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Overlay Control
Known as:
Overlay
Overlay control is a term used in silicon wafer manufacturing. Silicon wafers are currently manufactured in a sequence of steps, each stage placing a…
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Semiconductor device fabrication
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2014
2014
Further beyond: registration and overlay control enhancements for optical masks
Kujan Gorhad
,
Avi Cohen
,
+4 authors
M. Kirsch
Photomask Technology
2014
Corpus ID: 62763065
Mask registration control is one of the key performance specifications during the mask qualification process. It is becoming an…
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2013
2013
Network Virtualization Overlay Control Protocol Requirements
T. Narten
,
Lawrence Kreeger
,
Dinesh G. Dutt
,
David L. Black
,
M. Sridharan
2013
Corpus ID: 63468051
The document "Problem Statement: Overlays for Network Virtualization" discusses the needs for network virtualization using…
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2013
2013
Network Virtualization Hypervisor-to-NVE Overlay Control Protocol Requirements
T. Narten
,
Lawrence Kreeger
,
David L. Black
2013
Corpus ID: 63551975
The document "Problem Statement: Overlays for Network Virtualization" discusses the needs for network virtualization using…
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2008
2008
Dynamic Overlay Node Activation Algorithms for Large-Scale Service Deployments
J. Famaey
,
T. Wauters
,
F. Turck
,
B. Dhoedt
,
P. Demeester
IFIP/IEEE International Workshop on Distributed…
2008
Corpus ID: 543241
Due to overprovisioning of infrastructure nodes in overlay networks, many nodes remain idle at times of low network load. Some of…
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2006
2006
Network overlays for efficient control of large scale dynamic groups
G. Popescu
,
Z. Liu
Tenth IEEE International Symposium on Distributed…
2006
Corpus ID: 18152950
Scalable data distribution in large-scale dynamic collaborative systems requires efficient, low overhead communication control…
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2005
2005
Run-toRun Overlay Control of Steppers in Semiconductor Manufacturing Systems Based on History Data Analysis and Neural Network Modeling
Seong-Jin Park
,
Moon-sang Lee
,
+6 authors
Chan-Hoon Park
2005
Corpus ID: 56339459
This paper presents a new run-to-run control scheme to reduce overlay misalignment errors in steppers and demonstrates the…
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2005
2005
The An Overlay Internetworking Architecture for Ambient Networks
A. Eriksson
,
M. Johnsson
,
A. Schieder
,
G. Selander
2005
Corpus ID: 16803999
Several different internetworking architectures are being discussed within the Ambient Networks (AN) project. This paper…
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2003
2003
Microeconomics of Yield Learning in Semiconductor Manufacturing
K. Monahan
2003
Corpus ID: 39994604
49 Introduction Most yield loss is caused by random defects and systematic process errors. For the 130 nm design-rule generation…
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Review
2003
Review
2003
Menus and mnemonics in airway facilities.
Vicki Ahlstrom
,
R. Muldoon
2003
Corpus ID: 107352215
This study examines the use of menus and mnemonics in current Airway Facilities (AF) systems and compares then to human factors…
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1966
1966
A multiprogrammed teleprocessing system for computer typesetting
B. Nebel
AFIPS '66 (Fall)
1966
Corpus ID: 2411640
The use of computers to hyphenate and justify printed material is widely accepted in the printing and publishing industry, as…
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