aluminum nitride

Known as: aluminum nitride (AlN) 
 
National Institutes of Health

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2014
2014
We have successfully demonstrated highly responsive, curved piezoelectric micromachined ultrasonic transducers (pMUTs) based on a… (More)
  • figure 7
Is this relevant?
2013
2013
Aluminum nitride (AlN) is an appealing nonlinear optical material for on-chip wavelength conversion. Here we report optical… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
Is this relevant?
Highly Cited
2012
Highly Cited
2012
The complex refractive index components, n and k, have been studied for thin films of several common dielectric materials with a… (More)
  • table 1
  • table 3
  • table 6
  • table 4
  • figure 3
Is this relevant?
Highly Cited
2010
Highly Cited
2010
In this paper, the temperature compensation of AlN Lamb wave resonators using edge-type reflectors is theoretically studied and… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
2009
2009
  • R. B. Karabalin, Matthew Matheny, +6 authors Michael L. Roukes
  • 2009
We demonstrate piezoelectrically actuated, electrically tunable nanomechanical resonators based on multilayers containing a 100… (More)
  • figure 1
  • figure 2
  • figure 3
Is this relevant?
Highly Cited
2009
Highly Cited
2009
Adv. Mater. 2009, 21, 593–596 2009 WILEY-VCH Verlag Gm The industrial demand for higher-temperature piezoelectric sensors is… (More)
  • figure 1
  • figure 3
  • figure 2
  • figure 4
  • figure 6
Is this relevant?
2009
2009
Copyright 2009 American Institute of Physics. This article may be downloaded for personal use only. Any other use requires prior… (More)
Is this relevant?
2008
2008
This paper describes the development of aluminum nitride (AlN) resonant accelerometers that can be integrated directly over… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • table I
Is this relevant?
2007
2007
This paper reports post-CMOS compatible aluminum nitride (AlN) MEMS resonators, filters, and resonant sensors for the… (More)
  • figure 1
  • figure 3
  • figure 4
  • figure 5
  • figure 2
Is this relevant?
Highly Cited
2006
Highly Cited
2006
This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?