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Plasma cleaning

Known as: Cleaning 
Plasma cleaning involves the removal of impurities and contaminants from surfaces through the use of an energetic plasma or Dielectric barrier… 
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Related topics

Related topics

6 relations
Indium tin oxidePlasma ashingPlasma etchingRemote plasma

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2013
Highly Cited
2013
Large scale atmospheric pressure chemical vapor deposition of graphene
Highly Cited
2008
Highly Cited
2008
GaAs interfacial self-cleaning by atomic layer deposition
The reduction and removal of surface oxides from GaAs substrates by atomic layer deposition (ALD) of Al2O3 and HfO2 are studied… 
Highly Cited
2008
Highly Cited
2008
Not quite the average: An empirical study of Web use
In the past decade, the World Wide Web has been subject to dramatic changes. Web sites have evolved from static information… 
Highly Cited
2006
Highly Cited
2006
Activated Carbon Surfaces in Environmental Remediation
Highly Cited
2004
Highly Cited
2004
Isolation and purification of Australian isolates of the toxic cyanobacteriumMicrocystis aeruginosa Kütz
Isolation and laboratory culture ofMicrocystis aeruginosa Kütz. using a growth medium (MLA medium) suitable for both non-axenic… 
Highly Cited
2001
Highly Cited
2001
Progress in Radiocarbon Target Preparation at the Antares AMS Centre
We present routine methods of target preparation for radiocarbon analysis at the ANTARES Accelerator Mass Spectrometry (AMS… 
Highly Cited
2000
Highly Cited
2000
Membrane filtration of natural organic matter: factors and mechanisms affecting rejection and flux decline with charged ultrafiltration (UF) membrane
Review
2000
Review
2000
Evolution and ecology of cleaning symbioses in the sea
Cleaning symbioses are among the most intriguing interspecific interactions. Understanding their evolution has been hindered by… 
Review
1997
Review
1997
Neuronal Nicotinic Acetylcholine Receptor Activation Modulates g-Aminobutyric Acid Release from CA 1 Neurons of Rat Hippocampal Slices 1
In the present study we investigated electrophysiologically the nicotinic responses of pyramidal neurons and interneurons… 
Highly Cited
1994
Highly Cited
1994
Scheduling jobs under simple linear deterioration
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