Electron beam-induced current

Known as: Ebic, Electron beam induced current 
Electron-beam-induced current (EBIC) is a semiconductor analysis technique performed in a scanning electron microscope (SEM) or scanning transmission… (More)
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CMOSDepletion regionFailure analysisSemiconductor
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Semiconductor device fabrication

Papers overview

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2014
2014
Electron beam induced current in photovoltaics with high recombination
A model for interpreting electron beam induced current (EBIC) measurements is presented, which applies when recombination within… (More)
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2013
2013
Single contact electron beam induced current technique for solar cell characterization
This paper reports the first demonstration of single contact electron beam induced current (SCEBIC) technique on multicrystalline… (More)
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2010
2010
Physical failure analysis cases by Electron Beam Absorbed Current & Electron Beam Induced Current detection on nano-probing SEM system
As the device feature size smaller and circuit complexity increase rapidly, failure analysis techniques to isolate defects will… (More)
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2009
2009
Choice of Generation Volume Models for Electron Beam Induced Current Computation
The spatial distribution of the electron-hole pairs generated by the electron beam is commonly called the generation volume or… (More)
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2008
2008
Electron-beam-induced current characterization of high-k dielectrics
We have applied EBIC technique to observe leakage sites in Hf-based highMOS structures. We found a significant difference in the… (More)
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2008
2008
Microscale characterisation of epitaxial semiconducting homolayers . II . Electron beam induced current
2014 The dependence of the electron beam induced current (EBIC) collection efficiency ~CC on the electron beam voltage is… (More)
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2008
2008
Characterization of leakage behaviors of high-k gate stacks by electron-beam-induced current
Microscopical investigation of leakage behaviors of Hf-based high-k gate stacks was achieved by means of electron-beam-induced… (More)
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1984
1984
Electron-beam induced current measurement of HgCdTe heterojunction infrared detectors
Electron-beam induced current (EBIC) measurements were performed on cleaved cross sections of HgCdTe heterojunction infrared… (More)
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1984
1984
Semiconductor Junction Temperature Measurement using the Electron Beam Induced Current Mode in the Scanning Electron Miscroscope
A technique is described to accomplish junction temperature measurements in semiconductor devices in the scanning electron… (More)
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1980
1980
Measurement of heavy doping parameters in silicon by electron-beam-induced current
Limits on the magnitude of bandgap narrowing and Auger recombination in heavily phosphorus-diffused silicon layers ∼ 10<sup>20… (More)
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