Sheet resistance

Known as: Ohms per square, Surface resistivity, Area resistivity 
Sheet resistance is a measure of resistance of thin films that are nominally uniform in thickness. It is commonly used to characterize materials made… (More)
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Topic mentions per year

Topic mentions per year

1975-2017
05010019752017

Papers overview

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2016
2016
This paper will examine the influence of ion angle deviation (IAD) on sheet resistance. The IAD is derived from the beam… (More)
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2013
2013
This paper presents proof-of-concept data for a method of determining the emitter sheet resistance of a diffused wafer from a… (More)
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2011
2011
A novel method for the contactless sheet resistance measurement is presented. The sheet resistance of a silicon wafer has been… (More)
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2011
2011
In this paper we report on the formation of high quality contacts to HHSE with a sheet resistance variation of ≥30 &#x03A9… (More)
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2010
2010
Electroplated copper films are known to change their microstructure due to the self-annealing effect. The self-annealing effect… (More)
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2006
2006
This paper discusses the physical nature of the optimum sheet resistance of noise suppression sheets/films based on three… (More)
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2006
2006
This paper presents work on the development, fabrication and characterization of a suspended Greek cross measurement platform… (More)
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1986
1986
A new test structure was developed for evaluating the line spacing between conductors on the same layer by using an electrical… (More)
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1984
1984
The concept of contact resistivity is discussed briefly and a technique for its measurement is presented. This technique allows… (More)
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Highly Cited
1982
Highly Cited
1982
In characterizing ohmic contacts using the transmission line model, it is necessary to make a measurement referred to as the… (More)
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