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Ion implantation
Known as:
SIMOX
, Ion implanter
, Ion irradiation
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Ion implantation is a materials engineering process by which ions of a material are accelerated in an electrical field and impacted into a solid…
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Related topics
Related topics
37 relations
Burst noise
Cathodic arc deposition
Channel-stopper
Charge-coupled device
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2006
Highly Cited
2006
Single photon emission from SiV centres in diamond produced by ion implantation
Chunlang Wang
,
C. Kurtsiefer
,
H. Weinfurter
,
B. Burchard
2006
Corpus ID: 49231731
We report the observation of single photon emission from single SiV (silicon-vacancy) centres in diamond produced by ion…
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Highly Cited
2005
Highly Cited
2005
Luminescence properties of defects in GaN
M. Reshchikov
,
H. Morkoç
2005
Corpus ID: 120154864
Gallium nitride (GaN) and its allied binaries InN and AIN as well as their ternary compounds have gained an unprecedented…
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Highly Cited
2005
Highly Cited
2005
Controlled shallow single ion implantation in silicon using an active substrate for sub-20 keV ions
D. Jamieson
,
Changyi Yang
,
+9 authors
R. G. Clark
2005
Corpus ID: 120505061
We demonstrate a method for the controlled implantation of single ions into a silicon substrate with energy of sub-20‐keV. The…
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Review
2004
Review
2004
Surface modification of titanium, titanium alloys, and related materials for biomedical applications
Xuanyong Liu
,
P. Chu
,
C. Ding
2004
Corpus ID: 40470413
Highly Cited
1984
Highly Cited
1984
Electron-electron and electron-hole interactions in small semiconductor crystallites : The size dependence of the lowest excited electronic state
L. Brus
1984
Corpus ID: 54779723
We model, in an elementary way, the excited electronic states of semiconductor crystallites sufficiently small (∼ 50 A diam) that…
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Highly Cited
1977
Highly Cited
1977
Ion implantation
B. J. Smith
Nature
1977
Corpus ID: 4208126
Ion Implantation of Semiconductors.By G. Carter and W. A. Grant. Pp. viii + 214. (Arnold: London, 1976.) Boards £9.50; paper £5…
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Highly Cited
1974
Highly Cited
1974
Design Of Ion-implanted MOSFET's with Very Small Physical Dimensions
Robert H. Dennard
,
F. Gaensslen
,
YU HWA-NIEN
,
V. L. Rideout
,
Ernest Bassous
,
A. Leblanc
Proceedings of the IEEE
1974
Corpus ID: 283984
This paper considers the design, fabrication, and characterization of very small Mosfet switching devices suitable for digital…
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Highly Cited
1974
Highly Cited
1974
Pathology of the Human Placenta
K. Benirschke
,
P. D. M. P. Kaufmann
Springer: New York
1974
Corpus ID: 32750663
A methodical gross examination should be undertaken in all births and the results incorporated in the patient’s record.
Review
1972
Review
1972
Ion implantation in semiconductors—Part II: Damage production and annealing
J. Gibbons
1972
Corpus ID: 61963312
Radiation damage is produced in a crystalline target whenever a moving ion transfers sufficient energy to a target atom to…
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Highly Cited
1946
Highly Cited
1946
Human Embryology
T. R. Forbes
The Yale Journal of Biology and Medicine
1946
Corpus ID: 1419659
Prof. Patten states in the Preface that his -book "represents an endeavor to set forth in simple and readable form the phases of…
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