Wafer fabrication

Wafer fabrication is a procedure composed of many repeated sequential processes to produce complete electrical or photonic circuits. Examples include… (More)
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Highly Cited
2013
Highly Cited
2013
There are wafer fabrication processes in cluster tools that require wafer revisiting. If a swap strategy is applied to dual-arm… (More)
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2013
2013
Uncertainty in semiconductor fabrication facilities (fabs) requires scheduling methods to attain quick real-time responses. They… (More)
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Highly Cited
2008
Highly Cited
2008
With wafer residency time constraints for some wafer fabrication processes, such as low pressure chemical-vapor deposition, the… (More)
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2007
2007
Economic efficiency analysis of semiconductor fabrication facilities (fabs) involves tradeoffs among cost, yield, and cycle time… (More)
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Highly Cited
2006
Highly Cited
2006
We describe a simulation study of a production planning model for multistage production inventory systems that reflects the… (More)
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2005
2005
The increasing market expansion of electronic devices such as handphones, computers, and television sets has provided the impetus… (More)
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2004
2004
Due-date assignment (DDA) is the first important task of shop floor control in wafer fabrication. Due-date related performance is… (More)
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2002
2002
The importance of semiconductor wafer fabrication has been increasing steadily over the past decade. Wafer fabrication is the… (More)
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2001
2001
Computational efficiency is one of the major challenges of applying simulation to short-term operation scheduling of… (More)
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Highly Cited
1988
Highly Cited
1988
This paper is concerned with assessing the impact that scheduling can have on the performance of semiconductor wafer fabrication… (More)
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