Microfabrication

Known as: Microengineering, Microforming, Micromanufacturing 
Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication… (More)
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Papers overview

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Review
2017
Review
2017
The development of lab-On-A-Chip (LOC) devices over the past decade has attracted growing interest. LOC devices aim to achieve… (More)
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Highly Cited
2005
Highly Cited
2005
This work presents our recent progress in the development of an Si wire waveguiding system for microphotonics devices. The Si… (More)
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2005
2005
This paper presents the design and microfabrication of a coaxial dual model filter for applications in LMDS systems. The coaxial… (More)
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Highly Cited
2004
Highly Cited
2004
Advances in manufacturing technology for microstructures are allowing new opportunities for vacuum electron devices producing… (More)
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2004
2004
We describe a novel high aspect ratio radiofrequency linear ion trap geometry that is amenable to modern microfabrication… (More)
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2004
2004
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An… (More)
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Review
2003
Review
2003
  • D. Kauzlarick
  • IEEE Engineering in Medicine and Biology Magazine
  • 2003
Cancer Diagnosis, Prognosis, and Patient Management Edited by Raouf N.G. Naguib and Gajann V. Sherbet, CRC Press, 2001. ISBN 0… (More)
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Highly Cited
1999
Highly Cited
1999
Two-photon excitation provides a means of activating chemical or physical processes with high spatial resolution in three… (More)
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Highly Cited
1998
Highly Cited
1998
The successful fabrication of surface micromachined ultrasonic transducers is reported. In a key step of the microfabrication… (More)
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1997
1997
We use electrostatic interactions to direct the patterning of gold disks having ∼10-μm diameters on functionalized surfaces… (More)
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