Cathodic arc deposition

Known as: Arc-PVD, Cathodic arc 
Cathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode… (More)
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Topic mentions per year

Topic mentions per year

1983-2017
051019832017

Papers overview

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Review
2011
Review
2011
Achieving a high growth rate is paramount for making large-area transparent conducting oxide coatings at a low cost… (More)
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2011
2011
This paper presents the physical mechanism behind the phenomenon of self-layering in thin films made by industrial scale cathodic… (More)
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2011
2011
The microstructure evolution and compositional variation of Ti3SiC2 cathode surfaces during reactive cathodic arc evaporation are… (More)
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2011
2011
Metal and gas ion species and their charge state distributions were measured for pulsed copper cathodic arcs in argon background… (More)
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2010
2010
Amorphous carbon thin films with a wide range of sp fraction from 20 to 90% grown by filtered cathodic arc deposition have been… (More)
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2009
2009
Er2O3 sesquioxide thin films in the uncommon, monoclinic phase were produced for the first time by filtered cathodic arc… (More)
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2009
2009
Niobium thin film coated copper RF cavities are an interesting alternative to niobium bulk cavities for the development of high… (More)
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2007
2007
Zirconia (ZrO<sub>2</sub>) thin films were deposited on silicon using a zirconium cathodic arc plasma source in the presence of… (More)
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Review
2006
Review
2006
Cathodic arc plasma is one of the potential ion plating physical vapor deposition methods to prepare protective coatings on… (More)
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2002
2002
Plasma-based ion implantation (PBII) is usually carried out with isotropic gaseous plasmas, such as a discharge in nitrogen. More… (More)
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