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Semiconductor process simulation

Semiconductor process simulation is the modeling of the fabrication of semiconductor devices such as transistors. It is a branch of electronic design… 
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Related topics

Related topics

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Chemical-mechanical planarizationDopantDry etchingElectronic design automation

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2006
2006
Integrated Computatoinal Chemistry Approach to the Semiconductor Process Simulation
Toward the rapid development of next generation information technologies, atomic-scale control becomes significantly important in… 
2006
2006
A Distributed Simulation-Based Computational Intelligence Algorithm for Nanoscale Semiconductor Device Inverse Problem
In this paper, a distributed simulation-based computational intelligence algorithm for inverse problem of nanoscale semiconductor… 
2001
2001
A new finite element approach to stress analysis in microfabrication technology
2000
2000
An Advancing Front Meshing Algorithm Using NURBS for Semiconductor Process Simulation
A surface extraction algorithm with NURBS has been developed for the mesh generation from the scattered data after a cell-based… 
2000
2000
Evaluation of Multigrid as a Solver for Stress Analysis Problems in Semiconductor Process Simulation
In this paper, the performance of multigrid based solvers for the stress analysis problems in semiconductor process simulation… 
2000
2000
Mesh Generation algorithms for three-dimensional semiconductor process simulation
1997
1997
Three-Dimensional Delaunay Mesh Generation Using a Modified Advancing Front Approach
We introduce a meshing method which uses an advancing front Delaunay algorithm. The presented Delaunay technique avoids the need… 
Review
1992
Review
1992
Application of parallel computation to process simulation for the structured design of IC fabrication processes
The ability of semiconductor process simulation to analyse the physical effects of individual fabrication steps and their… 
1992
1992
Numerical modelling in semiconductor process simulation
1991
1991
An Interface Method for Semiconductor Process Simulation
\indent The diffusion of dopants in silicon at high temperatures is modeled by a nonlinear parabolic system of partial… 
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