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Micropipe

A micropipe, also called a micropore, microtube, capillary defect or pinhole defect, is a crystallographic defect in a single crystal substrate… 
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Related topics

Related topics

5 relations
Crystal structureEpitaxyPower semiconductor deviceWafer (electronics)

Broader (1)

Semiconductor device fabrication

Papers overview

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2016
2016
Raman scattering properties of structural defects in SiC
2012
2012
Microsoft Word - paper 1.docx
  • R. Sa
  • 2012
  • Corpus ID: 54988392
2011
2011
Micropipe Reactions in Bulk SiC Growth
M. Yu. Gutkin,1,2,3 T. S. Argunova,4,6 V. G. Kohn,5 A. G. Sheinerman1 and J. H. Je6 1Institute of Problems of Mechanical… 
2008
2008
Correlated reduction in micropipe cross sections in SiC growth
We reveal a correlated reduction in the cross sections of two neighboring micropipes (MPs) in the crystal growth of silicon… 
2007
2007
Micropipe-free silicon carbide and related method of manufacture
Micropipe-free, single crystal, silicon carbide (SiC) and related methods of manufacture are disclosed. The SiC is grown by… 
2004
2004
Performance Limiting Micropipe Defects in Silicon Carbide Wafers
We report on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance… 
2003
2003
Statistical Analysis of Micropipe Defect Distributions in Silicon Carbide Crystals
The density and distribution of micropipes (MPD's), a screw dislocation with a hollow core, are significant criteria for SiC… 
2002
2002
Enlargement of step-free SiC surfaces by homoepitaxial web growth of thin SiC cantilevers
Lateral homoepitaxial growth of thin cantilevers emanating from mesa patterns that were reactive ion etched into on-axis… 
2000
2000
Formation of thermal decomposition cavities in physical vapor transport of silicon carbide
The relationship between seed mounting and the formation of thermal decomposition cavities in physical vapor transport grown… 
1999
1999
Internal stress around micropipes in 6H-SiC substrates
6H-SiC single crystals are expected to be suitable substrates for thin film growth of the wide bandgap semiconductor (GaN… 
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