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Probe card
A probe card is an interface between an electronic test system and a semiconductor wafer. Typically the probe card is mechanically docked to a prober…
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Related topics
Related topics
9 relations
Contact pad
Dynamic random-access memory
Flash memory
Microelectromechanical systems
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Broader (1)
Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2009
2009
A Highly Manufacturable Large Area Array MEMS Probe Card Using Electroplating and Flipchip Bonding
Bonghwan Kim
,
Jong-Bok Kim
,
Jong-Hyun Kim
IEEE transactions on industrial electronics…
2009
Corpus ID: 684655
A highly manufacturable microelectromechanical systems (MEMS) probe card was developed by using flipchip bonding technology…
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2006
2006
An Experimental and Numerical Investigation Into Multilayer Probe Card Layout Design
De-Shin Liu
,
M. Shih
IEEE transactions on electronics packaging…
2006
Corpus ID: 31084299
This paper conducts experimental and numerical investigations into the microforce probing technique used to test the…
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2005
2005
Silicon Micro‐probe Card Using Porous Silicon Micromachining Technology
Young Min Kim
,
H. Yoon
,
Jong-Hyun Lee
2005
Corpus ID: 62584627
We present a new type of silicon micro‐probe card using a three‐dimensional probe beam of the cantilever type. It was fabricated…
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2005
2005
Electroplated Ni microcantilever probe with electrostatic actuation
T. Itoh
,
S. Kawamura
,
K. Kataoka
,
T. Suga
2005
Corpus ID: 55833621
2004
2004
Parallel test reduces cost of test more effectively than just a cheap tester
Jochen Rivoir
IEEE/CPMT/SEMI 29th International Electronics…
2004
Corpus ID: 42304736
Today's manufacturers of high-volume consumer devices are under tremendous cost pressure and consequently under extreme pressure…
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Highly Cited
2003
Highly Cited
2003
Electroplating Ni micro-cantilevers for low contact-force IC probing
K. Kataoka
,
S. Kawamura
,
T. Itoh
,
K. Ishikawa
,
H. Honma
,
T. Suga
2003
Corpus ID: 53326884
2003
2003
TLP systems with combined 50- and 500-/spl Omega/ impedance probes and Kelvin probes
E. Grund
,
R. Gauthier
IEEE transactions on electronics packaging…
2003
Corpus ID: 41769954
Transmission line pulse (TLP) systems are mainly classified by their impedance, such as a 50- or 500-/spl Omega/ current source…
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1998
1998
Fabrication of a Silicon Micro-Probe for Vertical Probe Card Application
Yong-Dae Kim
,
J. Sim
,
J. Nam
,
Jong-Hyun Lee
Digest of Papers. Microprocesses and…
1998
Corpus ID: 19602047
We report on the fabrication of a new type of probe card that uses a porous silicon micromachining technique. Curled cantilever…
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1996
1996
A BiCMOS active substrate probe card technology for digital testing
M. Zargari
,
J. Leung
,
S. Wong
,
B. Wooley
IEEE International Solid-State Circuits…
1996
Corpus ID: 20907279
An active substrate silicon probe card employs a polyimide membrane formed on a silicon substrate. The probe card combines…
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1995
1995
SiProbe-a new technology for wafer probing
Karl F. Zimmermann
International Test Conference
1995
Corpus ID: 26911557
This paper will describe a new wafer probing technology that is particularly applicable to the simultaneous probing of multiple…
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