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Micropipe

A micropipe, also called a micropore, microtube, capillary defect or pinhole defect, is a crystallographic defect in a single crystal substrate… Expand
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2009
2009
An extended film thickness measurement method that can obtain the liquid film thickness profile of the whole plug bubble in a… Expand
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2008
2008
We reveal a correlated reduction in the cross sections of two neighboring micropipes (MPs) in the crystal growth of silicon… Expand
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2007
2007
Micropipe-free, single crystal, silicon carbide (SiC) and related methods of manufacture are disclosed. The SiC is grown by… Expand
2004
2004
We report on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance… Expand
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2002
2002
Lateral homoepitaxial growth of thin cantilevers emanating from mesa patterns that were reactive ion etched into on-axis… Expand
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2000
2000
The relationship between seed mounting and the formation of thermal decomposition cavities in physical vapor transport grown… Expand
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Highly Cited
2000
Highly Cited
2000
Process conditions for stable single polytype growth of 4H}SiC boules via a seeded sublimation technique have been developed… Expand
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1998
1998
It is well-known that SiC wafer quality deficiencies are delaying the realization of outstandingly superior 4H-SiC power… Expand
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1997
1997
We have used atomic force microscopy (AFM) to study the (0 0 0 1) growth surface of a 6H-SiC single crystal at the points where… Expand
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Highly Cited
1994
Highly Cited
1994
Reports on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance of… Expand
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