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Microelectromechanical systems

Known as: Micro Electro Mechanical Systems, Micro Systems Technology, Microsystems technology 
Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical… 
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Related topics

Related topics

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Advanced silicon etchingAtomic-force microscopyBeam lead technologyBow and warp of semiconductor wafers and substrates

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2007
2007
6Mhz Bulk-Mode Resonator with Q Values Exceeding One Million
In this paper, we report a 6.3 MHz Lame-mode square resonator with fully differential drive and sense electronics, exhibiting… 
2006
2006
Dielectrically Transduced Single-Ended to Differential MEMS Filter
A single-ended input to balanced output 425MHz mechanically coupled electromechanical filter is presented. This technology… 
2005
2005
CMOS-MEMS: Advanced Micro and Nanosystems (Advanced Micro and Nanosystems)
Highly Cited
2005
Highly Cited
2005
Integrated HF CMOS-MEMS square-frame resonators with on-chip electronics and electrothermal narrow gap mechanism
A fully differential square frame resonator (SFR), operating at resonant frequencies of 6.184MHz and 17.63MHz for the fundamental… 
Highly Cited
2004
Highly Cited
2004
Discrete wavelength tunable laser using microelectromechanical systems technology
A discrete wavelength tunable laser has been demonstrated using microelectromechanical systems (MEMS) technology. The laser… 
2004
2004
Robust CAD model based visual tracking for 3D microassembly using image space potentials
A CAD model based visual tracking system for the flexible automation of 3D microassembly processes is presented. The system… 
2001
2001
Generation of Electrically Induced Stimuli for MEMS Self-Test
A major task for the implementation of Built-In-Self-Test (BIST) strategies for MEMS is the generation of the test stimuli. These… 
Review
1999
Review
1999
A Review and Applicability Assessment of MEMS Based Microvalve Technologies for Microspacecraft Propulsions
M ICROSPACECRAFT concepts are experiencing growing attention within the aerospace community. Several reasons may be named as the… 
1998
1998
A Low Power MEMS Silicone/Parylene Valve
A low power thermopneumatic MEMS valve utilizing several novel components has been developed. 61 mW of power is sufficient to… 
1998
1998
MEMS and Si-micromachined components for low-power, high-frequency communications systems
The next leap beyond the state of the art in multichip module (MCM) for communications systems is the development of a technology… 
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