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Micropipe

A micropipe, also called a micropore, microtube, capillary defect or pinhole defect, is a crystallographic defect in a single crystal substrate… 
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Related topics

Related topics

5 relations
Crystal structureEpitaxyPower semiconductor deviceWafer (electronics)

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2016
2016
Raman scattering properties of structural defects in SiC
2009
2009
Flow injection chemiluminescence determination of uric acid with micropipe-chip
Objective:To establish a flow injection chemiluminescence determination method with micropipe-chip for speedy determination of… 
2008
2008
Correlated reduction in micropipe cross sections in SiC growth
We reveal a correlated reduction in the cross sections of two neighboring micropipes (MPs) in the crystal growth of silicon… 
2008
2008
2D fringe probing of liquid film dynamics of a plug bubble in a micropipe
An extended film thickness measurement method that can obtain the liquid film thickness profile of the whole plug bubble in a… 
2007
2007
Micropipe-free silicon carbide and related method of manufacture
Micropipe-free, single crystal, silicon carbide (SiC) and related methods of manufacture are disclosed. The SiC is grown by… 
2004
2004
Performance Limiting Micropipe Defects in Silicon Carbide Wafers
We report on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance… 
Highly Cited
2000
Highly Cited
2000
Polytype stability in seeded sublimation growth of 4H}SiC boules
2000
2000
Formation of thermal decomposition cavities in physical vapor transport of silicon carbide
The relationship between seed mounting and the formation of thermal decomposition cavities in physical vapor transport grown… 
1998
1998
Non-Micropipe Dislocations in 4H-SiC Devices: Electrical Properties and Device Technology Implications
It is well-known that SiC wafer quality deficiencies are delaying the realization of outstandingly superior 4H-SiC power… 
Highly Cited
1994
Highly Cited
1994
Performance limiting micropipe defects in silicon carbide wafers
Reports on the characteristics of a major defect in mass-produced silicon carbide wafers which severely limits the performance of… 
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