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Wafer fabrication

Wafer fabrication is a procedure composed of many repeated sequential processes to produce complete electrical or photonic circuits. Examples include… 
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Related topics

Related topics

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3D XPointCentral processing unitChemical vapor depositionComputer

Broader (1)

Semiconductor device fabrication

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2014
2014
INVESTIGATION OF ENERGY DISSIPATION IN LOW FREQUENCY VIBRATORY MEMS DEMONSTRATING A RESONATOR WITH 25 MINUTES TIME CONSTANT
We report a conventionally batch micromachined silicon tuning fork MEMS resonator, with ultra-low energy dissipation. The… 
2007
2007
Minimizing makespan with multiple-orders-per-job in a two-machine flowshop
Review
2005
Review
2005
Wafer Level Micropackaging for RF MEMS Switches
Wafer-level micro-encapsulation is an innovative, low-cost, wafer-level packaging method for encapsulating RF MEMS switches. This… 
2003
2003
On the Suitability of the Weibull Distribution for the Approximation of Machine Failures
In this research we investigate how the Weibull distribution is suited as an alternative to common approaches in the stochastic… 
2003
2003
Job order releasing and throughput planning for multi-priority orders in wafer fabs
To meet the production target of multi-level (multiple priority rank) orders in wafer fabs, this paper uses a hierarchical… 
2002
2002
Wafer fabrication: 300mm wafer fabrication line simulation model
The importance of semiconductor wafer fabrication has been increasing steadily over the past decade. Wafer fabrication is the… 
Highly Cited
2001
Highly Cited
2001
Scheduling semiconductor wafer fabrication by using ordinal optimization-based simulation
Computational efficiency is one of the major challenges of applying simulation to short-term operation scheduling of… 
1987
1987
A Model for Wafer Fabrication Dynamics in Integrated Circuit Manufacturing
Integrated circuit manufacturing has major operations of fabrication, sort, assembly, and test. The dynamic behavior of these… 
1986
1986
Signature analysis of dispatch schemes in wafer fabrication
Signature analysis is used to characterize lot dispatch priority schemes in wafer fabrication, a complex manufacturing operation… 
1983
1983
Chapter 9 - Microelectronic Test Chips for VLSI Electronics
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