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Micromirror device

Micromirror devices are devices based on microscopically small mirrors. The mirrors are Microelectromechanical systems (MEMS), which means that their… 
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Digital Light ProcessingDigital micromirror deviceMicroelectromechanical systems

Papers overview

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2016
2016
Generation of atmospheric wavefronts using binary micro-mirror arrays
To simulate in the laboratory the influence that the turbulent atmosphere has on light beams, we introduce a practical method for… 
2014
2014
Micromirror device micromirror array and projection device
Die vorliegende Erfindung offenbart eine Mikrospiegelvorrichtung mit einem Substratstapel mit einem ersten Substrat, welches in… 
2013
2013
And a method of manufacturing a micromirror device of the micromirror device
The present invention relates to a micromirror device having at least one mirror plate, the mirror plate is suspended by one or… 
2011
2011
Micromirror device having line-shaped bending spring as well as methods for the preparation thereof
A method for manufacturing a micro-mirror device (100) comprising at least one micro mirror (10) and at least one electrode (40… 
2009
2009
Magnetically Deflectable Mems Actuators For Optical Sensing Applications
In this work, new small deflection magnetic actuators have been proposed, designed, and tested for applications in Surface… 
2008
2008
Reduced order thermal modeling of a one-dimensional electrothermally actuated micromirror device
A reduced order thermal model of a one-dimensional (1D) electrothermally actuated micromirror device is reported. Thermal… 
2008
2008
Rapid 3D measurement of human faces for biometric application by digital fringe projection with digital light projection (DLP®)
Facial recognitions of people can be used for the identification of individuals, or can serve as verification e.g. for access… 
2007
2007
ersatile stepper based maskless icrolithography using a liquid crystal display or direct write of binary and multilevel icrostructures
evin Heggarty roupe des Ecoles des Télécommunications cole Nationale Supérieure des Télécommunications de Bretagne echnopôle… 
2004
2004
BULK MICROMACHINED TITANIUM MICROMIRROR DEVICE WITH SLOPING ELECTRODE GEOMETRY
This paper reports the fabrication of a bulk micromachined hybrid torsional micromirror device composed of titanium mirror… 
2004
2004
Recent advances in a linear micromirror array for high-resolution projection
The visual displays of contemporary military flight simulators lack adequate definition to represent scenes in basic fast-jet…