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Shallow trench isolation

Known as: Box Isolation Technique, STI 
Shallow trench isolation (STI), also known as box isolation technique, is an integrated circuit feature which prevents electric current leakage… Expand
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Related topics

Related topics

11 relations
CMOSChemical-mechanical planarizationClock feedthroughEtching (microfabrication)
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2011
2011
Modeling Low Dose Rate Effects in Shallow Trench Isolation Oxides
Low dose rate experiments on field-oxide-field-effect-transistors (FOXFETs) fabricated in a 90 nm CMOS technology indicate that… Expand
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2010
2010
Low Dose Rate Effects in Shallow Trench Isolation Regions
Dose-rate effects are studied in shallow trench isolation regions. Increased damage is observed at low dose rate, with a… Expand
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2008
2008
Total ionizing dose effects in shallow trench isolation oxides
The peaked evolution of leakage current with total ionizing dose observed in transistors in 130 nm generation technologies is… Expand
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2005
2005
Estimation of the rupture length and velocity of the Great Sumatra earthquake of Dec 26, 2004 using hydroacoustic signals
[1] Unprecedented hydroacoustic observations of the megathrust earthquake of 26 Dec, 2004 were afforded by a network of 5 small… Expand
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Highly Cited
2004
Highly Cited
2004
Nonuniform total-dose-induced charge distribution in shallow-trench isolation oxides
A new approach for modeling the radiation-induced charge distribution in shallow-trench isolation (STI) structures shows that… Expand
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Highly Cited
2004
Highly Cited
2004
Pacific-Antarctic-Australia motion and the formation of the Macquarie Plate
SUMMARY Magnetic anomaly and fracture zone data on the Southeast Indian Ridge (SEIR) are analysed in order to constrain the… Expand
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Highly Cited
2004
Highly Cited
2004
Isolation and properties of barophilic and barotolerant bacteria from deep-sea mud samples
Several barophilic and barotolerant bacteria were isolated from deep-sea mud samples of Suruga Bay (2485 m depth), the Ryukyu… Expand
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2001
2001
Scatterometry for shallow trench isolation (STI) process metrology
Scatterometry is a non-destructive optical metrology based on the analysis of light scattered form a periodic sample. In this… Expand
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2000
2000
Modeling of chemical mechanical polishing for shallow trench isolation
for Shallow Trench Isolation by Terence Gan Submitted to the Department of Electrical Engineering and Computer Science in Partial… Expand
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Highly Cited
1998
Highly Cited
1998
Challenges in hardening technologies using shallow-trench isolation
Challenges related to radiation hardening CMOS technologies with shallow-trench isolation are explored. It is shown that… Expand
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