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Cleanroom
Known as:
Cleanroom design and construction
, Clean rooms
, Class 3000
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A cleanroom or clean room is an environment, typically used in manufacturing, including of pharmaceutical products or scientific research, as well as…
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Related topics
Related topics
16 relations
Centre for Nanoscience and Quantum Information
Cleanroom software engineering
Data recovery
Epson Robots
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Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2016
2016
First LLRF Tests of BERLinPro Gun Cavity Prototype
P. Echevarria
,
J. Knobloch
,
O. Kugeler
,
A. Neumann
,
K. Przygoda
,
A. Ushakov
2016
Corpus ID: 44636079
The goal of Berlin Energy Recovery Linac Project (BERLinPro) is the generation of a 50 MeV, 100-mA low emittance (below 1 mm mrad…
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2016
2016
Hybrid Dielectric Thin Films on Flexible Substrates for Embedded Capacitor Applications
Dipankar Ghosh
,
Stephen P. Maki
,
Christopher F. Lyons
,
S. Theiss
,
R. Owings
IEEE Transactions on Components, Packaging, and…
2016
Corpus ID: 35257593
This paper describes a novel fabrication process and technology for making hybrid thin film capacitors on flexible metallic…
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2012
2012
Simple and low-cost fabrication of PDMS microfluidic round channels by surface-wetting parameters optimization
M. De Ville
,
P. Coquet
,
P. Brunet
,
R. Boukherroub
2012
Corpus ID: 16930916
Convenient for both biologists and MEMS designers, Polydimethylsiloxane (PDMS) polymer is intensively investigated for its…
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2009
2009
Localized gallium doping and cryogenic deep reactive ion etching in fabrication of silicon nanostructures
N. Chekurov
,
K. Grigoras
,
Antti Peltonen
,
S. Franssila
,
I. Tittonen
2009
Corpus ID: 55189541
We present a novel fabrication method to create controlled 3-dimensional silicon nanostructures with the lateral dimensions that…
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Review
2005
Review
2005
The Environment's Impact on Safety
C. Zimring
,
R. Ulrich
,
Anjali Joseph
,
Xiao-Bo Quan
2005
Corpus ID: 74107086
U.S. hospitals are dangerous and stressful for patients, families, and staff members. Medical errors and hospital-acquired…
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2004
2004
Dynamic interferometry handles vibration
2004
Corpus ID: 13706691
Mechanical vibration and turbulent airflow present significant problems for most interferometric test methods. Conditions on the…
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2004
2004
DESIGN OF THE LOW-BETA, QUARTER-WAVE RESONATOR AND ITS CRYOMODULE FOR THE SPIRAL 2 PROJECT
P. Bernaudin
,
P. Bosland
,
S. Chel
,
G. Devanz
,
P. Hardy
,
F. Michel
2004
Corpus ID: 122563522
The SPIRAL 2 project, to be built in GANIL, consists of a 40 MeV linear accelerator for 5 mA of deuterons and a target-source…
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1989
1989
Flocculation clustering and weakness of ceramics
K. Kendall
,
N. Alford
,
W. Clegg
,
J. Birchall
Nature
1989
Corpus ID: 23134745
IT is well-known that the mechanical properties of ceramics are sensitive to flaws which cause weakness1,2. The most damaging…
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1982
1982
Modern strategies in the determination of very low concentrations of elements in inorganic and organic materials
P. Tschopel
1982
Corpus ID: 54696419
Abstract
1970
1970
Design and Operation of Clean Rooms
P. R. Austin
1970
Corpus ID: 137180777