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Fluorosilicate glass

Fluorosilicate glass (FSG) is a low-k dielectric used in between copper metal layers during silicon integrated circuit fabrication process. It has a… 
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Related topics

Related topics

5 relations
CMOSCopper interconnectIntegrated circuitSemiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2018
2018
Nd/La, Er/Lu and Er/Yb/Lu-codoped transparent lead fluoroborate and fluorosilicate glass-ceramics
Lead fluoroborate and fluorosilicate glasses codoped with Nd<sup>3+</sup>/La<sup>3+</sup>, Er<sup>3+</sup>/Lu<sup>3+</sup> and Er… 
2013
2013
Spectrum upconversion and downconversion in (Tm3+,Yb3+) and (Tb3+,Yb3+) co-doped fluorosilicate glass
We investigated the upconversion and downconversion luminescence in (Tb3+, Yb3+) and (Tb3+, Yb3+) co-doped lithiumlanthanum… 
2008
2008
Investigation on up-conversion luminescence of Tm 3+ and Yb 3+ codoped oxy-fluorosilicate glass ceramics
Two series of Tm 3+ and Yb 3+ codoped oxy-fluorosilicate glass ceramics with the composition of 30SiO 2 -(20- x - y )Al 2 O 3… 
2008
2008
Characteristics of Oxide Layers Formed on Al2021 Alloys by Plasma Electrolytic Oxidation in Aluminate Fluorosilicate Electrolyte
Oxide layers were prepared on Al2021 alloys substrate under a hybrid voltage of AC 200 V (60 ㎐) combined with DC 260 V value at… 
2004
2004
Integration of a stack of two fluorine doped silicon oxide film with ULSI interconnect metallization
2004
2004
Quecksilberchalkogen-Fluorosilicate
2003
2003
Organofluorosilicate Glass Interlayer Dielectric Material and Integration Study
Organofluorosilicate glass (OFSG) films of the composition Si:O:C:H:F were deposited via plasma enhanced chemical vapor… 
2000
2000
Study the impact of liner thickness on the 0.18 μm devices using low dielectric constant hydrogen silsesquioxane as the interlayer dielectric
2000
2000
Comprehensive Investigation on Fluorosilicate Glass Prepared by Temperature‐Difference‐Based Liquid‐Phase Deposition
This study investigates the properties of fluorosilicate glass film prepared by temperature-difference-based liquid-phase… 
1980
1980
Vapor Phase Growth of β-SiC Whiskers with Fluorosilicate Melt
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