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Micro-Electrical-Mechanical Systems
Known as:
Micro Electro Mechanical Systems
, Micro-Electrical-Mechanical System
, System, Micro-Electrical-Mechanical
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A class of devices combining electrical and mechanical components that have at least one of the dimensions in the micrometer range (between 1 micron…
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National Institutes of Health
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Related topics
Related topics
2 relations
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BioMEMS
standards characteristics
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
2010
2010
Experimental Validation of Mixed Electromechanical and Electromagnetic Modeling of RF-MEMS Devices Within a Standard IC Simulation Environment
Jacopo Iannacci
,
R. Gaddi
,
A. Gnudi
Journal of microelectromechanical systems
2010
Corpus ID: 12197925
The validity and applicability of a high-level simulation approach of radio-frequency microelectromechanical-system (RF-MEMS…
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2007
2007
THz wave propagation on strip lines: Devices, properties, and applications
Y. Kadoya
International Conference on Applied…
2007
Corpus ID: 34276348
We report the propagation characteristics of THz pulses on micro-strip-lines and coplanar strip-lines, utilizing low permittivity…
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2007
2007
Monte Carlo simulations of gas flow and heat transfer in vacuum packaged MEMS devices
Hongwei Liu
,
Moran Wang
,
+4 authors
Xing Zhang
2007
Corpus ID: 53423263
Highly Cited
2003
Highly Cited
2003
Vapor Hydrofluoric Acid Sacrificial Release Technique for Micro Electro Mechanical Systems Using Labware
Y. Fukuta
,
H. Fujita
,
H. Toshiyoshi
2003
Corpus ID: 55916853
We have developed a novel technique of sacrificial layer etching for micro electro mechanical systems (MEMS). Our technique uses…
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Highly Cited
2003
Highly Cited
2003
A study on building risk monitoring using wireless sensor network MICA mote
N. Kurata
,
B. Spencer
,
M. Ruiz‐Sandoval
,
Y. Miyamoto
,
Y. Sako
2003
Corpus ID: 41973326
A number of studies have been conducted on structural health monitoring for buildings and civil engineering structures in recent…
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2000
2000
Low-Order Squeeze Film Model for Simulation of MEMS Devices
Satish Vemuri
,
G. Fedder
,
T. Mukherjee
2000
Corpus ID: 35888733
A low-order behavioral squeeze film model of oscillating planar microstructures with critical dimensions in the range of a few…
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Highly Cited
1998
Highly Cited
1998
Quantitative electro-oculography and electroencephalography as indices of alertness.
K. Hyoki
,
Masahiro Shigeta
,
Masahiro Shigeta
,
Norifumi Tsuno
,
Y. Kawamuro
,
T. Kinoshita
Electroencephalography and Clinical…
1998
Corpus ID: 24818921
1998
1998
An Increase in Extracellular Glutamate is a Sensitive Method of Detecting Ischaemic Neuronal Damage during Cranial Base and Cerebrovascular Surgery. An in Vivo Microdialysis Study
A. Mendelowitsch
,
L. Sekhar
,
+5 authors
A. Shuaib
Acta Neurochirurgica
1998
Corpus ID: 9628895
Summary All patients undergoing neurological surgery are at risk for serious complications. Ischaemic damage presenting with…
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Highly Cited
1965
Highly Cited
1965
Eye movements of waking subjects with closed eyes. A comparison between normals and chronic schizophrenics.
Y. Shimazono
,
K. Ando
,
S. Sakamoto
,
T. Tanaka
,
T. Eguchi
,
H. Nakamura
Archives of General Psychiatry
1965
Corpus ID: 42585227
Introduction USING THE electro-oculographic method, Aserinsky and Kleitman 2-4 recorded eye movements during sleep. They…
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Highly Cited
1964
Highly Cited
1964
STUDIES OF THE RELATION BETWEEN THE FROG'S ELECTRO-OLFACTOGRAM (EOG) AND SINGLE UNIT ACTIVITY IN THE OLFACTORY BULB.
K. B. Doeving
Acta Physiologica Scandinavica
1964
Corpus ID: 27116553
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