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Plasma cleaning
Known as:
Cleaning
Plasma cleaning involves the removal of impurities and contaminants from surfaces through the use of an energetic plasma or Dielectric barrier…
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Related topics
Related topics
6 relations
Indium tin oxide
Plasma ashing
Plasma etching
Remote plasma
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Broader (1)
Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2004
Highly Cited
2004
Improving market clearing price prediction by using a committee machine of neural networks
Jau-Jia Guo
,
P. Luh
IEEE Transactions on Power Systems
2004
Corpus ID: 18381447
Predicting market clearing prices is an important but difficult task, and neural networks have been widely used. A single neural…
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Highly Cited
2004
Highly Cited
2004
Atomic layer deposition of high-/spl kappa/ dielectric for germanium MOS applications - substrate
C. O. Chui
,
Hyoungsub Kim
,
P. McIntyre
,
K. Saraswat
IEEE Electron Device Letters
2004
Corpus ID: 38408577
In this letter, we present the use of atomic layer deposition (ALD) for high-/spl kappa/ gate dielectric formation in Ge MOS…
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Highly Cited
2002
Highly Cited
2002
Data mining for improving a cleaning process in the semiconductor industry
D. Braha
,
A. Shmilovici
2002
Corpus ID: 1508669
As device geometry continues to shrink, micro-contaminants have an increasingly negative impact on yield. By diminishing the…
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Highly Cited
2001
Highly Cited
2001
Internet-based Robotic Systems for Teleoperation
2001
Corpus ID: 18114948
Today's Internet technology provides a convenient way for us to develop an integrated network environment for the diversified…
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Highly Cited
2001
Highly Cited
2001
Size and lipid content of nonmyrmecochorous diaspores: effects on the interaction with litter-foraging ants in the Atlantic rain forest of Brazil
M. A. Pizo
,
P. Oliveira
Plant Ecology
2001
Corpus ID: 43591070
Ants are often attracted to diaspores not adapted for dispersal by ants. These diaspores may occasionally benefit from this…
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Highly Cited
2000
Highly Cited
2000
IntelliClean: a knowledge-based intelligent data cleaner
M. Lee
,
T. Ling
,
Wai Lup Low
Knowledge Discovery and Data Mining
2000
Corpus ID: 15162879
data cleaning methods work on the basis of com- puting the degree of similarity between nearby records in a sorted database. High…
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Review
1999
Review
1999
Characterization of silicon surface preparation processes for advanced gate dielectrics
H. Okorn-Schmidt
IBM Journal of Research and Development
1999
Corpus ID: 207625269
This paper gives a short overview of issues associated with the surface preparation of silicon surfaces for advanced gate…
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Highly Cited
1992
Highly Cited
1992
Self-cleaning of the Gulf
N. Sorkhoh
,
R. Al-Hasan
,
S. Radwan
,
T. Höpner
Nature
1992
Corpus ID: 44500338
Highly Cited
1990
Highly Cited
1990
The NALCO Guide to Boiler Failure Analysis
R. D. Port
,
H. M. Herro
1990
Corpus ID: 137629451
Water-Formed and Steam-Formed Deposits. Long-Term Overheating. Short-Term Overheating. Caustic Corrosion. Chelate Corrosion. Low…
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Highly Cited
1982
Highly Cited
1982
Robust-resistant spectrum estimation
R. D. Martin
,
David J. Thomson
Proceedings of the IEEE
1982
Corpus ID: 39968692
Conventional spectrum estimates of both the smoothed-periodogram and autoregressive variety lack robustness toward outliers in…
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