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- Publications
- Influence
Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
- G. Piazza, P.J. Stephanou, A.P. Pisano
- Materials Science
- Journal of Microelectromechanical Systems
- 4 December 2006
This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanical… Expand
Super-high-frequency two-port AlN contour-mode resonators for RF applications
- M. Rinaldi, C. Zuniga, C. Zuo, G. Piazza
- Materials Science, Medicine
- IEEE Transactions on Ultrasonics, Ferroelectrics…
- 2010
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonators… Expand
Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators
Abstract This paper reports experimental results on single-chip multi-frequency channel-select filters based on self-coupled piezoelectric aluminum nitride (AlN) contour-mode microelectromechanical… Expand
Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators
- G. Piazza, P.J. Stephanou, A.P. Pisano
- Materials Science
- Journal of Microelectromechanical Systems
- 10 April 2007
This paper reports experimental results on a new class of single-chip multiple-frequency (up to 236 MHz) filters that are based on low motional resistance contour-mode aluminum nitride piezoelectric… Expand
1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators
- C. Zuo, J. Van der Spiegel, G. Piazza
- Engineering, Medicine
- IEEE Transactions on Ultrasonics, Ferroelectrics…
- 2010
This paper reports on the first demonstration of a 1.05-GHz microelectromechanical (MEMS) oscillator based on lateral-field-excited (LFE) piezoelectric AlN contourmode resonators. The oscillator… Expand
Reconfigurable CMOS Oscillator Based on Multifrequency AlN Contour-Mode MEMS Resonators
- M. Rinaldi, C. Zuo, J. Van der Spiegel, G. Piazza
- Materials Science
- IEEE Transactions on Electron Devices
- 31 January 2011
This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-semiconductor (CMOS) oscillator based on microelectromechanical system (MEMS) resonators operating at four… Expand
Anchor Losses in AlN Contour Mode Resonators
- J. Segovia-Fernandez, M. Cremonesi, C. Cassella, A. Frangi, G. Piazza
- Materials Science
- Journal of Microelectromechanical Systems
- 1 April 2015
In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour mode resonators for three different resonance frequency devices (fr) (220 MHz, 370 MHz, and 1.05 GHz). For… Expand
5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators
- M. Rinaldi, C. Zuniga, G. Piazza
- Materials Science
- IEEE 22nd International Conference on Micro…
- 27 March 2009
This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectric… Expand
Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators
- C. Zuo, N. Sinha, J. Van der Spiegel, G. Piazza
- Engineering
- IEEE International Frequency Control Symposium
- 19 May 2008
This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noise… Expand
Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering
This paper reports on a new type of microresonators enabled by micromachining of ion sliced X -cut LiNbO3 thin films. In operation, the device is excited into lateral vibrations, thus allowing the… Expand