Computational lithography

Known as: Computational scaling 
Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the… (More)
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Papers overview

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2016
2016
We devise an algorithm that can incorporate the photomask shape uncertainties in computational lithography such as inverse… (More)
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2011
2011
  • Shiyuan Liu
  • 6th IEEE International Conference on Nano/Micro…
  • 2011
Nanomanufacturing refers to the manufacturing of products with feature dimensions at the nanometer scale. This paper presents the… (More)
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2010
2010
A robust superhydrophobic and superoleophobic surface is demonstrated. On a large-size template of the transparent… (More)
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Highly Cited
2009
Highly Cited
2009
The success achieved by genome-wide association (GWA) studies in the identification of candidate loci for complex diseases has… (More)
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2008
2008
Interactions between the atmosphere and the land surface have considerable influences on weather and climate. Coupled… (More)
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2006
2006
Parallel I/O plays a crucial role for most data-intensive applications running on massively parallel systems like Blue Gene/L… (More)
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Highly Cited
2005
Highly Cited
2005
The integration of diverse forms of informative data by learning an optimal combination of base kernels in classification or… (More)
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Highly Cited
2003
Highly Cited
2003
The requirement to reduce the computational cost of evaluating a point probability density estimate when employing a Parzen… (More)
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Highly Cited
1996
Highly Cited
1996
Nanoimprint lithography, a high-throughput, low-cost, nonconventional lithographic method proposed and demonstrated recently, has… (More)
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