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Cathodic arc deposition
Known as:
Arc-PVD
, Cathodic arc
Cathodic arc deposition or Arc-PVD is a physical vapor deposition technique in which an electric arc is used to vaporize material from a cathode…
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Related topics
Related topics
8 relations
Diamond-like carbon
Excited state
Ion beam deposition
Ion implantation
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2008
Highly Cited
2008
Photoelectrochemical characteristics of cells with dyed and undyed nanoporous p-type semiconductor CuO electrodes
Seiichi Sumikura
,
S. Mori
,
S. Shimizu
,
H. Usami
,
E. Suzuki
2008
Corpus ID: 53413528
Highly Cited
2007
Highly Cited
2007
Raman spectroscopy study of DLC films prepared by RF plasma and filtered cathodic arc
P. Ha
,
D. Mckenzie
,
M. Bilek
,
S.C.H. Kwok
,
P. Chu
,
B. Tay
2007
Corpus ID: 52423572
Highly Cited
2007
Highly Cited
2007
Determination of the local environment of silicon and the microstructure of quaternary CrAl(Si)N films
J. Endrino
,
S. Palacín
,
M. Aguirre
,
A. Gutiérrez
,
F. Schäfers
2007
Corpus ID: 9943007
Highly Cited
2002
Highly Cited
2002
Atomic scale heating in cathodic arc plasma deposition
A. Anders
2002
Corpus ID: 93157037
Energetic deposition using a filtered cathodic arc plasma is known to lead to very adherent and dense films. Interface mixing…
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Highly Cited
2002
Highly Cited
2002
Plasma-based ion implantation utilising a cathodic arc plasma
M. Bilek
,
D. Mckenzie
,
R. Tarrant
,
S. Lim
,
D. McCulloch
2002
Corpus ID: 6450463
Review
2002
Review
2002
Cathodic arc plasma deposition
A. Anders
2002
Corpus ID: 93312094
Cathodic arc plasma deposition is one of oldest coatings technologies. Over the last two decades it has become the technology of…
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Highly Cited
2002
Highly Cited
2002
Frictional behavior of diamondlike carbon films in vacuum and under varying water vapor pressure
J. Andersson
,
R. Erck
,
A. Erdemir
2002
Corpus ID: 27010120
Review
1999
Review
1999
Approaches to rid cathodic arc plasmas of macro-and nanoparticles : a review
A. Anders
1999
Corpus ID: 55333467
Highly Cited
1999
Highly Cited
1999
Synthesis of carbon films with controlled nanostructure by separation of neutral clusters in supersonic beams
E. Barborini
,
P. Piseri
,
A. Bassi
,
A. Ferrari
,
C. Bottani
,
P. Milani
1999
Corpus ID: 97637413
Review
1998
Review
1998
Anodic to cathodic arc transition according to break arc lengthening
N. Ben Jemaa
,
L. Morin
,
S. Benhenda
,
L. Nedelec
IEEE Transactions on Components, Packaging, and…
1998
Corpus ID: 35798139
Material transfer in switches and relays has been described in several reviews. Different transfer directions have been…
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