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Semiconductor process simulation

Semiconductor process simulation is the modeling of the fabrication of semiconductor devices such as transistors. It is a branch of electronic design… 
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Related topics

Related topics

15 relations
Chemical-mechanical planarizationDopantDry etchingElectronic design automation

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2012
2012
Determination of New Layout in a Semiconductor Packaging Substrate Line using Simulation and AHP/DEA
The process of semiconductor(IC Package) manufacturing usually includes lots of complex and sequential processes. Many kinds of… 
Review
2009
Review
2009
Introducing undergraduate students to simulation of semiconductor doping techniques
2007
2007
A novel approach to three-dimensional semiconductor process simulation: Application to thermal oxidation
The paper presents a new approach to three-dimensional semiconductor process simulation that overcomes the problem of moving… 
2001
2001
A new finite element approach to stress analysis in microfabrication technology
2000
2000
Evaluation of Multigrid as a Solver for Stress Analysis Problems in Semiconductor Process Simulation
In this paper, the performance of multigrid based solvers for the stress analysis problems in semiconductor process simulation… 
2000
2000
An Advancing Front Meshing Algorithm Using NURBS for Semiconductor Process Simulation
A surface extraction algorithm with NURBS has been developed for the mesh generation from the scattered data after a cell-based… 
1997
1997
Three-Dimensional Delaunay Mesh Generation Using a Modified Advancing Front Approach
We introduce a meshing method which uses an advancing front Delaunay algorithm. The presented Delaunay technique avoids the need… 
1994
1994
An Industrial Perspective on Semiconductor Technology Modeling
The central activities of semiconductor technology simulation are semiconductor process simulation and semiconductor device… 
Review
1992
Review
1992
Application of parallel computation to process simulation for the structured design of IC fabrication processes
The ability of semiconductor process simulation to analyse the physical effects of individual fabrication steps and their… 
1991
1991
An Interface Method for Semiconductor Process Simulation
\indent The diffusion of dopants in silicon at high temperatures is modeled by a nonlinear parabolic system of partial… 
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