Pyralin EN
National Institutes of Health
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Polyimide is a material often used in thin film neural microelectrodes. In this work, we processed thin films from three…
We present a planar integration technology of bare dices embedded in substrates (ceramic,silicon). A thin film multilayer with…
Features as fine as 4 μm with high aspect ratio were produced from ceria‐zirconia ceramic using a thick plasma‐etched polyimide…