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Micro-Electrical-Mechanical Systems

Known as: Micro Electro Mechanical Systems, Micro-Electrical-Mechanical System, System, Micro-Electrical-Mechanical 
A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron… 
National Institutes of Health

Papers overview

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2010
2010
The validity and applicability of a high-level simulation approach of radio-frequency microelectromechanical-system (RF-MEMS… 
2007
2007
We report the propagation characteristics of THz pulses on micro-strip-lines and coplanar strip-lines, utilizing low permittivity… 
Highly Cited
2003
Highly Cited
2003
We have developed a novel technique of sacrificial layer etching for micro electro mechanical systems (MEMS). Our technique uses… 
Highly Cited
2003
Highly Cited
2003
A number of studies have been conducted on structural health monitoring for buildings and civil engineering structures in recent… 
2000
2000
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few… 
1998
1998
Summary All patients undergoing neurological surgery are at risk for serious complications. Ischaemic damage presenting with… 
Highly Cited
1965
Highly Cited
1965
Introduction USING THE electro-oculographic method, Aserinsky and Kleitman 2-4 recorded eye movements during sleep. They…