Skip to search form
Skip to main content
Skip to account menu
Semantic Scholar
Semantic Scholar's Logo
Search 228,398,453 papers from all fields of science
Search
Sign In
Create Free Account
Computational lithography
Known as:
Computational scaling
Computational lithography (also known as computational scaling) is the set of mathematical and algorithmic approaches designed to improve the…
Expand
Wikipedia
(opens in a new tab)
Create Alert
Alert
Related topics
Related topics
7 relations
CMOS
Integrated circuit
Jones calculus
Numerical aperture
Expand
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2015
2015
Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography
Yuansheng Ma
,
Junjiang Lei
,
+10 authors
Geert Vanderberghe
Advanced Lithography
2015
Corpus ID: 110807497
In this paper, we present an optimization methodology for the template designs of sub-resolution contacts using directed self…
Expand
2012
2012
Great impact of RFC technology on fast recovery diode towards 600 V for low loss and high dynamic ruggedness
F. Masuoka
,
K. Nakamura
,
A. Nishii
,
T. Terashima
International Symposium on Power Semiconductor…
2012
Corpus ID: 13614378
In the fast recovery operation of Free-wheeling Diode (FWD), to reduce voltage surge “snap-off”, we propose the Relaxed Field of…
Expand
2011
2011
Demonstration of defect free EUV mask for 22nm NAND flash contact layer using electron beam inspection system
T. Shimomura
,
S. Kawashima
,
+10 authors
J. Jau
Advanced Lithography
2011
Corpus ID: 119730657
Fabrication of defect free EUV masks including their inspection is the most critical challenge for implementing EUV lithography…
Expand
Highly Cited
2010
Highly Cited
2010
Block copolymer multiple patterning integrated with conventional ArF lithography
S. Park
,
D. Shin
,
+7 authors
S. Kim
2010
Corpus ID: 55027907
We present block copolymer multiple patterning as an efficient and truly scalable nanolithography for sub-20 nm scale patterning…
Expand
2010
2010
Advances in roll-to-roll imprint lithography for display applications
A. Jeans
,
M. Almanza‐Workman
,
+19 authors
D. Stieler
Advanced Lithography
2010
Corpus ID: 108823428
A solution to the problems of roll-to-roll lithography on flexible substrates is presented. We have developed a roll-toroll…
Expand
2008
2008
Soft Photocurable Nanoimprint Lithography for Compound Semiconductor Nanostructures
K. Meneou
,
K. Cheng
2008
Corpus ID: 94144318
Soft photocurable nanoimprint lithography is used to transfer nanoscale features to GaAs substrates. Only ambient conditions…
Expand
2002
2002
Fabrication of nanocontacts for molecular devices using nanoimprint lithography
Michael D. Austin
,
S. Chou
2002
Corpus ID: 14560250
We present a simple process to fabricate gold nanocontacts with a gap as small as sub-10 nm. This method uses a two-step process…
Expand
Highly Cited
2000
Highly Cited
2000
Fabrication of circular optical structures with a 20 nm minimum feature size using nanoimprint lithography
Mingtao Li
,
J. Wang
,
L. Zhuang
,
S. Chou
2000
Corpus ID: 122623227
We demonstrated the fabrication of Fresnel zone plates with a 75 nm minimum feature size and circular gratings with a 20 nm…
Expand
2000
2000
Molecular alignment in submicron patterned polymer matrix using nanoimprint lithography
J. Wang
,
Xiaoyun Sun
,
Lei Chen
,
Zhuang Lei
,
S. Chou
2000
Corpus ID: 6067814
We report a promising approach to align molecules in a polymer film patterned by nanoimprint lithography. We found that molecules…
Expand
1983
1983
High-voltage regulation and process considerations for high-density 5 V-only E/sup 2/PROM's
D. Oto
,
V. Dham
,
+6 authors
S. Nieh
IEEE Journal of Solid-State Circuits
1983
Corpus ID: 21154611
A high density 5-V-only HMOS 1 FLOTOX E/SUP 2/PROM technology has been developed using stepper lithography and dry etching…
Expand
By clicking accept or continuing to use the site, you agree to the terms outlined in our
Privacy Policy
(opens in a new tab)
,
Terms of Service
(opens in a new tab)
, and
Dataset License
(opens in a new tab)
ACCEPT & CONTINUE