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Zyron

Zyron is a registered trademark for specialty gases marketed to the global electronics industry by DuPont.
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Related topics

Related topics

2 relations
Chemical vapor deposition

Broader (1)

Semiconductor device fabrication

Papers overview

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2008
2008
Effectively Reducing the CoO & Minimized PFC Emission by Successful Evaluating CVD Alternative Cleaning Gas, Zyron® c-C4F8
In this paper, we illustrate the successful replacement of C3F8 with Zyronreg c-C4F8according to its high utilization efficiency… 
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