Quantum lithography

Quantum lithography is a type of photolithography, which exploits non-classical properties of the photons, such as quantum entanglement, in order to… (More)
Wikipedia

Related topics

Related topics

8 relations
NOON stateQuantumQuantum entanglementQuantum imaging
(More)

Broader (2)

Quantum information scienceQuantum mechanics

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2015
Highly Cited
2015
Hole-Mask Colloidal Lithography for the Fabrication of Large-Area Low-Cost Plasmonic Multishape Single-Layer Metasurfaces
Nanostructuring for tailored optical functionality suffers from a lack of methods for large-area and low-cost fabrication. While… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
2009
Highly Cited
2009
Fabrication of nanopillars by nanosphere lithography
A low cost nanosphere lithography method for patterning and generation of semiconductor nanostructures provides a potential… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
2008
Highly Cited
2008
Lithography and Other Patterning Techniques for Future Electronics
For all technologies, from flint arrowheads to DNA microarrays, patterning the functional material is crucial. For semiconductor… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
2007
2007
Is entanglement dispensable in quantum lithography?
Can classical light simulate the effect of quantum lithography? The analysis of the two-photon image generated both by entangled… (More)
  • figure 1
Is this relevant?
2006
2006
Quantum lithography: A non-computing application of quantum information
Quantum information theory holds the promise of revolutionizing technologies other than computing and communications. In this… (More)
  • figure 1
  • figure 2
  • figure 3
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
2004
Highly Cited
2004
Low-loss SOI photonic wires and ring resonators fabricated with deep UV lithography
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep… (More)
  • figure 1
  • figure 2
  • figure 4
  • figure 3
  • table I
Is this relevant?
Highly Cited
1999
Highly Cited
1999
Nanosphere Lithography : Size-Tunable Silver Nanoparticle and Surface Cluster Arrays
Nanosphere lithography (NSL) is an inexpensive, inherently parallel, high-throughput, and materials-general nanofabrication… (More)
  • figure 1
  • figure 3
  • figure 2
  • table 1
  • figure 4
Is this relevant?
Highly Cited
1997
Highly Cited
1997
Sub-10 nm imprint lithography and applications
Nanoimprint lithography (NIL) is a new lithography paradigm that is based on deformation of a resist by compression molding… (More)
  • figure 1
  • figure 4
  • figure 2
  • figure 3
  • figure 5
Is this relevant?
Highly Cited
1996
Highly Cited
1996
Nanoimprint lithography
Nanoimprint lithography, a high-throughput, low-cost, nonconventional lithographic method proposed and demonstrated recently, has… (More)
  • figure 1
  • figure 3
  • figure 2
  • figure 4
  • figure 5
Is this relevant?
Highly Cited
1995
Highly Cited
1995
Nanosphere lithography : A materials general fabrication process for periodic particle array surfaces
In this article nanosphere lithography ~NSL! is demonstrated to be a materials general fabrication process for the production of… (More)
  • figure 1
  • figure 2
  • figure 3
  • table I
  • figure 4
Is this relevant?