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Quantum lithography

Quantum lithography is a type of photolithography, which exploits non-classical properties of the photons, such as quantum entanglement, in order to… 
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Related topics

Related topics

8 relations
NOON stateQuantumQuantum entanglementQuantum imaging

Broader (2)

Quantum information scienceQuantum mechanics

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2008
Highly Cited
2008
Lithography and Other Patterning Techniques for Future Electronics
For all technologies, from flint arrowheads to DNA microarrays, patterning the functional material is crucial. For semiconductor… 
Highly Cited
2007
Highly Cited
2007
Nanoimprinted Semitransparent Metal Electrodes and Their Application in Organic Light‐Emitting Diodes
Organic light-emitting diodes (OLEDs) are promising for full-color, full-motion, flat panel display applications because they… 
Highly Cited
2006
Highly Cited
2006
Silicon Vertically Integrated Nanowire Field Effect Transistors
Silicon nanowires have received considerable attention as transistor components because they represent a facile route toward sub… 
Review
2005
Review
2005
Optical and Interferometric Lithography - Nanotechnology Enablers
Interferometric lithography (IL), the interference of a small number of coherent optical beams, is a powerful technique for the… 
Highly Cited
2004
Highly Cited
2004
Polymer Imprint Lithography with Molecular-Scale Resolution
We show that small diameter, single-walled carbon nanotubes can serve as templates for performing polymer imprint lithography… 
Highly Cited
2003
Highly Cited
2003
Nanoscale molecular-switch devices fabricated by imprint lithography
Nanoscale molecular-electronic devices comprising a single molecular monolayer of bistable [2]rotaxanes sandwiched between two 40… 
Highly Cited
2002
Highly Cited
2002
Angle-Resolved Nanosphere Lithography: Manipulation of Nanoparticle Size, Shape, and Interparticle Spacing
This work presents a novel approach to fine-tuning the size, shape, and interparticle spacing of nanoparticles fabricated by… 
Highly Cited
2002
Highly Cited
2002
Fabrication of 10 nm enclosed nanofluidic channels
We made uniform arrays of nanometer scale structures using nanoimprint lithography over large areas (100 mm wafers). The… 
Highly Cited
1999
Highly Cited
1999
Nanosphere Lithography: Effect of the External Dielectric Medium on the Surface Plasmon Resonance Spectrum of a Periodic Array of Silver Nanoparticles
In this paper we examine the effect of solvent on the optical extinction spectrum of periodic arrays of surface-confined silver… 
Highly Cited
1999
Highly Cited
1999
Nanosphere Lithography: Surface Plasmon Resonance Spectrum of a Periodic Array of Silver Nanoparticles by Ultraviolet−Visible Extinction Spectroscopy and Electrodynamic Modeling
In this paper we measure the optical extinction spectrum of a periodic array of silver nanoparticles fabricated by nanosphere… 
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