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Quantum lithography

Quantum lithography is a type of photolithography, which exploits non-classical properties of the photons, such as quantum entanglement, in order to… 
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Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2008
Highly Cited
2008
Nanoimprint with a large-scale nanoporous Si mold is developed to fabricate high density periodic nanopillars (∼1010∕cm2) in… 
Highly Cited
2005
Highly Cited
2005
A key issue in nanoimprint lithography (NIL) is determining the ultimate pitch resolution achievable for various pattern shapes… 
Highly Cited
2004
Highly Cited
2004
For the first time, 8 Gb multi-level cell (MLC) NAND flash memory with 63 nm design rule is developed for mass storage… 
Highly Cited
2003
Highly Cited
2003
A general and scalable method has been developed for patterning nanometer scale lines hierarchically over large areas using… 
Highly Cited
2000
Highly Cited
2000
We demonstrated the fabrication of Fresnel zone plates with a 75 nm minimum feature size and circular gratings with a 20 nm… 
Highly Cited
1999
Highly Cited
1999
In this paper we measure the optical extinction spectrum of a periodic array of silver nanoparticles fabricated by nanosphere… 
Highly Cited
1997
Highly Cited
1997
Nanofabrication developed by using electron beam (EB) are described. Ten-nm structures of organic positive and negative resist… 
Highly Cited
1995
Highly Cited
1995
Lithography on (100) single‐crystal silicon and amorphous silicon is performed by electric‐field‐enhanced local oxidation of… 
Highly Cited
1993
Highly Cited
1993
Interferometric lithography provides a simple, inexpensive technique for the fabrication of large areas of extreme sub…