Microfabrication

Known as: Microengineering, Microforming, Micromanufacturing 
Microfabrication is the process of fabricating miniature structures of micrometre scales and smaller. Historically, the earliest microfabrication… (More)
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Capacitively coupled plasmaChemical vapor depositionChemical-mechanical planarizationCleanroom
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Papers overview

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Review
2017
Review
2017
A review of microfabrication techniques and dielectrophoretic microdevices for particle manipulation and separation
The development of lab-On-A-Chip (LOC) devices over the past decade has attracted growing interest. LOC devices aim to achieve… (More)
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Highly Cited
2005
Highly Cited
2005
Microphotonics devices based on silicon microfabrication technology
This work presents our recent progress in the development of an Si wire waveguiding system for microphotonics devices. The Si… (More)
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2005
2005
SU-8 Ka-band filter and microfabrication
This paper presents the design and microfabrication of a coaxial dual model filter for applications in LMDS systems. The coaxial… (More)
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Highly Cited
2004
Highly Cited
2004
Microfabrication of high-frequency vacuum electron devices
Advances in manufacturing technology for microstructures are allowing new opportunities for vacuum electron devices producing… (More)
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2004
2004
Planar ion trap geometry for microfabrication
We describe a novel high aspect ratio radiofrequency linear ion trap geometry that is amenable to modern microfabrication… (More)
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2004
2004
TWO-PHOTON-ABSORBED PHOTOPOLYMERIZATION FOR TH : REE-DIMENSIONAL MICROFABRICATION
We report a method for three-dimensional microfabrication with photopolymerization stimulated by two-photon absorption. An… (More)
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Review
2003
Review
2003
Fundamentals of microfabrication, the science of miniaturization, 2nd edition [Book Review]
  • D. Kauzlarick
  • IEEE Engineering in Medicine and Biology Magazine
  • 2003
Cancer Diagnosis, Prognosis, and Patient Management Edited by Raouf N.G. Naguib and Gajann V. Sherbet, CRC Press, 2001. ISBN 0… (More)
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Highly Cited
1999
Highly Cited
1999
Two-photon polymerization initiators for three-dimensional optical data storage and microfabrication
Two-photon excitation provides a means of activating chemical or physical processes with high spatial resolution in three… (More)
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Highly Cited
1998
Highly Cited
1998
The Microfabrication of Capacitive Ultrasonic Transducers
The successful fabrication of surface micromachined ultrasonic transducers is reported. In a key step of the microfabrication… (More)
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1997
1997
Microfabrication through Electrostatic Self-Assembly
We use electrostatic interactions to direct the patterning of gold disks having ∼10-μm diameters on functionalized surfaces… (More)
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