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Microelectromechanical systems

Known as: Micro Electro Mechanical Systems, Micro Systems Technology, Microsystems technology 
Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical… 
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Related topics

Related topics

50 relations
Advanced silicon etchingAtomic-force microscopyBeam lead technologyBow and warp of semiconductor wafers and substrates

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2014
Highly Cited
2014
Full ceramic micro solid oxide fuel cells: towards more reliable MEMS power generators operating at high temperatures
Batteries, with a limited capacity, have dominated the power supply of portable devices for decades. Recently, the emergence of… 
Highly Cited
2007
Highly Cited
2007
Silanization and antibody immobilization on SU-8
Highly Cited
2005
Highly Cited
2005
Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps
VHF and UHF MEMS-based vibrating micromechanical resonators equipped with new solid dielectric (i.e., filled) capacitive… 
Highly Cited
2004
Highly Cited
2004
Shape-memory polymers for microelectromechanical systems
This paper investigates the use of shape-memory polymer thin films in microelectromechanical systems (MEMS). shape-memory… 
Highly Cited
2004
Highly Cited
2004
A 5-V operated MEMS variable optical attenuator by SOI bulk micromachining
We report the design, fabrication, and successful demonstration of microelectromechanical variable optical attenuator (VOA) using… 
Highly Cited
2003
Highly Cited
2003
RF MEMS switches fabricated on microwave-laminate printed circuit boards
A novel fabrication process has been developed for directly constructing radio frequency microelectrical mechanical systems (RF… 
Highly Cited
2001
Highly Cited
2001
2 and 4-bit DC-18 GHz microstrip MEMS distributed phase shifters
Two and four-bit wideband distributed microstrip phase shifters have been developed on a 21 mil (533 /spl mu/m) silicon substrate… 
Highly Cited
2000
Highly Cited
2000
A monolithic surface micromachined Z-axis gyroscope with digital output
A monolithic surface micromachined Z-axis vibratory rate gyroscope with an on-chip A/D converter is fabricated in a monolithic… 
Highly Cited
2000
Highly Cited
2000
Performance of a biaxial MEMS-based scanner for microdisplay applications
Scanned displays have potential for achieving high brightness and see-through configurations in many display applications. A MEMS… 
Highly Cited
1997
Highly Cited
1997
Micromechanics and Mems Classic and Seminal Papers to 1990
Description: Electrical Engineering Micromechanics and MEMS Classic and Seminal Papers to 1990 Micromechanics is a rich, diverse… 
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