Quantum lithography

Quantum lithography is a type of photolithography, which exploits non-classical properties of the photons, such as quantum entanglement, in order to… (More)
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Highly Cited
2015
Highly Cited
2015
Nanostructuring for tailored optical functionality suffers from a lack of methods for large-area and low-cost fabrication. While… (More)
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Highly Cited
2009
Highly Cited
2009
A low cost nanosphere lithography method for patterning and generation of semiconductor nanostructures provides a potential… (More)
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Highly Cited
2008
Highly Cited
2008
For all technologies, from flint arrowheads to DNA microarrays, patterning the functional material is crucial. For semiconductor… (More)
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2007
2007
Can classical light simulate the effect of quantum lithography? The analysis of the two-photon image generated both by entangled… (More)
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2006
2006
Quantum information theory holds the promise of revolutionizing technologies other than computing and communications. In this… (More)
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Highly Cited
2004
Highly Cited
2004
We demonstrate single-mode photonic wires in silicon-on-insulator with propagation loss as low as 2.4 dB/cm, fabricated with deep… (More)
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Highly Cited
1999
Highly Cited
1999
Nanosphere lithography (NSL) is an inexpensive, inherently parallel, high-throughput, and materials-general nanofabrication… (More)
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Highly Cited
1997
Highly Cited
1997
Nanoimprint lithography (NIL) is a new lithography paradigm that is based on deformation of a resist by compression molding… (More)
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Highly Cited
1996
Highly Cited
1996
Nanoimprint lithography, a high-throughput, low-cost, nonconventional lithographic method proposed and demonstrated recently, has… (More)
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Highly Cited
1995
Highly Cited
1995
In this article nanosphere lithography ~NSL! is demonstrated to be a materials general fabrication process for the production of… (More)
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