Focused ion beam

Known as: Fib, Focussed Ion Beam (FIB), Focussed ion beam 
Focused ion beam, also known as FIB, is a technique used particularly in the semiconductor industry, materials science and increasingly in the… (More)
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Papers overview

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2012
2012
Optical lithography is the unrivalled mainstream patterning method that allows for costefficient, high-volume fabrication of… (More)
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2009
2009
Diamond is unmatched in its optical, mechanical, thermal and electrical properties. Its high thermal conductivity, extensive… (More)
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Highly Cited
2008
Highly Cited
2008
Introduction Analyzing the synaptic basis of neuronal circuits within a volume of brain tissue requires electron microscopy. With… (More)
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Highly Cited
2007
Highly Cited
2007
The FIB Instrument The basic functions of the FIB, namely, imaging and sputtering with an ion beam, require a highly focused beam… (More)
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2007
2007
Although focused ion beam (FIB) processing is a well-developed technology for many applications in electronics and physics, it… (More)
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2007
2007
Si amorphous 41 nm /Cr polycrystalline 46 nm multilayer structure was irradiated by 30 keV Ga+ ions with fluences in the range of… (More)
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2007
2007
A new approach to fabricating nanopore is presented. It is based on focused ion beam (FIB) sputtering to mill through a silicon… (More)
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2005
2005
Recent photonic device structures, including distributed Bragg reflectors (DBRs), one-dimensional (1-D) or two-dimensional (2-D… (More)
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Review
2004
Review
2004
Focused Ion Beam (FIB) lithography has significant advantages over the electron beam counterpart in terms of resist sensitivity… (More)
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1986
1986
Methods of making and breaking connections on an Al conductor test pattern using a focused ion beam (FIB) are demonstrated… (More)
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