triphenylsulfonium ion
National Institutes of Health
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Understanding of stochastic phenomena is essential to the development of highly sensitive resist for nanofabrication. In this…
Negative tone resists based on cross-linking via epoxide/cationic polymerization have a variety of potential advantages over more…
Molecular resists are of increasing interest as a route to improving the resolution - line width roughness - sensitivity trade…
A novel method for performing top surface imaging (TSI) on a single polymeric photoresist film using area selective atomic layer…
As reported previously, we developed a novel oxime sulfonate type of photoacid generator (PAG), 2-[2,2,3,3,4,4,5,5,6,6,7,7…
We have investigated the possibility of amorphous low molecular weight polyphenols as a chemically amplified positive-tone…
The microelectronics industry is increasingly looking towards high resolution lithographic techniques, such as electron beam (E…
It is confirmed that strong inhibitors must not only interact with the polymer but also are highly hydrophobic. A proportional…
A new, simple, highly sensitive, and reliable technique has been developed for measuring acid concentration in solutions and in…
The reverse polarity change from a polar to a nonpolar state has been successfully incorporated in the design of chemical…