Metal gate

A metal gate, in the context of a lateral Metal-Oxide-Semiconductor MOS stack, is just that—the gate material is made from a metal. For decades (i.e… (More)
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Highly Cited
2012
Highly Cited
2012
We report on measured radiation-induced soft error rates (SER) of memory and logic devices built in a 22 nm high-k metal gate… (More)
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Highly Cited
2012
Highly Cited
2012
A leading edge 22nm 3-D tri-gate transistor technology has been optimized for low power SoC products for the first time. Low… (More)
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Highly Cited
2009
Highly Cited
2009
A 32nm logic technology for high performance microprocessors is described. 2nd generation high-k + metal gate transistors provide… (More)
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Highly Cited
2008
Highly Cited
2008
We have clarified that, in a metal/high-k gate stack, as well as the variability introduced by random dopant fluctuations (RDF… (More)
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Highly Cited
2008
Highly Cited
2008
Two key process features that are used to make 45 nm generation metal gate + high-k gate dielectric CMOS transistors are… (More)
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Highly Cited
2007
Highly Cited
2007
A 45 nm logic technology is described that for the first time incorporates high-k + metal gate transistors in a high volume… (More)
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Highly Cited
2006
Highly Cited
2006
We have combined the benefits of the fully depleted tri-gate transistor architecture with high-k gate dielectrics, metal gate… (More)
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Highly Cited
2005
Highly Cited
2005
Introduction This paper addresses the possible future convergence of silicon CMOS and MEMS technologies in terms of new… (More)
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Highly Cited
2002
Highly Cited
2002
The dependence of the metal gate work function on the underlying gate dielectric in advanced metal-oxide-semiconductor ~MOS! gate… (More)
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Highly Cited
2002
Highly Cited
2002
A novel low thermal budget (/spl les/400/spl deg/C) germanium MOS process with high-/spl kappa/ gate dielectric and metal gate… (More)
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