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Computational lithography

Known as: Computational scaling 
Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the… 
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Related topics

Related topics

7 relations
CMOSIntegrated circuitJones calculusNumerical aperture

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2017
2017
Three-dimensional nanoimprint lithography using two-photon lithography master samples
We demonstrate three-dimensional (3-D) nanoimprint lithography using master samples initially structured by two-photon… 
2012
2012
Fabrication of templates with rectangular bits on circular tracks by combining block copolymer directed self-assembly and nanoimprint lithography
Abstract. A block copolymer-directed self-assembly was combined with nanoimprint lithography to generate templates with… 
2011
2011
Demonstration of defect free EUV mask for 22nm NAND flash contact layer using electron beam inspection system
Fabrication of defect free EUV masks including their inspection is the most critical challenge for implementing EUV lithography… 
2010
2010
Advances in roll-to-roll imprint lithography for display applications
A solution to the problems of roll-to-roll lithography on flexible substrates is presented. We have developed a roll-toroll… 
2008
2008
Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
Soft photocurable nanoimprint lithography is used to transfer nanoscale features to GaAs substrates. Only ambient conditions… 
2006
2006
First results for hyper NA scanner emulation from AIMS 45-193i
Immersion lithography offers the semiconductor industry the opportunity to extend current ArF processes before switching to… 
Highly Cited
2000
Highly Cited
2000
Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography
We demonstrated the fabrication of Fresnel zone plates with a 75 nm minimum feature size and circular gratings with a 20 nm… 
2000
2000
Molecular alignment in submicron patterned polymer matrix using nanoimprint lithography
We report a promising approach to align molecules in a polymer film patterned by nanoimprint lithography. We found that molecules… 
2000
2000
Feasibility study of an embedded transparent phase-shifting mask in ArF lithography
We have proposed the combination of the new transparent phase-shifting mask with the off-axis illumination, and have carried out… 
1983
1983
High-voltage regulation and process considerations for high-density 5 V-only E/sup 2/PROM's
A high density 5-V-only HMOS 1 FLOTOX E/SUP 2/PROM technology has been developed using stepper lithography and dry etching… 
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