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Epitaxial wafer

Known as: Epi wafer, Epi-wafer, Epiwafer 
An epitaxial wafer (also called epi wafer, epi-wafer, or epiwafer) is a wafer of semiconducting material made by epitaxial growth (epitaxy) for use… Expand
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Papers overview

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2018
2018
Accurate prediction of cycle time (CT) plays an important role in the promises of a good delivery-time for semiconductor… Expand
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2010
2010
Two methods for the calculation of complex permittivity of double-layer dielectric materials measured by a spot-focusing free… Expand
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2009
2009
Toshiba's 5th generation BiCD/CD-0.13 is a new process platform for analog power applications based on 0.13µm CMOS technology… Expand
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2009
2009
In this study, a nickel silicide (NiSi) wafer and a WCMP wafer were used. We captured bright voltage contract (BVC) defects at N… Expand
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2007
2007
We have utilized the contact-block-reduction (CBR) method, which we extended to allow a charge self-consistent scheme, to… Expand
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2005
2005
An epitaxial wafer manufacturing method at least includes a process (D) of growing an epitaxial layer thicker than a final target… Expand
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2004
2004
For pixel crosstalk improvement, modified logic technology with thin epi wafer thickness, thin backend process thickness and air… Expand
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2002
2002
In previous work, Cobb and Zakhor (SPIE, 2726, pp.208-222, 1996) introduced the VTR (Variable Threshold Resist) model and… Expand
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Highly Cited
2000
Highly Cited
2000
The design, manufacture, and testing of a low-cost, flexible, planar composite piezoceramic actuator device will be presented… Expand
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2000
2000
This paper addresses the modeling of certain rate-dependent mechanisms which contribute to hysteresis inherent to piezoelectric… Expand
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