Probe card

A probe card is an interface between an electronic test system and a semiconductor wafer. Typically the probe card is mechanically docked to a prober… (More)
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Papers overview

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2014
2014
Multichannel die probing increases test speed and lowers the overall cost of testing. A new high-density wafer probe card based… (More)
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Highly Cited
2011
Highly Cited
2011
Through-Silicon Via (TSV)-based 3D stacked ICs (SICs) are becoming increasingly important in the semiconductor industry, yet pre… (More)
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2004
2004
A MEMS probe card consisting of micro-springs arranged in 250-/spl mu/m-pitch array has been presented. Three-dimensional 'S… (More)
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2004
2004
We have designed and fabricated a new type of MEMS probe card consisting of electrostatically-driven microprobes, which can be… (More)
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2003
2003
We report on a new type of micromachined probe card which utilizes fritting process to make contact to Al or Cu pads with low… (More)
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2003
2003
We have designed and fabricated a new type of MEMS probe card consisting of electrostatically-driven microprobes, which can be… (More)
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2002
2002
We have developed a novel cantilever-type probe which is capable of less than 70 of pitch and 12g of force. This probe is… (More)
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Highly Cited
2002
Highly Cited
2002
0740-7475/02/$17.00 © 2002 IEEE May–June 2002 MODERN PROCESS TECHNOLOGIES and design tools allow the implementation of very large… (More)
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1998
1998
The bulk of the world's wafer production is still being probed with a traditional wirelneedle probe card arrangement. However… (More)
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1996
1996
An active substrate silicon probe card employs a polyimide membrane formed on a silicon substrate. The probe card combines… (More)
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