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Plasma cleaning

Known as: Cleaning 
Plasma cleaning involves the removal of impurities and contaminants from surfaces through the use of an energetic plasma or Dielectric barrier… 
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Related topics

Related topics

6 relations
Indium tin oxidePlasma ashingPlasma etchingRemote plasma

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2011
Highly Cited
2011
Energy optimization of hydrogen production from lignocellulosic biomass
Highly Cited
2004
Highly Cited
2004
Atomic layer deposition of high-/spl kappa/ dielectric for germanium MOS applications - substrate
In this letter, we present the use of atomic layer deposition (ALD) for high-/spl kappa/ gate dielectric formation in Ge MOS… 
Highly Cited
2001
Highly Cited
2001
The Nimble XML data integration system
For better or for worse, XML has emerged as a de facto standard for data interchange. This consensus is likely to lead to… 
Highly Cited
2001
Highly Cited
2001
Red-Tailed Guenons (Cercopithecus ascanius) and Strychnos mitis: Evidence for Plant Benefits Beyond Seed Dispersal
I report data collected on red-tailed guenon (Cercopithecus ascanius schmidti) fruit processing behaviors between June 1993 and… 
Review
1997
Review
1997
An Outbreak of Hematopoietic and Reproductive Disorders Due to Solvents Containing 2‐Bromopropane in an Electronic Factory, South Korea: Epidemiological Survey
An Outbreak of Hematopoietic and Reproductive Disorders Due to Solvents Containing 2‐Bromopropane in an Electronic Factory, South… 
Highly Cited
1996
Highly Cited
1996
High temperature gas cleaning
Highly Cited
1993
Highly Cited
1993
Gas cleaning for advanced coal-based power generation
Highly Cited
1992
Highly Cited
1992
Backward assembly planning with assembly cost analysis
  • Sukhan Lee
  • Proceedings IEEE International Conference on…
  • 1992
  • Corpus ID: 9784641
The author considers automatic assembly planning by developing a backward assembly planner which handles the case where an… 
Highly Cited
1991
Highly Cited
1991
Oxide thickness effect and surface roughening in the desorption of the oxide from GaAs
The temperature for thermal desorption of the gallium oxide from GaAs is shown to increase linearly with oxide thickness. In… 
Highly Cited
1979
Highly Cited
1979
Materials and methods for cleaning dentures.
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