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Computational lithography

Known as: Computational scaling 
Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the… 
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Papers overview

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2015
2015
In this paper, we present an optimization methodology for the template designs of sub-resolution contacts using directed self… 
2012
2012
In the fast recovery operation of Free-wheeling Diode (FWD), to reduce voltage surge “snap-off”, we propose the Relaxed Field of… 
2011
2011
Fabrication of defect free EUV masks including their inspection is the most critical challenge for implementing EUV lithography… 
Highly Cited
2010
Highly Cited
2010
We present block copolymer multiple patterning as an efficient and truly scalable nanolithography for sub-20 nm scale patterning… 
2010
2010
A solution to the problems of roll-to-roll lithography on flexible substrates is presented. We have developed a roll-toroll… 
2008
2008
Soft photocurable nanoimprint lithography is used to transfer nanoscale features to GaAs substrates. Only ambient conditions… 
2002
2002
We present a simple process to fabricate gold nanocontacts with a gap as small as sub-10 nm. This method uses a two-step process… 
Highly Cited
2000
Highly Cited
2000
We demonstrated the fabrication of Fresnel zone plates with a 75 nm minimum feature size and circular gratings with a 20 nm… 
2000
2000
We report a promising approach to align molecules in a polymer film patterned by nanoimprint lithography. We found that molecules… 
1983
1983
A high density 5-V-only HMOS 1 FLOTOX E/SUP 2/PROM technology has been developed using stepper lithography and dry etching…