Skip to search formSkip to main contentSkip to account menu

High-κ dielectric

Known as: High-k dielectric, High-k, High-k Metals 
The term high-κ dielectric refers to a material with a high dielectric constant κ (as compared to silicon dioxide). High-κ dielectrics are used in… 
Wikipedia (opens in a new tab)

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2010
Highly Cited
2010
Further improving complementary metal oxide semiconductor performance beyond the 22 nm generation likely requires the use ofhigh… 
Review
2006
Review
2006
The paper reviews our recent progress and current challenges in implementing advanced gate stacks composed of high-κ dielectric… 
Highly Cited
2006
Highly Cited
2006
An external dielectric coating is shown to enhance energy conversion in an organic photovoltaic cell with metal anode and cathode… 
Highly Cited
2002
Highly Cited
2002
An advanced CMOS process has been proposed which include key features: 75 nm gate length damascene metal gate, high-k dielectrics… 
Highly Cited
2001
Highly Cited
2001
The observation of electron emission from amorphous carbon thin films at low applied electric fields is explained in terms of an… 
Review
1999
Review
1999
This paper gives a short overview of issues associated with the surface preparation of silicon surfaces for advanced gate… 
Highly Cited
1997
Highly Cited
1997
We apply boundary integrals to the analysis of diffraction from both conductive and dielectric diffractive optical elements… 
Highly Cited
1988
Highly Cited
1988
  • M. Moharam
  • 1988
  • Corpus ID: 137361427
Diffraction by two-dimensional surface-relief dielectric gratings are analyzed using rigorous three-dimensional vector coupled… 
Highly Cited
1984
Highly Cited
1984
Highly Cited
1980
Highly Cited
1980
Based on an exact solution of the pertinent boundary-value problem, a method is presented for finding the electromagnetic fields…