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High-κ dielectric

Known as: High-k dielectric, High-k, High-k Metals 
The term high-κ dielectric refers to a material with a high dielectric constant κ (as compared to silicon dioxide). High-κ dielectrics are used in… 
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Related topics

Related topics

16 relations
Antenna effectApple A7Atom (system on chip)Atomic layer deposition

Broader (1)

Electronic engineering

Papers overview

Semantic Scholar uses AI to extract papers important to this topic.
2010
2010
A Configurable SRAM with Constant-Negative-Level Write Buffer for Low Voltage Operation with 0.149μm2 Cell in 32nm High-k Metal Gate CMOS
Highly Cited
2008
Highly Cited
2008
High-performance InGaZnO thin-film transistors with high-k amorphous Ba0.5Sr0.5TiO3 gate insulator
We report on high-performance n-channel thin-film transistors (TFTs) fabricated using amorphous indium gallium zinc oxide (a-IGZO… 
Review
2006
Review
2006
Advanced high-κ dielectric stacks with polySi and metal gates
The paper reviews our recent progress and current challenges in implementing advanced gate stacks composed of high-κ dielectric… 
2004
2004
Ammonia pretreatment for high-κ dielectric growth on silicon
Thermal nitridation of H∕Si(100) surfaces with NH3 gas has been studied as a pretreatment for atomic layer deposition of Al2O3… 
Highly Cited
2002
Highly Cited
2002
New Mechanism of Body Charging in Partially Depleted SOI-MOSFETs with Ultra-thin Gate Oxides
The aggressive scaling of the gate oxide leads to direct gate tunneling current, which affects the floatingbody effects in… 
Highly Cited
2001
Highly Cited
2001
Origin of electric field enhancement in field emission from amorphous carbon thin films
The observation of electron emission from amorphous carbon thin films at low applied electric fields is explained in terms of an… 
Highly Cited
1997
Highly Cited
1997
Boundary integral methods applied to the analysis of diffractive optical elements
We apply boundary integrals to the analysis of diffraction from both conductive and dielectric diffractive optical elements… 
Highly Cited
1984
Highly Cited
1984
Nonradiative dielectric waveguide
Highly Cited
1980
Highly Cited
1980
Scattering and guiding of waves by dielectric gratings with arbitrary profiles
Based on an exact solution of the pertinent boundary-value problem, a method is presented for finding the electromagnetic fields… 
Highly Cited
1971
Highly Cited
1971
A new low-loss high-k temperature-compensated dielectric for microwave applications
A new dielectric material has been developed with a temperature-stable dielectric constant of 38. The low loss exhibited at… 
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