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High-κ dielectric
Known as:
High-k dielectric
, High-k
, High-k Metals
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The term high-κ dielectric refers to a material with a high dielectric constant κ (as compared to silicon dioxide). High-κ dielectrics are used in…
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Electronic engineering
Papers overview
Semantic Scholar uses AI to extract papers important to this topic.
Highly Cited
2010
Highly Cited
2010
High Quality Ge Virtual Substrates on Si Wafers with Standard STI Patterning
R. Loo
,
Gang Wang
,
+4 authors
M. Caymax
2010
Corpus ID: 14209261
Further improving complementary metal oxide semiconductor performance beyond the 22 nm generation likely requires the use ofhigh…
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Review
2006
Review
2006
Advanced high-κ dielectric stacks with polySi and metal gates
P. GusevE.
,
NarayananV.
,
M. FrankM.
2006
Corpus ID: 215856956
The paper reviews our recent progress and current challenges in implementing advanced gate stacks composed of high-κ dielectric…
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Highly Cited
2006
Highly Cited
2006
Enhanced optical field intensity distribution in organic photovoltaic devices using external coatings
B. O’Connor
,
K. An
,
K. Pipe
,
Yiying Zhao
,
M. Shtein
2006
Corpus ID: 122259713
An external dielectric coating is shown to enhance energy conversion in an organic photovoltaic cell with metal anode and cathode…
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Highly Cited
2002
Highly Cited
2002
75 nm damascene metal gate and high-k integration for advanced CMOS devices
B. Guillaumot
,
X. Garros
,
+16 authors
S. Deleonibus
Digest. International Electron Devices Meeting,
2002
Corpus ID: 738647
An advanced CMOS process has been proposed which include key features: 75 nm gate length damascene metal gate, high-k dielectrics…
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Highly Cited
2001
Highly Cited
2001
Origin of electric field enhancement in field emission from amorphous carbon thin films
J. D. Carey
,
R. D. Forrest
,
S. Silva
2001
Corpus ID: 10213870
The observation of electron emission from amorphous carbon thin films at low applied electric fields is explained in terms of an…
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Review
1999
Review
1999
Characterization of silicon surface preparation processes for advanced gate dielectrics
H. Okorn-Schmidt
IBM Journal of Research and Development
1999
Corpus ID: 207625269
This paper gives a short overview of issues associated with the surface preparation of silicon surfaces for advanced gate…
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Highly Cited
1997
Highly Cited
1997
Boundary integral methods applied to the analysis of diffractive optical elements
D. Prather
,
M. Mirotznik
,
J. Mait
1997
Corpus ID: 54206019
We apply boundary integrals to the analysis of diffraction from both conductive and dielectric diffractive optical elements…
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Highly Cited
1988
Highly Cited
1988
Coupled-Wave Analysis Of Two-Dimensional Dielectric Gratings
M. Moharam
Photonics West - Lasers and Applications in…
1988
Corpus ID: 137361427
Diffraction by two-dimensional surface-relief dielectric gratings are analyzed using rigorous three-dimensional vector coupled…
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Highly Cited
1984
Highly Cited
1984
Nonradiative dielectric waveguide
T. Yoneyama
1984
Corpus ID: 107643399
Highly Cited
1980
Highly Cited
1980
Scattering and guiding of waves by dielectric gratings with arbitrary profiles
K. Chang
,
V. Shah
,
T. Tamir
1980
Corpus ID: 43103977
Based on an exact solution of the pertinent boundary-value problem, a method is presented for finding the electromagnetic fields…
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