krypton fluoride
National Institutes of Health
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Electra is a repetitively pulsed, electron beam pumped Krypton Fluoride (KrF) laser at the Naval Research Laboratory that is…
As Argon Fluoride (ArF) lithography moves into high volume production, ArF light sources need to meet performance requirements…
Abstract : The krypton fluoride (KrF) laser is a leading candidate driver for inertial fusion energy. Some of the current fusion…
Electra is a 700 J, repetitively pulsed, electron beam pumped krypton fluoride (KrF) laser that is developing technologies to…
Abstract : Electra is a Krypton Fluoride (KrF) laser to develop the science and technology for Inertial Fusion Energy. The…
A new focus monitor reticle is proposed to measure field curvature and even wave-front aberrations. A grating pattern comprising…
Techniques for measurement of higher-order aberrations of a projection optical system in photolithographic exposure tools have…
In optical lithography, it is a serious problem that aberrations in projection lenses reduce the imaging quality. Therefore…
The Excimer laser can be used to remove biological debris from underlying substrates. The ability of the krypton fluoride (KrF…
We evaluated the effects of argon fluoride (ArF) and krypton fluoride (KrF) excimer lasers on ocular structures. We produced…