Lift-off (microtechnology)

Known as: Lift Off Process 
Lift-off process in microstructuring technology is a method of creating structures (patterning) of a target material on the surface of a substrate (e… (More)
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Related topics

Related topics

5 relations
Etching (microfabrication)Ohmic contactSputter depositionWafer (electronics)

Broader (1)

Semiconductor device fabrication

Papers overview

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2017
2017
Demonstration of RF and Microwave Passive Circuits Through 3-D Printing and Selective Metalization
The ultimate goal of this paper is to print radio frequency (RF) and microwave structures using a 3-D platform and to pattern… (More)
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2011
2011
High-throughput micromixers based on acoustic streaming induced by surface acoustic wave
Flow characteristics in microfluidic devices is naturally laminar due to the small channel dimensions. Mixing based on molecular… (More)
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2011
2011
Low temperature glass-thin-films for use in power applications
A novel approach on wafer-level passivation of power devices using a thin, hermetic borosilicate glass layer as passivation or… (More)
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Highly Cited
2007
Highly Cited
2007
Gap-Dependent Optical Coupling of Single “ Bowtie ” Nanoantennas Resonant in the Visible
Metallic “bowtie” nanoantennas consisting of two opposing tip-to-tip Au triangles have been fabricated with triangle lengths of… (More)
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2006
2006
Multidirectional UV Lithography for Complex 3-D MEMS Structures
Various three-dimensionally (3-D) complex MEMS structures are fabricated using multidirectional ultraviolet (UV) lithography… (More)
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2005
2005
High-Voltage Diamond Vertical Schottky rectifiers
We have designed, simulated and experimentally demonstrated high-voltage vertical diamond Schottky rectifiers. The rectifiers… (More)
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2004
2004
Plasmon resonance of finite one-dimensional Au nanoparticle chains
We report experimental and theoretical studies on the plasmon resonances of finite one-dimensional chains of Au nanoparticles… (More)
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2004
2004
Heterogeneous integration of CdS filters with GaN LEDs for fluorescence detection microsystems
Microassembly of a hybrid fluorescence detection microsystem by heterogeneous integration of a CdS thin-film filter, an (In, Ga)N… (More)
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Highly Cited
1995
Highly Cited
1995
Imprint of sub-25 nm vias and trenches in polymers
A nanoimprint process that presses a mold into a thin thermoplastic polymer film on a substrat create vias and trenches with a… (More)
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1980
1980
Single-step optical lift-off process
 
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