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Ion beam
Known as:
Ion ray
, Ion beam etching
, IB
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An ion beam is a type of charged particle beam consisting of ions. Ion beams have many uses in electronics manufacturing (principally ion…
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Related topics
Related topics
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Failure analysis
Focused ion beam
Ion beam deposition
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Broader (1)
Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2013
2013
The interference effect of laser-assisted bremsstrahlung emission in Coulumb fields of two nuclei
Ankang Li
,
Jiaxiang Wang
,
+5 authors
S. Kais
2013
Corpus ID: 35441679
In this paper, the spontaneous bremsstrahlung emission from an electron scattered by two fixed nuclei in an intense laser field…
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2008
2008
Slab waveguides and nanoscale patterning of pulsed laser-deposited Ge0.2Se0.8 chalcogenide films
W. Liu
,
G. Hoffman
,
Wenchen Zhou
,
R. Reano
,
P. Boolchand
,
R. Sooryakumar
2008
Corpus ID: 117722480
Planar slab waveguides were fabricated by pulsed laser deposition from GexSe1−x glass compounds with composition (x∼0.2) that…
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2007
2007
Target ionization by a high current relativistic monoenergetic electron beam
A. Debayle
,
V. Tikhonchuk
2007
Corpus ID: 122896056
The propagation through an insulator of a high-current monoenergetic fast electron beam is investigated in a one-dimensional…
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2005
2005
Extraction of a nearly monoenergetic ion beam using a pulsed plasma
Lin Xu
,
D. J. Economou
,
V. Donnelly
,
P. Ruchhoeft
2005
Corpus ID: 96408815
A nearly monoenergetic ion beam was extracted from a capacitively coupled pulsed Ar plasma. The electron temperature decayed…
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2003
2003
Extraordinary hall effect in Fe-Cr giant magnetoresistive multilayers
P. Khatua
,
A. Majumdar
,
A. Hebard
,
D. Temple
2003
Corpus ID: 29287047
We show that for giant magnetoresistive Fe-Cr multilayer samples, the scaling law for the extraordinary Hall constant, R S…
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1999
1999
Probabilistic Estimates of Upset Caused by Single Event Transients
Joel Hass
1999
Corpus ID: 16011225
Abstract – Single event transients occur when cosmic particles strike nodes in a logic network. Transients may propagate to a…
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1998
1998
Swarms of UAVs and fighter aircraft
M. W. Trahan
,
J. S. Wagner
,
K. Stantz
,
P. Gray
,
R. Robinett
1998
Corpus ID: 107504990
This paper describes a method of modeling swarms of UAVs and/or fighter aircraft using particle simulation concepts. Recent…
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1995
1995
Cosmic ray simulator: A versatile apparatus for quantitative studies on the interaction of cosmic rays with frozen solids by on line and in situ quadrupole mass spectrometry and Fourier transform…
R. Kaiser
,
A. Gabrysch
,
K. Roessler
1995
Corpus ID: 30886205
The cosmic ray simulator consists of a 50 l cylindrical stainless steel chamber. A rotable cold finger milled of a silver (111…
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1992
1992
Photoelectron spectroscopy of SF
M. Polak
,
M. Gilles
,
W. Lineberger
1992
Corpus ID: 97564140
The 351 nm photoelectron spectrum of SF− has been recorded with 9 meV resolution. Transitions from the 1Σ+ SF− ground electronic…
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1988
1988
Oxidation of silicon by a low‐energy ion beam: Experiment and model
S. Todorov
,
E. Fossum
1988
Corpus ID: 13972959
The self‐limiting oxidation of silicon by a low‐energy ion beam (40–120 eV) is described by an implantation‐sputtering model. The…
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