Skip to search formSkip to main content
You are currently offline. Some features of the site may not work correctly.

Microelectromechanical systems

Known as: Micro Electro Mechanical Systems, Micro Systems Technology, Microsystems technology 
Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical… Expand
Wikipedia

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Review
2016
Review
2016
The growth of medical robotics since the mid1980s has been striking. From a few initial efforts in stereotactic brain surgery… Expand
  • figure 1
  • figure 2
Is this relevant?
Highly Cited
2004
Highly Cited
2004
This paper investigates the use of shape-memory polymer thin films in microelectromechanical systems (MEMS). shape-memory… Expand
  • figure 1
  • figure 2
  • figure 4
  • figure 3
  • figure 5
Is this relevant?
Highly Cited
2003
Highly Cited
2003
A version of nonlocal elasticity theory is employed to develop a nonlocal Benoulli/Euler beam model. Some representative problems… Expand
  • figure 1
  • figure 2
  • figure 3
Is this relevant?
Highly Cited
2002
Highly Cited
2002
Reports a method to additively build three-dimensional (3-D) microelectromechanical systems (MEMS) and electrical circuitry by… Expand
  • figure 1
  • figure 3
  • figure 2
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
2001
Highly Cited
2001
Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and… Expand
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
2000
Highly Cited
2000
Photopatterned resists pyrolyzed at different temperatures and different ambient atmospheres can be used as a carbonaceous… Expand
  • figure 1
  • table II
  • figure 4
  • figure 2
  • figure 3
Is this relevant?
Highly Cited
2000
Highly Cited
2000
As the sizes of electronic and mechanical devices are decreased to the micron and nanometre level, it becomes particularly… Expand
  • figure 1
  • figure 4
  • figure 2
  • figure 3
Is this relevant?
Highly Cited
1999
Highly Cited
1999
In this paper, we demonstrate how efficient low-order dynamical models for micromechanical devices can be constructed using data… Expand
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
1998
Highly Cited
1998
The micromachining technology that emerged in the late 1980s can provide micron-sized sensors and actuators. These micro… Expand
  • figure 1
  • figure 2
  • figure 18
  • figure 19
  • figure 22
Is this relevant?
Highly Cited
1997
Highly Cited
1997
i Electrostatic Pull-in Test Structure Design for in-situ Mechanical Property Measurements of Microelectromechanical Systems… Expand
  • figure 1.1
  • figure 2.1
  • figure 2.2
  • figure 2.3
  • table 2.1
Is this relevant?