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Furnace anneal

Furnace annealing is a process used in semiconductor device fabrication which consist of heating multiple semiconductor wafers in order to affect… 
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Related topics

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DopantIon implantationRapid thermal processingSemiconductor

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
Wafer-Level Integration of High-Quality Bulk Piezoelectric Ceramics on Silicon
In this paper, we present a new post-CMOS-compatible piezoelectric thin/thick film technology that allows wafer-level integration… 
2012
2012
A study on electric properties for pulse laser annealing of ITO film after wet etching
2012
2012
3D Structures in Battery Materials
Efficient lithium-ion batteries will play an important role within the development of future mobile and stationary applications… 
2011
2011
Rapid thermal annealing of rare earth implanted ZnO epitaxial layers
2002
2002
Electronic structure of carbon-free silicon oxynitride films grown using an organic precursor hexamethyl-disilazane
Silicon oxynitride films are grown by plasma-enhanced chemical vapour deposition on single-crystal Si(100) and textured Si solar… 
2002
2002
Phase transformation and paired-plate precipitate formation in Pb0.91La0.09Zr0.65Ti0.35O3 films grown on sapphire substrates
2001
2001
Thickness-dependent microstructures and electrical properties of CaCu3Ti4O12 films derived from sol-gel process
2000
2000
Single-layer thin HfO/sub 2/ gate dielectric with n+-polysilicon gate
  • L. KangY. Jeon J.C. Lee
  • Symposium on VLSI Technology. Digest of Technical…
  • 2000
  • Corpus ID: 62810790
MOSCAPs and MOSFETs of a single-layer thin HfO/sub 2/ gate dielectric with n+ polysilicon gate were fabricated and characterized… 
1999
1999
Stress relief of tetrahedral amorphous carbon films by post- deposition thermal annealing
1990
1990
Investigations of Irradiation-Anneal-Reirradiation (IAR) properties trends of RPV welds
Notch ductility, fracture toughness and tensile property trends of two high copper content, submerged arc welds with 288{degree}C… 
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