Tungsten disilicide

Known as: Tungsten silicide, Tungsten(IV) silicide, WSi2 
Tungsten silicide (WSi2) is an inorganic compound, a silicide of tungsten. It is an electrically conductive ceramic material.
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Chemical vapor depositionMicroelectromechanical systemsMolybdenum disilicidePlasma etching

Papers overview

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2015
2015
Statistical optimization of process parameters for threshold voltage in 22 nm p-Type MOSFET using Taguchi method
This paper aims to study the effect of process parameter variation on a nano-scaled planar p-type MOSFET (metal-oxide… (More)
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Highly Cited
2013
Highly Cited
2013
Detecting single infrared photons with 93 % system efficiency
1 Single-photon detectors1 at near-infrared wavelengths with 2 high system detection efficiency (>90%), low dark count rate 3 (<1… (More)
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2013
2013
Tungsten silicide superconducting nanowire arrays for the lunar laser OCTL terminal
We have developed 12-pixel arrays of fiber-coupled tungsten silicide superconducting nanowire single photon detectors and… (More)
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2013
2013
Superconducting single photon detectors
There is increasing interest in using superconducting optical photon detectors in a variety of applications. These applications… (More)
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2005
2005
Tunable work function in fully nickel-silicided polysilicon gates for metal gate MOSFET applications
The work function of fully nickel-silicided polysilicon was investigated. The midgap work function (4.7 eV) was obtained for… (More)
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2005
2005
SiGe HBTs on bonded SOI incorporating buried silicide layers
A technology is described for fabricating SiGe heterojunction bipolar transistors (HBTs) on wafer-bonded silicon-on-insulator… (More)
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1998
1998
Raman study of tungsten disilicide formation in thin films
Transition metal disilicides are of great interest due to their potential applications in microelectronic devices. Especially… (More)
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1997
1997
Raman study of tungsten disilicide formation in thin films
Transition metal disilicides are of great interest due to their potential applications in microelectronic devices. Especially… (More)
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Highly Cited
1985
Highly Cited
1985
Optimal interconnection circuits for VLSI
The propagation delay of interconnection lines is a major factor in determining the performance Of VLSI circuits because the RC… (More)
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Highly Cited
1982
Highly Cited
1982
Effect of scaling of interconnections on the time delay of VLSI circuits
Effect of scaling of dimensions, i.e., increase in chip size and decrease in minimum feature size, on the RC time delay… (More)
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