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SMIF (interface)
Known as:
Smif interface
Acronym for Standard Mechanical InterFace. This is a SEMI standard, E19-1105. An isolation technology developed in the 1980s by group known as…
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Cleanroom
FOUP
Semiconductor
Semiconductor device fabrication
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1999
1999
Smif-zelle mit unabhängig aufgehängter wafer-cassette
Anthony C. Bonora
,
William J. Fosnight
,
R. S. Martin
,
Perry Peterson
1999
Corpus ID: 139332579
1995
1995
Porte a interface multiple pour le stockage de l'eau et conteneur de manutention
D. B. Mckenna
,
Donald R. Briner
,
Christopher D. Laramore
1995
Corpus ID: 191940191
La presente invention concerne un conteneur ameliore ainsi qu'une interface pour le transport, ou dans d'autres cas, la…
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