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Cleanroom

Known as: Cleanroom design and construction, Clean rooms, Class 3000 
A cleanroom or clean room is an environment, typically used in manufacturing, including of pharmaceutical products or scientific research, as well as… Expand
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2015
Highly Cited
2015
Recently, metasurfaces have received increasing attention due to their ability to locally manipulate the amplitude, phase and… Expand
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Highly Cited
2013
Highly Cited
2013
The HOPE mass spectrometer of the Radiation Belt Storm Probes (RBSP) mission (renamed the Van Allen Probes) is designed to… Expand
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Highly Cited
2010
Highly Cited
2010
We have realized a fiber-based Fabry?Perot cavity with CO2 laser-machined mirrors. It combines very small size, high finesse… Expand
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Highly Cited
2005
Highly Cited
2005
Approximately $30 billion (2000$) has been spent on Superfund clean-ups of hazardous waste sites, and remediation efforts are… Expand
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Highly Cited
2004
Highly Cited
2004
This article documents a large set of heretofore unpublished details Collins used in his parser, such that, along with Collins… Expand
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Highly Cited
2004
Highly Cited
2004
We report a new approach to greatly simplify the fabrication of nanofluidic channels with well-controlled dimensions. It is… Expand
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Highly Cited
2002
Highly Cited
2002
This paper reports a simple and versatile technique for generating structures on the surfaces of poly(dimethylsiloxane) (PDMS… Expand
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Highly Cited
1999
Highly Cited
1999
The fractional quantum Hall effect is a very counterintuitive physical phenomenon. It implies that many electrons, acting in… Expand
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Highly Cited
1997
Highly Cited
1997
Polydimethylsiloxane (PDMS) is a commercially available physically and chemically stable silicone rubber. It has a unique… Expand
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Highly Cited
1993
Highly Cited
1993
This letter describes a technique that can be used to produce well‐defined features of gold. The technique involves patterning of… Expand
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