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Microfabrication

Known as: Microengineering, Microforming, Micromanufacturing 
Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication… 
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Related topics

Related topics

31 relations
Capacitively coupled plasmaChemical vapor depositionChemical-mechanical planarizationCleanroom

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2010
Highly Cited
2010
Aptamer-conjugated dendrimer-modified quantum dots for cancer cell targeting and imaging
Highly Cited
2007
Highly Cited
2007
Silanization and antibody immobilization on SU-8
Highly Cited
2006
Highly Cited
2006
A Programmable 0.18-$\mu\hbox{m}$ CMOS Electrochemical Sensor Microarray for Biomolecular Detection
A configurable electrochemical sensor microarray system-on-a-chip fabricated in a standard digital 0.18-mum complementary metal… 
Highly Cited
2003
Highly Cited
2003
Microfabricated fuel cells
Highly Cited
2002
Highly Cited
2002
Template-Directed Self-Assembly of 10-μm-Sized Hexagonal Plates
This article presents a strategy for the fabrication of ordered microstructures using concepts of design inspired by molecular… 
Highly Cited
2000
Highly Cited
2000
Microfabricated multi-frequency particle impedance characterization system
We have developed a microfabricated flow-through impedance characterization system capable of performing AC, multi-frequency… 
Highly Cited
1999
Highly Cited
1999
A study of defects in ultra-thin transparent coatings on polymers
Highly Cited
1998
Highly Cited
1998
Modular concept of a laboratory on a chip for chemical and biochemical analysis
Highly Cited
1998
Highly Cited
1998
Transient liquid crystal thermometry of microfabricated PCR vessel arrays
Polymerase chain reaction (PCR) using micromachined structures promises improved temperature uniformity and cycling time together… 
Highly Cited
1998
Highly Cited
1998
Molecular surgery of DNA based on electrostatic micromanipulation
A novel method for the space-resolved dissection (molecular surgery) of DNA using electrostatic molecular manipulation is… 
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