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Shallow trench isolation

Known as: Box Isolation Technique, STI 
Shallow trench isolation (STI), also known as box isolation technique, is an integrated circuit feature which prevents electric current leakage… 
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Related topics

Related topics

11 relations
CMOSChemical-mechanical planarizationClock feedthroughEtching (microfabrication)

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2010
2010
Low Dose Rate Effects in Shallow Trench Isolation Regions
Dose-rate effects are studied in shallow trench isolation regions. Increased damage is observed at low dose rate, with a… 
2008
2008
Strained CMOS Devices With Shallow-Trench-Isolation Stress Buffer Layers
In this brief, shallow-trench-isolation (STI) stress buffer techniques, including sidewall stress buffer and channel surface… 
Review
2007
Review
2007
Transient Eastern Mediterranean deep waters in response to the massive dense-water output of the Aegean Sea in the 1990s
Highly Cited
2005
Highly Cited
2005
Estimation of the rupture length and velocity of the Great Sumatra earthquake of Dec 26, 2004 using hydroacoustic signals
[1] Unprecedented hydroacoustic observations of the megathrust earthquake of 26 Dec, 2004 were afforded by a network of 5 small… 
Highly Cited
2004
Highly Cited
2004
Nonuniform total-dose-induced charge distribution in shallow-trench isolation oxides
A new approach for modeling the radiation-induced charge distribution in shallow-trench isolation (STI) structures shows that… 
Highly Cited
2004
Highly Cited
2004
Pacific–Antarctic–Australia motion and the formation of the Macquarie Plate
SUMMARY Magnetic anomaly and fracture zone data on the Southeast Indian Ridge (SEIR) are analysed in order to constrain the… 
Highly Cited
2003
Highly Cited
2003
Source process of the recurrent Tokachi-oki earthquake on September 26, 2003, inferred from teleseismic body waves
On September 26, 2003, a large earthquake with a magnitude of 8.0 occurred along the Kuril trench off Tokachi, Hokkaido, Japan… 
2002
2002
Nanotopography Issues in Shallow Trench Isolation CMP
As advancing technologies increase the demand for planarity in integrated circuits, nanotopography has emerged as an important… 
Highly Cited
2000
Highly Cited
2000
Magmatic–tectonic effects of high thermal regime at the site of active ridge subduction: the Chile Triple Junction model
Review
1998
Review
1998
Shallow trench isolation for advanced ULSI CMOS technologies
This paper reviews the requirements and challenges in designing a Shallow Trench Isolation (STI) process flow for 0.1 /spl mu/m… 
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