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Micropipe

A micropipe, also called a micropore, microtube, capillary defect or pinhole defect, is a crystallographic defect in a single crystal substrate… Expand
Wikipedia

Related topics

Related topics

5 relations
Crystal structureEpitaxyPower semiconductor deviceWafer (electronics)

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2009
2009
2D fringe probing of liquid film dynamics of a plug bubble in a micropipe
An extended film thickness measurement method that can obtain the liquid film thickness profile of the whole plug bubble in a… Expand
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2008
2008
Correlated reduction in micropipe cross sections in SiC growth
We reveal a correlated reduction in the cross sections of two neighboring micropipes (MPs) in the crystal growth of silicon… Expand
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2007
2007
Micropipe-free silicon carbide and related method of manufacture
Micropipe-free, single crystal, silicon carbide (SiC) and related methods of manufacture are disclosed. The SiC is grown by… Expand
2004
2004
Performance Limiting Micropipe Defects in Silicon Carbide Wafers
We report on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance… Expand
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2002
2002
Enlargement of Step-Free SiC Surfaces by Homoepitaxial Web-Growth of Thin SiC Cantilevers
Lateral homoepitaxial growth of thin cantilevers emanating from mesa patterns that were reactive ion etched into on-axis… Expand
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2000
2000
Formation of thermal decomposition cavities in physical vapor transport of silicon carbide
The relationship between seed mounting and the formation of thermal decomposition cavities in physical vapor transport grown… Expand
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Highly Cited
2000
Highly Cited
2000
Polytype stability in seeded sublimation growth of 4H}SiC boules
Process conditions for stable single polytype growth of 4H}SiC boules via a seeded sublimation technique have been developed… Expand
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1998
1998
Non-Micropipe Dislocations in 4H-SiC Devices: Electrical Properties and Device Technology Implications
It is well-known that SiC wafer quality deficiencies are delaying the realization of outstandingly superior 4H-SiC power… Expand
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1997
1997
An atomic force microscopy study of super-dislocation/micropipe complexes on the 6H-SiC(0 0 0 1) growth surface
We have used atomic force microscopy (AFM) to study the (0 0 0 1) growth surface of a 6H-SiC single crystal at the points where… Expand
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Highly Cited
1994
Highly Cited
1994
Performance limiting micropipe defects in silicon carbide wafers
Reports on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance of… Expand
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