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Furnace anneal

Furnace annealing is a process used in semiconductor device fabrication which consist of heating multiple semiconductor wafers in order to affect… 
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Related topics

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DopantIon implantationRapid thermal processingSemiconductor

Papers overview

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2015
2015
Nanocalorimetry study of the evolution of melting characteristics of single layer silver alkanethiolate lamella: Fast heating/cooling and electrical annealing
2014
2014
Improved Channel Hot-Carrier Reliability in $p$ -FinFETs With Replacement Metal Gate by a Nitrogen Postdeposition Anneal Process
Channel hot-carrier (CHC) reliability in p-FinFET devices is studied related to the postdeposition anneal (PDA) process. Clearly… 
2012
2012
A study on electric properties for pulse laser annealing of ITO film after wet etching
2005
2005
Density-controlled carbon nanotubes
2002
2002
Electronic structure of carbon-free silicon oxynitride films grown using an organic precursor hexamethyl-disilazane
Silicon oxynitride films are grown by plasma-enhanced chemical vapour deposition on single-crystal Si(100) and textured Si solar… 
2001
2001
Thickness-dependent microstructures and electrical properties of CaCu3Ti4O12 films derived from sol-gel process
2000
2000
Single-layer thin HfO/sub 2/ gate dielectric with n+-polysilicon gate
  • L. KangY. Jeon J.C. Lee
  • Symposium on VLSI Technology. Digest of Technical…
  • 2000
  • Corpus ID: 62810790
MOSCAPs and MOSFETs of a single-layer thin HfO/sub 2/ gate dielectric with n+ polysilicon gate were fabricated and characterized… 
1999
1999
Stress relief of tetrahedral amorphous carbon films by post- deposition thermal annealing
1997
1997
An Advanced 2.5nm Oxidized Nitride Gate Dielectric For Highly Reliable 0.25/spl mu/m MOSFETs
Ultrathin gate dielectrics are important to realize high performance and low-voltage operation CMOS devices. An advanced… 
1990
1990
Investigations of Irradiation-Anneal-Reirradiation (IAR) properties trends of RPV welds
Notch ductility, fracture toughness and tensile property trends of two high copper content, submerged arc welds with 288{degree}C… 
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