FOUP

FOUP is an acronym for Front Opening Unified Pod or Front Opening Universal Pod. It is a specialised plastic enclosure designed to hold silicon…

Papers overview

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2016

The present invention is a purge system for measuring FOUPs that are positioned in a FOUP nest. In addition to at least one idle…

2013

A system for cleaning a container, such as a semiconductor wafer carrier, includes a housing, a cleaning unit in the housing, an…

2012

A large-size FOUP is formed with a plurality of supporting parts, the positions of which are calibrated to be symmetrical, so…

2012

The emergence of 450mm diameter wafers and the associated equipment technology will once again challenge how greenfield…

2009

PURPOSE: A conveyor for FOUP transferring is provided to efficiently detecting the position of an FOUP(Front Opening Unified POD…

2009

FOUP transport conveyor of the present invention comprises a plurality of mutually opposite so disposed rails and, in the…

2006

[PROBLEMS] A FOUP door positioning device for a FOUP opener, capable of being applied to any FOUP containers, low in cost, and…

2002

PROBLEM TO BE SOLVED: To provide a means in which gas replacement with an inert gas is executed by performing vacuum suction…

2001

PROBLEM TO BE SOLVED: To provide a FOUP opener where contaminations, generated from a sensor mechanism for detecting a…

2000

A drive-section-isolated FOUP opener opens and closes a door of a FOUP which contains a plurality of semiconductor wafers. The…