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Piezoelectric Aluminum Nitride Vibrating Contour-Mode MEMS Resonators
This paper reports theoretical analysis and experimental results on a new class of rectangular plate and ring-shaped contour-mode piezoelectric aluminum nitride radio-frequency microelectromechanicalExpand
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Super-high-frequency two-port AlN contour-mode resonators for RF applications
This paper reports on the design and experimental verification of a new class of thin-film (250 nm) superhigh- frequency laterally-vibrating piezoelectric microelectromechanical (MEMS) resonatorsExpand
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Very high frequency channel-select MEMS filters based on self-coupled piezoelectric AlN contour-mode resonators
Abstract This paper reports experimental results on single-chip multi-frequency channel-select filters based on self-coupled piezoelectric aluminum nitride (AlN) contour-mode microelectromechanicalExpand
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Single-Chip Multiple-Frequency ALN MEMS Filters Based on Contour-Mode Piezoelectric Resonators
This paper reports experimental results on a new class of single-chip multiple-frequency (up to 236 MHz) filters that are based on low motional resistance contour-mode aluminum nitride piezoelectricExpand
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1.05-GHz CMOS oscillator based on lateral- field-excited piezoelectric AlN contour- mode MEMS resonators
This paper reports on the first demonstration of a 1.05-GHz microelectromechanical (MEMS) oscillator based on lateral-field-excited (LFE) piezoelectric AlN contourmode resonators. The oscillatorExpand
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Reconfigurable CMOS Oscillator Based on Multifrequency AlN Contour-Mode MEMS Resonators
This paper reports on the first demonstration of a reconfigurable complementary-metal-oxide-semiconductor (CMOS) oscillator based on microelectromechanical system (MEMS) resonators operating at fourExpand
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Anchor Losses in AlN Contour Mode Resonators
In this paper, we analyze possible sources of dissipation in aluminium nitride (AlN) contour mode resonators for three different resonance frequency devices (fr) (220 MHz, 370 MHz, and 1.05 GHz). ForExpand
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5-10 GHz AlN Contour-Mode Nanoelectromechanical Resonators
This paper reports on the design and experimental verification of Super High Frequency (SHF) laterally vibrating NanoElctroMechanical (NEMS) resonators. For the first time, AlN piezoelectricExpand
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Multi-frequency pierce oscillators based on piezoelectric AlN contour-mode MEMS resonators
This paper reports on the first demonstration of multi-frequency (176, 222, 307, and 482 MHz) oscillators based on piezoelectric AlN contour-mode MEMS resonators. All the oscillators show phase noiseExpand
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Design and Analysis of Lithium–Niobate-Based High Electromechanical Coupling RF-MEMS Resonators for Wideband Filtering
  • S. Gong, G. Piazza
  • Materials Science
  • IEEE Transactions on Microwave Theory and…
  • 2013
This paper reports on a new type of microresonators enabled by micromachining of ion sliced X -cut LiNbO3 thin films. In operation, the device is excited into lateral vibrations, thus allowing theExpand
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