Microelectromechanical systems

Known as: Micro Electro Mechanical Systems, Micro Systems Technology, Microsystems technology 
Microelectromechanical systems (MEMS, also written as micro-electro-mechanical, MicroElectroMechanical or microelectronic and microelectromechanical… (More)
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Papers overview

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Review
2018
Review
2018
The dramatic reduction in power consumption of current integrated circuits has evoked great research interests in harvesting… (More)
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Review
2017
Review
2017
This paper provides a review on some of the significant research work done on wearable flexible sensors (WFSs). Sensors… (More)
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2004
2004
A discrete wavelength tunable laser has been demonstrated using microelectromechanical systems ~MEMS! technology. The laser… (More)
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Highly Cited
2002
Highly Cited
2002
We consider distributed parameter systems where the underlying dynamics are spatially invariant, and where the controls and… (More)
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Highly Cited
2001
Highly Cited
2001
Micromachining and micro-electromechanical system (MEMS) technologies can be used to produce complex structures, devices and… (More)
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Highly Cited
2001
Highly Cited
2001
We report a method to additively build threedimensional (3-D) microelectromechanical systems (MEMS) and electrical circuitry by… (More)
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Highly Cited
1999
Highly Cited
1999
In this paper, we demonstrate how efficient loworder dynamical models for micromechanical devices can be constructed using data… (More)
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Highly Cited
1998
Highly Cited
1998
The Mathieu equation governs the forced motion of a swing, the stability of ships and columns, Faraday surface wave patterns on… (More)
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Highly Cited
1998
Highly Cited
1998
Microelectromechanical filters based on coupled lateral microresonators are demonstrated. This new class of… (More)
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Review
1998
Review
1998
Surface micromachining is characterized by the fabrication of micromechanical structures from deposited thin films. Originally… (More)
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