Etching (microfabrication)

Known as: Acid polishing, Etching (disambiguation), Etching (microfab) 
Etching is used in microfabrication to chemically remove layers from the surface of a wafer during manufacturing. Etching is a critically important… (More)
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Topic mentions per year

Topic mentions per year

1939-2018
010020019392017

Papers overview

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Highly Cited
2010
Highly Cited
2010
A rectenna design methodology combining electromagnetic (EM) simulation and harmonic balance (HB) analysis is presented. It… (More)
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Highly Cited
2008
Highly Cited
2008
For all technologies, from flint arrowheads to DNA microarrays, patterning the functional material is crucial. For semiconductor… (More)
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Highly Cited
2005
Highly Cited
2005
The anisotropic etching behavior of single-crystal silicon and the behavior of SiO2 and Si3N4 in an ethylenediaminebased solution… (More)
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2003
2003
Micromachining arbitrary 3D silicon structures for micro-electromechanical systems can be accomplished using gray-scale… (More)
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Highly Cited
2003
Highly Cited
2003
The goal of the SFIL development program is to enable patterning of sub-100 nm features at room temperature and with minimal… (More)
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Highly Cited
2003
Highly Cited
2003
  • 2003
Cilia, primarily of the lamellibranch gill (Elliptio and Mytilus), have been examined in freeze-etch replicas . Without etching… (More)
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Highly Cited
2002
Highly Cited
2002
An all-dry silicon-etch based micromachining process for neural probes was demonstrated in the manufacture of a probe with a 32… (More)
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Highly Cited
1999
Highly Cited
1999
I ntroductiw Cold drawn and then tension annealed almost zero (slightly negative) magnetostrictive amorphous wires show highly… (More)
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Highly Cited
1997
Highly Cited
1997
  • Ted Romer, Geoff Voelker, +5 authors Brad Chen
  • 1997
Etch is a general-purpose tool for rewriting arbitrary Win32/x86 binaries without requiring source code. Etch provides a… (More)
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Highly Cited
1978
Highly Cited
1978
Anisotropic etching of silicon has become an important technology in silicon semiconductor processing during the past ten years… (More)
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