Rapid thermal processing

Known as: RTP, Rapid thermal anneal, RTA 
Rapid Thermal Processing (RTP) refers to a semiconductor manufacturing process which heats silicon wafers to high temperatures (over 1,000 °C) on a… (More)
Wikipedia

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2014
2014
Cadmium telluride (CdTe) is a leading absorber for thin-film solar cells. However, state-of-the art open circuit voltages (Voc… (More)
  • figure 2
  • figure 1
  • figure 3
  • figure 5
  • figure 4
Is this relevant?
2006
2006
In the past few years, Rapid Thermal Processes (RTP) have gained acceptance as mainstream technology for semi-conductors… (More)
  • figure 1
  • table 1
  • figure 2
  • figure 3
  • figure 4
Is this relevant?
Review
2006
Review
2006
The rapid thermal processing (RTP) technique features dynamic control of temperature, which permits high heating and cooling… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
2006
2006
Fabrication of devices and circuits on silicon wafers creates patterns in optical properties, particularly the thermal emissivity… (More)
  • figure 1
  • figure 2
  • table I
  • table II
  • table II
Is this relevant?
2003
2003
Vacuum packaging of microresonators using RTP(Rapid Thermal Processing) aluminum-to-nitride bonding has been demonstrated… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
2001
2001
This paper proposes a control system design for a rapid thermal processing (RTP) system, which has four circular concentric lamp… (More)
  • figure 1
  • figure 2
  • figure 3
  • table I
  • table II
Is this relevant?
1998
1998
We present a systematic method for developing low order nonlinear models from physically based, large scale finite element models… (More)
  • figure 1
  • figure 2
  • figure 4
  • figure 3
  • figure 5
Is this relevant?
1997
1997
This paper presents an application of Iterative Learning Control (ILC) methodology to the temperature proole control of a Rapid… (More)
  • figure 1
  • figure 6
Is this relevant?
1997
1997
In this paper, a framework is given for achieving the tight control of the wafer temperature essential in rapid thermal… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
1986
1986
Rapid thermal-processing-induced polysilicon capacitor failure is investigated. Polysilicon-SiO2-Si capacitors fail at the… (More)
  • figure 1
  • figure 3
  • figure 4
  • figure 2
  • figure 5
Is this relevant?