and… (More)
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Highly Cited
2008
Highly Cited
2008
Using physics-based circuit models, the performances of carbon nanotube (CNT) interconnects, both single- and multiwall (SWNT and… (More)
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2008
2008
In this paper, development and characterization of a freestanding electroplated copper interconnect for applications in flexible… (More)
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Highly Cited
2007
Highly Cited
2007
A 45 nm logic technology is described that for the first time incorporates high-k + metal gate transistors in a high volume… (More)
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Highly Cited
2006
Highly Cited
2006
Single-walled carbon nanotube (SWCNT) bundles have the potential to provide an attractive solution for the resistivity and… (More)
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2006
2006
The electromigration threshold in copper interconnect is reported in this paper. The critical product (jL)c is first determined… (More)
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Highly Cited
2005
Highly Cited
2005
Interconnect has become a primary bottleneck in integrated circuit design. As CMOS technology is scaled, it will become… (More)
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Highly Cited
2005
Highly Cited
2005
Physical models are used to determine the ultimate potential performance of carbon nanotube interconnects and compare them with… (More)
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2004
2004
In the past few years, copper has been widely used as interconnect metallization for advanced ultralarge-scale integration (ULSI… (More)
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2001
2001
A post-CMOS maskless dry etch process has been developed to fabricate MEMS structures compatible with commercial low-k copper… (More)
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