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Advanced silicon etching

Known as: ASE, Advanced Silicon Etch 
Advanced silicon etching (ASE) is a deep reactive ion etching (DRIE) technique to rapidly etch deep and high aspect ratio structures in silicon.ASE… 
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Related topics

Related topics

3 relations

Broader (2)

Etching (microfabrication)Semiconductor device fabrication
Microelectromechanical systems

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Model-based stitching and inter-mask bridge prevention for double patterning lithography
As EUV Lithography is not ready yet for sub-20nm node manufacturing, ArF immersion lithography must extend its capability. Among… 
2012
2012
EDA Solutions for Double Patterning Lithography
Expanding the optical lithography to 32-nm node and beyond is impossible using existing single exposure systems. As such, double… 
2012
2012
Triple patterning in 10nm node metal lithography
The local metallization layers of logic products are historically the densest layouts to lithographically pattern and are key… 
2011
2011
Efecto de la aplicación de diferentes ácidos fluorhídricos en la resistencia adhesiva sobre una cerámica feldespática
resumen Dental ceramic materials are giving aesthetic restorations and biocompatible. Nowdays there are various pre-conditioning… 
2008
2008
Scanning force microscope induced growth and dissolution on single crystal gypsum ( CaHSO 4 . 2 H 2 O
1976
1976
Dislocation Etch Pits on c -Surface of LiNbO 3
1970
1970
DISLOCATION ETCH PITS IN ALPHA URANIUM.
1970
1970
V-notches on the impact strength and transition temperature of mild-steel specimens are related to the redistribution of plastic strain as revealed by dislocation etch pitting
Two small holes (0.0292 in.), appropriately drilled near the root of a Charpy V-notch, have been shown to reduce markedly the… 
1966
1966
Orientation Dependence of a Dislocation Etch for Zinc
The dislocation etch for (101-[bar]0] surfaces of zinc reported by Brandt, Adams, and Vreeland have been further explored… 
1964
1964
THE OCTAHEDRAL ETCH PITS IN NICKEL-IRON ALLOYS