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Epitaxial wafer
Known as:
Epi wafer
, Epi-wafer
, Epiwafer
An epitaxial wafer (also called epi wafer, epi-wafer, or epiwafer) is a wafer of semiconducting material made by epitaxial growth (epitaxy) for use…
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Related topics
Related topics
6 relations
Epitaxy
Molecular beam epitaxy
Semiconductor
Solar cell
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Broader (1)
Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2018
Highly Cited
2018
A Data Driven Cycle Time Prediction With Feature Selection in a Semiconductor Wafer Fabrication System
Junliang Wang
,
Jie Zhang
,
Xiaoxi Wang
IEEE transactions on semiconductor manufacturing
2018
Corpus ID: 28263925
Accurate prediction of cycle time (CT) plays an important role in the promises of a good delivery-time for semiconductor…
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2015
2015
Biosensing using photonic crystal nanolasers
T. Baba
2015
Corpus ID: 55688324
Photonic crystal nanolasers are fabricated and operated simply, and can be applied as disposable sensors for biomedical…
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Review
2014
Review
2014
EUV lithography: NXE platform performance overview
R. Peeters
,
S. Lok
,
+14 authors
R. Kool
Advanced Lithography
2014
Corpus ID: 122316110
The first NXE3300B systems have been qualified and shipped to customers. The NXE:3300B is ASML’s third generation EUV system and…
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2010
2010
A free-space method for measurement of complex permittivity of double-layer dielectric materials at microwave frequencies
F. Zaki
,
Z. Awang
,
+4 authors
Nani Fadzlina
Student Conference on Research and Development
2010
Corpus ID: 31136874
Two methods for the calculation of complex permittivity of double-layer dielectric materials measured by a spot-focusing free…
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Review
2009
Review
2009
An application of fuzzy Delphi and fuzzy AHP on evaluating wafer supplier in semiconductor industry
Jao-Hong Cheng
,
Chih-ming Lee
,
Chih-Huei Tang
2009
Corpus ID: 28397747
Because of the pressure of globalization in the last two decades, professional services has become an important strategic…
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Highly Cited
2007
Highly Cited
2007
Quantum Transport Simulation of Experimentally Fabricated Nano-FinFET
H. Khan
,
D. Mamaluy
,
D. Vasileska
IEEE Transactions on Electron Devices
2007
Corpus ID: 43062096
We have utilized the contact-block-reduction (CBR) method, which we extended to allow a charge self-consistent scheme, to…
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2007
2007
Investigation Into the Integration of a Resonant Tunnelling Diode and an Optical Communications Laser: Model and Experiment
T. Slight
,
C. Ironside
IEEE Journal of Quantum Electronics
2007
Corpus ID: 35679446
A resonant tunnelling diode has been monolithically integrated with an optical communications laser [the resonant tunnelling…
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Review
2005
Review
2005
Challenges in embedded memory design and test
E. Marinissen
,
B. Prince
,
D. Keitel-Schulz
,
Y. Zorian
Design, Automation and Test in Europe
2005
Corpus ID: 16678020
Both the number of embedded memories, as well as the total embedded memory content in our chips is growing steadily. Time for…
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2004
2004
Crosstalk improvement technology applicable to 0.14/spl mu/m CMOS image sensor
C. Tseng
,
S. Wuu
,
+7 authors
C.S. Wang
IEDM Technical Digest. IEEE International…
2004
Corpus ID: 23939566
For pixel crosstalk improvement, modified logic technology with thin epi wafer thickness, thin backend process thickness and air…
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Highly Cited
2000
Highly Cited
2000
Low-cost piezocomposite actuator for structural control applications
W. Wilkie
,
R. Bryant
,
+5 authors
P. H. Mirick
Smart Structures
2000
Corpus ID: 109005728
The design, manufacture, and testing of a low-cost, flexible, planar composite piezoceramic actuator device will be presented…
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