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Micropipe

A micropipe, also called a micropore, microtube, capillary defect or pinhole defect, is a crystallographic defect in a single crystal substrate… Expand
Wikipedia

Related topics

Related topics

5 relations
Crystal structureEpitaxyPower semiconductor deviceWafer (electronics)

Broader (1)

Semiconductor device fabrication

Papers overview

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2011
2011
Micropipe Reactions in Bulk SiC Growth
M. Yu. Gutkin,1,2,3 T. S. Argunova,4,6 V. G. Kohn,5 A. G. Sheinerman1 and J. H. Je6 1Institute of Problems of Mechanical… Expand
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2009
2009
2D fringe probing of liquid film dynamics of a plug bubble in a micropipe
An extended film thickness measurement method that can obtain the liquid film thickness profile of the whole plug bubble in a… Expand
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2008
2008
Correlated reduction in micropipe cross sections in SiC growth
We reveal a correlated reduction in the cross sections of two neighboring micropipes (MPs) in the crystal growth of silicon… Expand
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2007
2007
Micropipe-free silicon carbide and related method of manufacture
Micropipe-free, single crystal, silicon carbide (SiC) and related methods of manufacture are disclosed. The SiC is grown by… Expand
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2004
2004
Performance Limiting Micropipe Defects in Silicon Carbide Wafers
We report on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance… Expand
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2004
2004
MICROPIPE EVOLUTION DURING THE GROWTH PROCESS OF 6H-SiC MONOCRYSTALLINE
The modulated nitrogen-doped 6HSiC monocrystalline was grown by sublimation method. The nitrogen-doped striations in axial-cut… Expand
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1999
1999
Internal stress around micropipes in 6H-SiC substrates
6H-SiC single crystals are expected to be suitable substrates for thin film growth of the wide bandgap semiconductor (GaN… Expand
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1998
1998
Non-Micropipe Dislocations in 4H-SiC Devices: Electrical Properties and Device Technology Implications
It is well-known that SiC wafer quality deficiencies are delaying the realization o f utstandingly superior 4H-SiC powe r… Expand
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1997
1997
An atomic force microscopy study of super-dislocation/micropipe complexes on the 6H-SiC(0 0 0 1) growth surface
We have used atomic force microscopy (AFM) to study the (0 0 0 1) growth surface of a 6H-SiC single crystal at the points where… Expand
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1994
1994
Performance limiting micropipe defects in silicon carbide wafers
Reports on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance of… Expand
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