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Lift-off (microtechnology)

Known as: Lift Off Process 
Lift-off process in microstructuring technology is a method of creating structures (patterning) of a target material on the surface of a substrate (e… 
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Related topics

Related topics

5 relations
Etching (microfabrication)Ohmic contactSputter depositionWafer (electronics)

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2016
2016
Device characterization of the VCSEL-on-silicon as an on chip light source
Advancement of silicon photonics technology can offer a new dimension in data communications with un-precedent bandwidth… 
2015
2015
Flexible Quasi-Vertical In-Ga-Zn-O Thin-Film Transistor With 300-nm Channel Length
In this letter, we report a flexible Indium-Gallium-Zinc-Oxide quasi-vertical thin-film transistor (QVTFT) with 300-nm channel… 
2013
2013
Releasing high aspect ratio SU-8 microstructures using AZ photoresist as a sacrificial layer on metallized Si substrates
This paper presents a successful method for releasing high aspect ratio SU-8 micro-structures by the use of positive photoresist… 
2012
2012
Selective area growth of a- and c-plane GaN nanocolumns by molecular beam epitaxy using colloidal nanolithography
2008
2008
Fabrication of carbon nanotube sensor device by inkjet printing
To overcome the limitation of conventional carbon nanotube fabrication techniques, inkjet printing was directly utilized on a… 
2008
2008
Stress-Induced Lift-Off Method for kerf-loss-free wafering of ultra-thin (∼50 μm) crystalline Si wafers
We present a new wafering method for the production of ultra-thin crystalline silicon. This new lift-off process, named SLIM-cut… 
2008
2008
Silicon-based Photonic Devices : Design, Fabrication and Characterization
The field of Information and Communication Technologies is witnessing a development speed unprecedented in history. Moore’s law… 
2006
2006
Ordered Arrays of Mesoporous Microrods from Recyclable Macroporous Silicon Templates
Ordered mesoporous materials fabricated by exploiting self-assembled surfactants as molecular templates have been intensively… 
2006
2006
A 385-500 GHz Low Noise Superconductor-Insulator- Superconductor Mixer for ALMA Band 8
We report on the design and experimental results of a fix-tuned Superconductor-Insulator-Superconductor (SIS) mixer for Atacama… 
Highly Cited
2004
Highly Cited
2004
Design and development of microfabricated capillary electrophoresis devices with electrochemical detection
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