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Ultra-high-purity steam for oxidation and annealing

Known as: Ultra High Purity Steam for Oxidation and Annealing 
Ultra-high-purity steam, also called clean steam, UHP steam or high purity water vapor, is used in a variety of industrial manufacturing processes… 
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Related topics

Related topics

8 relations
Atomic layer depositionGate oxideRapid thermal processingSemiconductor

Broader (1)

Semiconductor device fabrication

Papers overview

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Review
2013
Review
2013
Surface design of biodegradable magnesium alloys — A review
Highly Cited
2012
Highly Cited
2012
Effect of nanocellulose isolation techniques on the formation of reinforced poly(vinyl alcohol) nanocomposite films
Three techniques including acid hydrolysis (AH), 2,2,6,6-tetramethylpiperidine-1-oxyl radical (TEMPO)-mediated oxidation (TMO… 
Highly Cited
2005
Highly Cited
2005
Rates of methanogenesis and methanotrophy in deep‐sea sediments
We use the carbon isotopic composition (δ13C) of the dissolved inorganic carbon (DIC) of pore fluids from Leg 175 of the Ocean… 
Highly Cited
2003
Highly Cited
2003
EFFECTS OF ACIDITY AND INORGANIC IONS ON THE PHOTOCATALYTIC DEGRADATION OF DIFFERENT AZO DYES
Review
2002
Review
2002
Trichloroisocyanuric Acid: A Safe and Efficient Oxidant
The literature on trichloroisocyanuric acid (TCCA) has been reviewed. TCCA is a safe and efficient reagent, useful for… 
Review
2001
Review
2001
Cyclohexane oxidation continues to be a challenge
Highly Cited
1996
Highly Cited
1996
Microbial Growth on C1 Compounds
The preceding paper described the isolation of an organism, Pseudomonas AM 1, which can grow on methanol or for- mate as sole… 
Highly Cited
1990
Highly Cited
1990
Oxyfunctionalization of alkanes with hydrogen peroxide on titanium silicalite
BECAUSE of the chemical inertness of alkanes, the introduction of functional groups into them by oxidation has tended to require… 
Highly Cited
1980
Highly Cited
1980
Homogeneous Catalysis: The Applications and Chemistry of Catalysis by Soluble Transition Metal Complexes
Trends in Homogeneous Catalysis in Industry. Isomerization of Olefins. Reactions of Olefins and Dienes--Hydrogenation and HY… 
Highly Cited
1971
Highly Cited
1971
IMMUNOCHEMICAL STUDIES ON BLOOD GROUPS
A partially purified blood group-like substance obtained from milk showed I activity with 2 of 21 anti-I sera. With these… 
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