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Microelectromechanical systems
Known as:
Micro Electro Mechanical Systems
, Micro Systems Technology
, Microsystems technology
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Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical…
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Related topics
Related topics
50 relations
Advanced silicon etching
Atomic-force microscopy
Beam lead technology
Bow and warp of semiconductor wafers and substrates
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Automatic Vehicle Accident Detection System Based on ARM &GPS
Divyang D. Shah
2013
Corpus ID: 110862647
The Rapid growth of technology and infrastructure has made our lives more easy . The advent of technology has also increased the…
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Highly Cited
2005
Highly Cited
2005
Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism
C.-C. Lo
,
Fang Chen
,
G. Fedder
The 13th International Conference on Solid-State…
2005
Corpus ID: 6250616
A fully differential square frame resonator (SFR), operating at resonant frequencies of 6.184MHz and 17.63MHz for the fundamental…
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Highly Cited
2004
Highly Cited
2004
Discrete wavelength tunable laser using microelectromechanical systems technology
Xuming Zhang
,
A. Liu
,
D. Tang
,
Chao Lu
2004
Corpus ID: 55473422
A discrete wavelength tunable laser has been demonstrated using microelectromechanical systems (MEMS) technology. The laser…
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2003
2003
A Personal Navigation System Using Low-Cost MEMS/GPS/Fluxgate
S. Cho
,
Ki Won Lee
,
Chan Gook Park
,
Jang-Gyu Lee
2003
Corpus ID: 110618787
The advances of MEMS technology have led the development of small-sized sensors (inertial sensors, magnetic compass sensors, etc…
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2003
2003
Testable design and testing of micro-electro-fluidic arrays
H. Kerkhoff
,
M. Acar
Proceedings. 21st VLSI Test Symposium, .
2003
Corpus ID: 52988
The testable design and testing of a fully software-controllable lab-on-a-chip, including a fluidic array of FlowFETs, control…
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2002
2002
Recent progress in modularly integrated MEMS technologies
T. King
,
R. Howe
,
+4 authors
C. Duenn
Digest. International Electron Devices Meeting,
2002
Corpus ID: 5918845
Various approaches to post-CMOS, monolithic integration of MEMS with electronics are described. In particular, recent progress…
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2001
2001
Generation of Electrically Induced Stimuli for MEMS Self-Test
B. Charlot
,
S. Mir
,
F. Parrain
,
B. Courtois
Journal of electronic testing
2001
Corpus ID: 15153531
A major task for the implementation of Built-In-Self-Test (BIST) strategies for MEMS is the generation of the test stimuli. These…
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Review
1999
Review
1999
A Review and Applicability Assessment of MEMS Based Microvalve Technologies for Microspacecraft Propulsions
Juergen Mueller
1999
Corpus ID: 102344718
M ICROSPACECRAFT concepts are experiencing growing attention within the aerospace community. Several reasons may be named as the…
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1998
1998
A Low Power MEMS Silicone/Parylene Valve
X. Yang
,
C. Grosjean
,
Y. Tai
1998
Corpus ID: 108609809
A low power thermopneumatic MEMS valve utilizing several novel components has been developed. 61 mW of power is sufficient to…
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1998
1998
MEMS and Si-micromachined components for low-power, high-frequency communications systems
L. Katehi
,
Gabriel M. Rebeiz
,
C. Nguyen
IEEE MTT-S International Microwave Symposium…
1998
Corpus ID: 25287419
The next leap beyond the state of the art in multichip module (MCM) for communications systems is the development of a technology…
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